Infrared Emitter Arrays Research Articles

Design of CMOS‐MEMS broadband infrared emitter arrays integrated with metamaterial absorbers based on CMOS back‐end‐of‐line

A new design of complementary metal–oxide–semiconductor microelectromechanical systems (CMOS-MEMS) broadband infrared (IR) emitter arrays with integrated metamaterial absorbers (MAs) developed by the CMOS back-end-of-line is presented. The IR emitter array is a promising broadband thermal radiation source for integrated gas sensors. Novel IR emitter arrays are designed using the Central Semiconductor Manufacturing Corporation 0.5 μm 2-poly-3-metal CMOS process. To improve the low emissivity that is commonly seen in CMOS-MEMS type IR emitters due to the inherited low emissivity of SiO2 and SiN in CMOS process, we newly adopted tri-layer metal–insulator–metal (MIM) and four-layer insulator–MIM (IMIM) MA by using the CMOS back-end metal layers and inter-layer dielectrics, thereby to excite multi-mode surface plasmon polariton resonances. The emitter integrated with IMIM MA can be electrically modulated up to 344 Hz, as theoretically predicated from thermal properties of the emitters and the radiation properties calculated based on Planck's radiation law. Simulated emissivity spectra through FEM show that the multi-mode resonances in CMOS MIM and IMIM MAs enhance emissivity and broaden the waveband effectively.

Infrared-assisted Synthesis of Lithium Nickel Cobalt Alumina Oxide Powders as Electrode Material for Lithium-ion Batteries

This study explores an efficient infrared (IR) heating technique to synthesize highly-crystalline LiNi0.8Co0.15Al0.05O2 (NCA) cathode materials for Li-ion batteries. One home-made IR induction reactor, equipped with medium-wave IR emitter array, is adopted to prepare the NCA powders at 700°C for a calcination period of 1–5h. Two kinds of preparation routes, ball milling and rheological-phase method, are used to prepare NCA precursors. The as-prepared NCA powders display well ordering of hexagonal two-dimensional layer structure with low degree of cation mixing under appropriate conditions: IR heating time (5h) and rheological-phase method. The NCA cathode exhibits an improved discharge capacity, fast Li+ diffusion rate, high rate capability, and good cycling stability. This improved performance mainly originates from low cation mixing, low defect level, and homogeneous particle size of NCA crystals. The carbon-coated NCA cathode offers high capacities of ca. 213 and 115mAhg−1 at 0.1 and 5C, respectively. Analyzed by the Randles-Sevcik plots, the diffusion coefficients in the NCA cathodes increase up to 1.73×10−8 and 5.82×10−9cm2s−1 for Li-extraction and Li-insertion, respectively. Accordingly, the IR heating route turns on a commercial feasibility to synthesize NCA cathode materials for Li-ion battery application.

A design of integrated CMOS-MEMS infrared emitter arrays

A design of integrated CMOS-MEMS infrared emitter arrays