High-resolution Interference Microscope Research Articles

High-resolution interference microscopy of binary phase diffractive optical elements

In this work, we apply the high-resolution interference microscopy technique to investigate the intensity and phase of light transmitted through a binary phase element. Using a combination of simulation and experimental results, we identify specific features in the intensity and phase maps of the transmitted light that are associated with the positions of the edges of the ridges and grooves in the phase element. Specifically, we identify these features to be minima in the intensity recordings, as well as phase jumps and in some cases phase singularities in the phase maps. We focus on the former two features, as they can reliably be observed in a single z-plane intensity or phase image, respectively, focused at the top of the structure ridges. Using the edge locations extracted from the intensity and phase profiles, we estimate the dimensions of the structure ridges and grooves as well as measure the displacement of the sample on a piezo stage. With both methods, the absolute width of the ridges and grooves is measured with an accuracy of approximately 220 nm, and the sample displacement is detected to approximately 50 nm resolution.

High-resolution interference microscopy with spectral resolution for the characterization of individual particles and self-assembled meta-atoms.

We apply a high-resolution interference microscope with spectral resolution to investigate the scattering response of isolated meta-atoms in real space. The final meta-atoms consist of core-shell clusters that are fabricated using a bottom-up approach. The meta-atoms are investigated with an increasing complexity. We start by studying silica and gold spheres and conclude with the investigation of the meta-atom, which consists of a silica core sphere onto which gold nanospheres are attached. Numerical simulations entirely verify the measured data. The measuring process involves recording the intensity and phase of the total field emerging from the scattering process of an incident light at the particle in the transmitted half-space with spectral and high spatial resolution. We show that spectrally resolved high-resolution interference microscopy can be used to differentiate between nanoparticles and characterize single meta-atoms, something that is rarely accomplished.

Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy

We try to find out the details of how light fields behind the structures of photomasks develop in order to determine the best conditions and designs for proximity printing. The parameters that we use approach real situations like structure printing at proximity gaps of 20 to 50 μm and structure sizes down to 2 μm. This is the first time that an experimental analysis of light propagation through a mask is presented in detail, which includes information on intensity and phase. We use high-resolution interference microscopy (HRIM) for the measurement. HRIM is a Mach–Zehnder interferometer, which is capable of recording three-dimensional distributions of intensity and phase with diffraction-limited resolution. Our characterization technique allows plotting the evolution of the desired light field, usually called the aerial image, and therefore gives access to the printable structure until the desired proximity gap. Here, we discuss in detail the evolution of intensity and phase fields of elbow or corner structures at different positions behind a phase mask and interpret the main parameters. Of particular interest are tolerances against proximity gap variation and the theoretical explanation of the resolution in printed structures.

Leakage radiation interference microscopy

We present a proof of principle for a new imaging technique combining leakage radiation microscopy with high-resolution interference microscopy. By using oil immersion optics it is demonstrated that amplitude and phase can be retrieved from optical fields, which are evanescent in air. This technique is illustratively applied for mapping a surface mode propagating onto a planar dielectric multilayer on a thin glass substrate. The surface mode propagation constant estimated after Fourier transformation of the measured complex field is well matched with an independent measurement based on back focal plane imaging.

Submicron hollow spot generation by solid immersion lens and structured illumination

We report on the experimental and numerical demonstration of immersed submicron-size hollow focused spots, generated by structuring the polarization state of an incident light beam impinging on a micro-size solid immersion lens (μ-SIL) made of SiO2. Such structured focal spots are characterized by a doughnut-shaped intensity distribution, whose central dark region is of great interest for optical trapping of nano-size particles, super-resolution microscopy and lithography. In this work, we have used a high-resolution interference microscopy technique to measure the structured immersed focal spots, whose dimensions were found to be significantly reduced due to the immersion effect of the μ-SIL. In particular, a reduction of 37% of the dark central region was verified. The measurements were compared with a rigorous finite element method model for the μ-SIL, revealing excellent agreement between them.

Talbot images of wavelength-scale amplitude gratings

By means of experiment and simulation, we achieve unprecedented insights into the formation of Talbot images to be observed in transmission for light diffracted at wavelength-scale amplitude gratings. Emphasis is put on disclosing the impact and the interplay of various diffraction orders to the formation of Talbot images. They can be manipulated by selective filtering in the Fourier plane. Experiments are performed with a high-resolution interference microscope that measures the amplitude and phase of fields in real-space. Simulations have been performed using rigorous diffraction theory. Specific phase features, such as singularities found in the Talbot images, are discussed. This detailed analysis helps to understand the response of fine gratings. It provides moreover new insights into the fundamental properties of gratings that often find use in applications such as, e.g., lithography, sensing, and imaging.

Longitudinal-differential interferometry: direct imaging of axial superluminal phase propagation

We introduce and demonstrate a new interferometric method called longitudinal-differential (LD) interferometry, which measures the spatially resolved phase difference of the scattered field by an object relative to the illumination. This method is combined with a high-resolution interference microscope that allows recording three-dimensional field distributions in amplitude and phase. The method is applied to study the axial phase behavior of Arago spots, an effect observable in low-Fresnel-number systems behind objects with a size comparable to the wavelength. We directly observe the initial phase delay in the Arago spot and prove that the local phase velocity exceeds the speed of light in air. Such LD phase studies are applicable not only to the Arago spot but also to other kinds of light interactions with wavelength-scale objects, e.g., photonic nanojets.

Subwavelength-size solid immersion lens

We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is performed using a high-resolution interference microscope with illumination at 642 nm wavelength. The focal spots produced by the nano-SILs show both spot-size reduction and enhanced optical intensity, which are consistent with the immersion effect.

Engineering photonic nanojets

Photonic Nanojets are highly localized wave fields emerging directly behind dielectric microspheres; if suitably illuminated. In this contribution we reveal how different illumination conditions can be used to engineer the photonic Nanojets by measuring them in amplitude and phase with a high resolution interference microscope. We investigate how the wavelength, the amplitude distribution of the illumination, its polarization, or a break in symmetry of the axial-symmetric structure and the illumination affect the position, the localization and the shape of the photonic Nanojets. Various fascinating properties are systematically revealed and their implications for possible applications are discussed.

Gouy phase anomaly in photonic nanojets

We investigate in real space amplitude and phase distributions of light in photonic nanojets emerging from micrometer-sized dielectric spheres with a high-resolution interference microscope. Strong localization of light and a Gouy phase anomaly are witnessed. We show that the phase advance of photonic nanojets significantly deviates from a plane wave due to the sudden transition from a converging to a diverging wave front. Understanding such phase anomalies and verifying the presence of photonic nanojets promises to pave the way to prospective applications that may exploit the ability to localize light in spatial domains smaller than the usual resolution limit.

Amplitude and Phase Measurements of Highly Focused Light in Optical Data Storage Systems

We propose a new measurement technique to investigate the highly focused light used in optical data storage systems named immersion high resolution interference microscopy (HRIM). This system allows three-dimensional (3D) measurements of the amplitude and phase of light fields in a static scheme. In contrast to scanning techniques, HRIM allows the nondestructive investigation penetrating through the optical disc. We investigated the focusing of light in high-definition digital versatile disc (HD DVD) systems. The experimental spot sizes agree well with the theory in intensity measurements. The measured phase distributions resemble the wavefront propagation of aberration-free converging light beams. The observed phase singularity positions near the focal plane demonstrate the super-resolution capability of such measurements and give access to details of the Airy pattern. Our results prove the applicability of studying highly focused beams in advanced optical systems and its use to clarify storage mechanisms for future generations of optical memories.

Small-size microlens characterization by multiwavelength high-resolution interference microscopy

Microlenses are widely studied in two main areas: fabrication and characterization. Nowadays, characterization draws more attention because it is difficult to apply test techniques to microlenses that are used for conventional optical systems. Especially, small microlenses on a substrate are difficult to characterize because their back focus often stays in the substrate. Here we propose immersion high-resolution interference microscopy to characterize small-size microlenses at three visible wavelengths. Test results for 20-mum-diameter microlenses are presented and discussed. We cover not only standard characterizations like wavefront investigations but also experiments of actual focus properties and chromatic behaviors.

High Resolution Interference Microscopy: A Tool for Probing Optical Waves in the Far-Field on a Nanometric Length Scale

High Resolution Interference Microscopy (HRIM) is a technique that allows the characterization of amplitude and phase of electromagnetic wave-fields in the far-field with a spatial accuracy that corresponds to a few nanometers in the object plane. Emphasis is put on the precise determination of topological features in the wave-field, called phase singularities or vortices, which are spatial points within the electromagnetic wave at which the amplitude is zero and the phase is hence not determined. An experimental tool working in transmission with a resolution of 20 nm in the object plane is presented and its application to the optical characterization of various single and periodic nanostructures such as trenches, gratings, microlenses and computer generated holograms is discussed. The conditions for the appearance of phase singularities are theoretically and experimentally outlined and it is shown how dislocation pairs can be used to determine unknown parameters from an object. Their corresponding applications to metrology or in optical data storage systems are analyzed. In addition, rigorous diffraction theory is used in all cases to simulate the interaction of light with the nano-optical structures to provide theoretical confirmation of the experimental results.

Measuring optical phase singularities at subwavelength resolution

We will present experimental and theoretical studies of optical fields with subwavelength structures, in particular phase singularities and coherent detection methods with nanometric resolution. An electromagnetic field is characterized by an amplitude, a phase and a polarization state. Therefore, experimental studies require coherent detection methods, which allow one to measure the amplitude and phase of the optical field with subwavelength resolution. We will present two instruments, a heterodyne scanning probe microscope (heterodyne SNOM) and a high resolution interference microscope (HRIM). We will review some earlier work using the heterodyne SNOM, in particular the measurement of phase singularities produced by a 1 μm pitch grating with 10 nm spatial sampling. Using the HRIM we have investigated the intensity and phase distributions (with singularities) in the focal region of microlenses. The measurements are compared with the results calculated by rigorous diffraction theory.

Contraction bands: differences between physiologically vs. maximally activated single heart muscle cells.

High resolution interference and phase microscopy were used to inspect the striations' appearance in shortening rat heart cells. Isolated cells were treated with detergent so that shortening could be graded by addition of calcium. Upon activation sarcomeres shortened to form (a) contraction densities in the middle of the A band at 1.7 micrometer (b) disappearance of the I bands and (c) phase brightening of the A bands at 1.6 micrometer and (d) dense Cz contraction bands at shorter lengths. These changes are totally consistent with the uniform sliding of myofilaments of previously accepted fixed dimensions. However, the striated patterns differed significantly in intact cells which were electrically stimulated to shorten. Here individual A bands remained distinct, without phase brightening or contraction band formation despite sarcomere shortening to less than the length of the A band as measured in the unstimulated cell. Maximal activation of intact cells by barium contracture elicited the full sequence of striation changes (a-d) seen in the chemically skinned cells. Light diffraction analysis gave comparable interpretation, i.e., the protein within the shortened sarcomere in the physiologically activated cardiac cell is more narrowly distributed than expected for thick filaments of fixed dimensions. These optical differences may reflect the restricted presence of the globular myosin heads at the ends of the cardiac sarcomere. This situation would explain the narrow range of the cardiac length-tension relation.