ABSTRACT Micro-supercapacitor with tungsten nitride electrode has the potential to be used in bioelectronics for fast power supply. This study examines the electrochemical behaviour of magnetron-sputtered tungsten nitride (W2N) thin film in phosphate buffer saline (PBS) solution to evaluate their corrosion rate as electrodes in micro-supercapacitors used in bioelectronics. The electrochemical behaviour of W2N was analysed using potentiodynamic polarization (PDP) and electrochemical impedance spectroscopy (EIS) techniques. The corrosion rate of W2N was compared with commercially pure titanium (CP-Ti) and magnetron-sputtered pure iron (Fe) film. Our results show that the corrosion current density of W2N was ∼6 times higher than CP-Ti and ∼2.5 times lower than Fe. Additionally, the charge transfer resistance of W2N was 18 times lower than that of CP-Ti and 1.3 times higher than Fe. Overall, the corrosion rate of W2N was significantly higher than CP-Ti and slightly lower than Fe. In summary, the findings suggest that W2N could be a potential candidate for micro-supercapacitor electrodes in bioelectronics. However, further studies are required to fully evaluate the biodegradation behaviour of W2N in vivo.
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