For large-scale terahertz (THz) reconfigurable metamaterials (RM), each unit element needs to be controlled by an independent voltage source. This leads to a huge solution space for control words to achieve the required RM performance specification. In this paper, we propose a fast AI-assisted control-word generation scheme to reduce the computation cost of electromagnetic (EM) simulations (Forward Model) and to speed up iterations for control word searches (Inverse Model). We demonstrate the effectiveness of our models by designing and fabricating a 12 × 9 RM array with a Bi-layer Bi-Split-Ring Resonator structure (B-BSRR) in standard 180 nm CMOS technology. The terahertz RM can be electrically reconfigured, providing active metamaterials with an amplitude modulation depth of around 0–1.7 dB at 0.49 THz. The results show that our Forward Model can predict the S-parameters between 100 GHz and 800 GHz with a mean absolute error of 0.61 dB. Our method is more than 200 times faster than traditional full-wave simulation methods. The Inverse Model can generate required control words within a 1.3 dB error margin in less than 200 iterations.
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