BackgroundIn capillary electrophoresis (CE), the inner surface of fused-silica capillaries is commonly covalently modified with liquid silanes to control electroosmotic flow (EOF). This liquid phase deposition (LPD) approach is challenging for long and narrow-diameter capillaries (≥1 m, ≤25 μm ID) inhibiting commercial production. Here, we use chemical vapour deposition (CVD) to covalently modify capillaries with different silanes. Using a home-built CVD device, capillaries were modified with neutral (3-glycidyloxypropyl) trimethoxysilane (GPTMS), the weak base (3-aminopropyl) trimethoxysilane (APTMS), the weak acid 3-mercaptopropyltrimethoxysilane (MPTMS) and the neutral hydrophobic trichloro(1H,1H,2H,2H-perfluorooctyl) silane (PFOCTS). Gas-phase modification of GPTMS with acid and ammonia allowed further modification of the surface prior to molecular layer deposition (MLD) of poly(p-phenylene terephthalamide) (PPTA) using the self-limiting sequential reaction between terephthalaldehyde (TA) and p-phenylenediamine (PD) vapours. ResultsCapillaries coated with GPTMS by CVD showed a greater reduction in EOF at all pH values than the conventional LPD. APTMS showed a reduction of the EOF at pH 9, with EOF reversal observed below pH 6. MPTMS provided a slightly lower EOF than an unmodified capillary at high pH, and a slightly higher EOF at lower pH. PFOCTS provided the most consistent EOF as a function of pH. The deposition of successive layers of PPTA resulted in increased surface coverage of the polymer and a greater reduction in EOF at pH higher than 5. The stability of a 10 μm ID GPTMS coated capillary was tested at pH 8.8 in a 200 mM CHES/Tris BGE for the separation of inorganic anions. Over 1.5 months of continuous operation (≈4130 runs), the reproducibility of the apparent mobilities for chloride, nitrite, nitrate and sulfate were 2.43%, 2.56%, 2.63% and 3.05%, respectively. The intra-day and inter-day column-to-column reproducibility and batch-to-batch reproducibility for all the coated capillaries ranged between 0.34% and 3.95%. SignificanceThe study demonstrates the superior performance of CVD coating for suppressing the EOF compared to LPD allowing the easy modification of long lengths of narrow capillary. The variation in silane, and the ability of MLD to modify and control the surface chemistry, provides a simple and facile method for surface modification. The stability of these coatings will allow long-term capillary electrophoresis monitoring of water chemistry, such as for monitoring fertiliser run-off in natural waters.