Abstract The internal friction of deformed molybdenum single crystals with two different orientations has been measured in the 300–1300 K temperature range. After annealing to 950 K, a relaxation peak is seen in the 880–840 K range, with a hysteresis between the warming and cooling runs. For higher annealing temperatures, the peak position change to 970 K for the 〈1 1 0〉 and 1040 K for the 〈1 4 9〉 sample. The influence of a bias stress on the sample relaxation was studied. Possible mechanisms for this relaxation have been considered, and an interaction of dislocations with vacancy type point defects has been proposed.