Vapor phase infiltration (VPI) facilitates the incorporation of inorganic components into organic polymers, emerging as an effective technique for fabricating organic-inorganic hybrid materials. However, the complexity of diffusion behavior during the VPI process presents challenges in studying diffusion kinetics, particularly for highly reactive precursor-polymer systems such as trimethylaluminum (TMA) and poly(ethylene oxide) (PEO). In this study, we investigate the VPI process of TMA in PEO using in situ quartz crystal microgravimetry (QCM), which enables measurement of diffusion behavior and kinetics with high precision due to its high temporal resolution. Our results indicate that the VPI process consists of two main regions: a rapid diffusion process, corresponding to the initial penetration of the precursor into the film, followed by a slower relaxation process, attributed to the ongoing chemical reaction. The equivalent diffusion coefficient (De) was estimated to be on the order of 10-9 cm2/s and decreased with increasing aluminum content. Using energy application as a proof-of-concept, when optimized, VPI-modified PEO films were successfully utilized as solid polymer electrolytes (SPEs) for lithium metal batteries (LMBs), showcasing superior performance in mitigating lithium dendrite growth. This study offers valuable insights into the VPI process for PEO-TMA systems and provides guidance for optimizing VPI conditions to enhance the performance of advanced materials.
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