The region of permanent densification beneath a Berkovich indentation imprint in silica glass is investigated using a novel chemical dissolution technique. The use of the similitude regime in sharp indentation testing allows one to record reliable data with a good spatial resolution that makes it possible to deal with low loads (typically below 10 mN) and, more importantly, crack-free imprints. The densified zone dissolves more quickly than the non densified regions. The analysis of the results, along the vertical axis, indicates that the densification zone is rather homogeneous with a steep transition to the non densified zone. The size of the densification zone, with respect to the initial free surface, is estimated to be around two times the maximum penetration depth of the instrumented indentation test. These findings are compared with those obtained by numerical simulations using different constitutive equations from the literature. A very good concordance between Raman spectroscopy and chemical probe results is found for imprints made with no or few cracking events during indentation testing.
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