In order to solve the problem of elemental interdiffusion between the superalloy and coating, the diffusion barrier of (AlCoCrNiRe) and (AlCoCrNiRe)O between the N5 superalloy and NiCrAlY coating was prepared by magnetron sputtering. Isothermal oxidation behaviour of the NiCrAlY coatings with diffusion barrier was evaluated at 1050 °C. The results show that the application of (AlCoCrNiRe) and (AlCoCrNiRe)O diffusion barriers significantly reduced the precipitation of TCP phase in the substrate. (AlCoCrNiRe)O high entropy ceramic diffusion barrier has a better effect of inhibiting interdiffusion because of its own properties and the oxides formed in situ. Furthermore, the NiCrAlY coating with (AlCoCrNiRe)O high entropy ceramic diffusion barrier provides higher resistance to high-temperature oxidation for the substrate.