Abstract With societal advancement, robots are increasingly being deployed in production processes. Currently, high-precision robots predominantly found in the market are delta parallel robots. Common parallel robots, including delta robots, generally suffer from the drawback of having a smaller workspace compared to serial robots. Contrasted with other types of parallel robots, coaxis parallel robots feature a larger workspace, thereby offering greater potential for application. This paper focuses on a coaxis five-bar parallel mechanism as the subject of investigation. Firstly, by employing the perturbation method to model the errors in the parallel mechanism, a mapping relationship between error sources and the errors of the mechanism’s end-effector was derived. Then a sensitivity analysis of each error source was performed statistically, yielding sensitivity metrics. Last, under conditions where the magnitudes of errors are identical, the end-effector error of a coaxis parallel mechanism is notably larger compared to that of a common parallel mechanism. This makes it more essential to conduct precision design on coaxis parallel robots in the future study.