High-performance Micro Research Articles

Heterogeneous Integration of Complementary Field-Effect Transistors for High-Performance Micro LED Displays.

This study investigates a micro light-emitting diode (µLED) pixel circuit using the heterogeneous integration of complementary field-effect transistors (CFETs). The CFETs are fabricated using a semiconductor layer composed of tellurium (Te) and indium-gallium-zinc oxide (IGZO) layers. Te and IGZO layers in the heterostructure IGZO/Te film exhibit hexagonal and amorphous phases, respectively, indicating that each layer maintains independent material characteristics. The fabricated IGZO/Te CFETs exhibit ambipolar behavior with a turn-on voltage of 2.0V and field-effect mobility of 0.74 and 1.42 cm2 V-1 s-1 for p-type and n-type channels, respectively. Inverters comprising IGZO/Te CFET and IGZO TFT exhibit inverting behavior. A µLED pixel circuit is designed using IGZO/Te CFETs based on pulse width modulation (PWM). The proposed circuit uses an inverter structure with IGZO/Te and IGZO to control the emission time, suppressing the wavelength shift of µLEDs depending on the µLED current levels. The operation of the proposed pixel circuit is investigated through simulation and measurement of the fabricated circuit. The fabricated µLED pixel circuit successfully exhibits PWM operation, controlling the emission time and luminance. Consequently, IGZO/Te CFETs show promise as devices for high-quality µLED displays.

Effects of inlet air holes on swirl flow characteristics and outlet temperature distribution in an axial swirl combustor

The air inlet holes on the swirl combustor are crucial for high-performance micro gas turbine (MGT), affecting internal airflow, fuel-air mixing, temperature distribution, and cooling. However, there are seldom studies that pay attention to the influence of the air inlet holes coupled with low volatility macromolecular fuels for fast and better fuel-air mixing and combustion processes in MGT. This study investigates the influence of primary and dilution hole positions on airflow, temperature, emissions, and combustion efficiency. Numerical simulations in ANSYS Fluent examine five inlet hole configurations in a two-stage axial swirl combustor. Simulation validation is conducted under three test conditions. The results showed that the cut-off effect of the primary hole affected the size of the swirl vortex core, and the backward movement of the primary hole resulted in a significant increase in the length of the recirculation zone and the coherence high-temperature zone, accelerated the droplet evaporation rate, and reduced CO and NO emissions. Backward movement of dilution hole alters flow field, affecting swirl vortex stability and reflow intensity. Case 3, with original dilution hole and backward extended primary hole, exhibits optimal outlet temperature distribution and combustion efficiency.

Constructing high-performance micro fuel electrodes for reversible proton ceramic electrochemical cells

Reversible proton ceramic electrochemical cells (R-PCECs) are of great interest as efficient energy conversion device. Optimization of structural design can enhance the mechanical properties and gas transport of the cells, resulting in improved electrochemical performance. In this study, we developed a 7-channel micro-monolithic R-PCEC for the first time, with uniform channel distribution and smaller gas diffusion pathway length using phase inversion/extrusion technique. The assembled cell with Ni-BaZr0.1Ce0.7Y0.1Yb0.1O3-δ (Ni-BZCYYb, fuel electrode support) | BaZr0.1Ce0.7Y0.1Yb0.1O3-δ (BZCYYb, electrolyte) | PrBa0.5Sr0.5Co1.5Fe0.5O5+δ (PBSCF, air electrode) structure showed a peak power density of 0.94 W cm−2 at 700 °C in fuel cell mode and electrolysis current density of 2.17 A cm−2 at 700 °C with an operating voltage of 1.3 V. Additionally, electrochemical impedance spectroscopy (EIS) further indicated that the diffusive polarization of the structured cell was effectively reduced compared to single-channel counterpart.

Clamping enables enhanced electromechanical responses in antiferroelectric thin films.

Thin-film materials with large electromechanical responses are fundamental enablers of next-generation micro-/nano-electromechanical applications. Conventional electromechanical materials (for example, ferroelectrics and relaxors), however, exhibit severely degraded responses when scaled down to submicrometre-thick films due to substrate constraints (clamping). This limitation is overcome, and substantial electromechanical responses in antiferroelectric thin films are achieved through an unconventional coupling of the field-induced antiferroelectric-to-ferroelectric phase transition and the substrate constraints. A detilting of the oxygen octahedra and lattice-volume expansion in all dimensions are observed commensurate with the phase transition using operando electron microscopy, such that the in-plane clamping further enhances the out-of-plane expansion, as rationalized using first-principles calculations. In turn, a non-traditional thickness scaling is realized wherein an electromechanical strain (1.7%) is produced from a model antiferroelectric PbZrO3 film that is just 100 nm thick. The high performance and understanding of the mechanism provide a promising pathway to develop high-performance micro-/nano-electromechanical systems.

High-performance micro supercapacitor assembled by laser-induced graphene electrode and hydrogel electrolyte with excellent interfacial wettability for high capacitance

In this work, we demonstrate a facile, rational and novel strategy to assemble micro-supercapacitors (MSCs) via employing laser-induced graphene (LIG) microelectrodes and sodium alginate/polyacrylamide hydrogel electrolytes soaked in sulfuric acid solution (SA/PAAM-H2SO4). The microelectrodes are conductive graphene materials with porous structure that use laser direct writing technology to carbonize insulating polyimide (PI) sheets. The importance of good wetting of the electrode material by the electrolyte on the performance of the device is explained. There is good compatibility and interfacial contact between electrode and electrolyte. Impressively, the SA/PAAM-H2SO4 hydrogel electrolyte with high ionic conductivity (574.7 mS cm−1) also exhibit good water retention capability and performs normally even after 60 h of exposure to air. The capacitance of LIG-MSCs based on SA/PAAM-H2SO4 hydrogel is comparable to that of PVA/H2SO4 hydrogel. The LIG-MSCs exhibit high areal capacitance of 7.12 mF cm−2 and outstanding cycling stability. Moreover, our LIG-MSCs displays excellent mechanical flexibility and stable performance, the capacitance is almost unaffected even in highly bent states and during continuously hammering. Furthermore, the LIG-MSCs can be arbitrarily connected in series and in parallel without the requirement of metal-based interconnects for high-voltage and high-capacitance output. Our design strategy aims to provide new insights for the development of flexible MSCs.

Challenges and Strategies for Synthesizing High Performance Micro and Nanoscale High Entropy Oxide Materials.

High-entropy oxide micro/nano materials (HEO MNMs) have shown broad application prospects and have become hot materials in recent years. This review comprehensively provides an overview of the latest developments and covers key aspects of HEO MNMs, by discussing design principles, computer-aided structural design, synthesis challenges and strategies, as well as application areas. The analysis of the synthesis process includes the role of high-throughput process in large-scale synthesis of HEOs MNMs, along with the effects of temperature elevation and undercooling on the formation of HEO MNMs. Additionally, the article summarizes the application of high-precision and in situ characterization devices in the field of HEO MNMs, offering robust support for related research. Finally, a brief introduction to the main applications of HEO MNMs is provided, emphasizing their key performances. This review offers valuable guidance for future research on HEO MNMs, outlining critical issues and challenges in the current field.

All-optical logic gates based on topological edge and corner states in two-dimensional photonic crystals with square dielectric columns

Recently, with the rapid progress in all-optical networks and optical computing, there is an increasing requirement for more appropriate methods to design all-optical logic gates. Photonic crystals (PCs) can be serving as a versatile platform for manipulating light propagation. The realization of topological edge states (TESs) and topological corner states (TCSs) within high-order topological photonic insulators has attracted extensive attention. In this paper, TESs and TCSs are achieved using honeycomb PCs with square dielectric columns instead of conventional cylindrical ones for obtaining a larger photonic energy band gap due to reduction of dielectric column symmetry. TESs with overlapping frequencies can be attained by different arrangements of combining two PCs with distinct topological properties. A sandwich structure comprising both topologically trivial and non-trivial PCs is proposed, and ‘AND Gate’ and ‘OR Gate’ logic gates are implemented through the coupling between edge state waveguides when controlling the number of coupling layers. Additionally, a triangular-shaped box structure composed of non-trivial PCs enveloped by trivial PCs is constructed. Within this structure, TCSs manifest only around each acute angle, and a ‘NOT Gate’ logic gate is realized through corner state coupling and edge state coupling. This work paves a new way of designing high-performance micro–nano all-optical logic gate devices.

Tunable Conformal Electrodeposition of Ultra-Thin Polymeric Films for Electrolyte Interphases

Functional coatings and interphases influence the stability and performance parameters of electrodes in various applications. Polymer thin films offer a wide range of molecular structures and compositions for tunable functionalities that can be custom designed to the needs of an application. In solid-state energy storage devices in particular, electrolyte-type polymeric interfaces between battery components and materials with disparate functions, such as the active electrode material and solid electrolyte could overcome some of these incompatibility detriments and the increase in contact resistance over long-term operation. In high-performance micro scale power sources, 3D thin-film all-solid-state batteries show great potential as they take advantage of both short ion diffusion distances for high-rate capability with low heat generation, as well as the third dimension for high material loading and energy density. Therefore, conformal deposition methods for ultra-thin polymeric electrolyte interphases on the interior surface of electrodes with mesoscale 3D architectures and complex porosity are in demand. Here, we report a molecular design concept of dual-functional molecules that contain electrochemically active end groups for self-limiting electropolymerization, and a core molecular motif that determines the thin film functionality. The electrodeposition of this monomer represents a non-line-of-sight coating method for polymer thin films with independently tailorable functionalities and tunable properties on conductive substrates with arbitrary shape. We exemplify this method using monomers with poly(ethylene glycol) (PEG) as the core motif for lithium-ion transport and phenol as electrochemically active end groups. We studied the electrodeposition of the monomers, poly(ethylene glycol) diphenol (PEGDP), and demonstrate their self-limiting film formation mechanism (Figure 1a) which originates from the insulating nature of resulting poly(PEGDP) film that confines the charge transfer reaction. We present an exhaustive exploration of their material-processing-structure-property relationships that reveals the multi-scale control over the ultrathin-film properties. For example, the uniform film thickness is tunable from 10 to 100s of nanometer through electrodeposition conditions and molecular design, while their molecular permeability and electronic resistance can be tailored from pervious to fully blocking. We show that the electrodeposited functional interphases fully coat complex 3D electrode architectures (Figure 1b top: uncoated carbon electrode, bottom: film coated carbon electrode) with retention of their functionality in a battery. This work demonstrates that rational molecular design enables the conformal electrodeposition of ultrathin functional coatings with solid polymer electrolyte properties on 3D structured electrodes that will enable designer interphases in various solid-state battery architectures and chemistries. Figure 1

Enhanced electrical and mechanical properties of Bi2Te3-based thermoelectric thick films enabled by a practical dynamic regulation strategy

The application of high-density and high-performance micro thermoelectric devices is still in its infancy, mainly restricted by the low performance of Bi2Te3-based thick film as well as the limited device integration. In this study, we proposed a dynamic regulation strategy to simultaneously strengthen the thermoelectric and mechanical properties for n-type Bi2Te3-based thick films. The effects of growth temperature and time on thermoelectric properties have been firstly explored. As the thermoelectric properties exhibit consistent degradation with increasing thickness at static growth temperature, an effective rising temperature method is introduced to dynamically regulate the nucleation rate and growing diffusion ability. Thus, the grain refinement with compact texture structure leads to a relatively large carrier mobility (77.1 cm2·V−1·s−1) and appropriate concentration (5.25 × 1019 cm−3) as well as further 12% improvement of power factor with an average value up to 12.0 μW·cm−1·K−2 over a wide temperature ranging from 313 K to 453 K. Furthermore, significant enhancement of mechanical property is also achieved with high elastic modules (56.03 GPa), hardness (0.63 GPa) and large energy dissipation capacity to prevent micro-cracks. This study provides a practical solution with dynamic temperature control to fabricate high-performance Bi2Te3 thick films with enhanced mechanical property and processing feasibility for micro thermoelectric devices.

Lateral Bending of Ag Nanowires toward Controllable Manipulation

Nanowires (NWs) provide opportunities for building high-performance sensors and devices at micro-/nanoscales. Directional movement and assembly of NWs have attracted extensive attention; however, controllable manipulation remains challenging partly due to the lack of understanding on interfacial interactions between NWs and substrates (or contacting probes). In the present study, lateral bending of Ag NWs was investigated under various bending angles and pushing velocities, and the mechanical performance corresponding to microstructures was clarified based on high-resolution transmission electron microscope (HRTRM) detections. The bending-angle-dependent fractures of Ag NWs were detected by an atomic force microscope (AFM) and a scanning electron microscope (SEM), and the fractures occurred when the bending angle was larger than 80°. Compared with an Ag substrate, Ag NWs exhibited a lower system stiffness according to the nanoindentation with an AFM probe. HRTRM observations indicated that there were grain boundaries inside Ag NWs, which would be contributors to the generation of fractures and cracks on Ag NWs during lateral bending and nanoindentation. This study provides a guide to controllably manipulate NWs and fabricate high-performance micro-/nanodevices.

Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition

Laser trimming promises an increasing yield in microfabrication for the high performance Micro Electro-Mechanical Systems (MEMS) resonant devices by overcoming manufacturing tolerances and tuning sensors or actuators for certain operating conditions. How to achieve a high precision and efficiency trimming at low cost is the critical issue that the technical communities are most concerned. In this paper, we proposed an automatic laser trimming system for silicon MEMS devices based on a picosecond laser source and image recognition technique (IRT). Through the design of laser focusing optical path and coaxial imaging optical path, the observation of laser machining process is realized. A set of picosecond laser trimming parameters is determined by experiments, which enables a 4um width trench on the silicon resonator. Compared with the femtosecond laser trimming systems, the cost of the pico-laser system is reduced by more than 60%. The shape matching algorithm based on OpenCV and the chord-to-point distance accumulation (CPDA) algorithm for MEMS resonators image measurement solve the problem of inefficiency of manual trimming for complex resonators. A dual-mass tuning fork resonator is used to demonstrate the feasibility of the trimming approach. It is shown that the system realizes a fine-tuning (< 0.3Hz) of the resonant frequencies. The trimming time of a single device using the automatic trimming method is reduced from more than 1 hour manual trimming to less than 1 minute. Finally, the structural stiffness imbalance of tuning fork resonator caused by the manufacturing error is eliminated, which verifies the feasibility of the system.

Multiple Fano resonances driven by bound states in the continuum in an all-dielectric nanoarrays system

Fano resonance with high Q-factor can greatly enhance the light–matter interaction in all-dielectric metasurface, which is an important condition for developing high-performance micro-/nano-photonics devices. In this paper, we present an all-dielectric metasurface structure composed of nanoarrays to investigate the properties of BIC realization and Fano resonance in the near-infrared spectral region. Four Fano profiles are generated, and two quasi-BIC resonance modes excited by MD appear when the structural symmetry is broken. All the Fano resonances modulation depth close to 100%. The spectral response of the proposed structure is also highly tunable by adjusting the polarization of the incident light and the geometric parameters of the structure. This work may provide a reference for the design of devices, such as biochemical sensing, optical switches, and optical modulators.

Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

With the increasing demand for multidirectional vibration measurements, traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity, high natural frequency, and low cross-sensitivity simultaneously. Moreover, for piezoresistive accelerometers, achieving pure axial deformation of the piezoresistive beam can greatly improve performance, but it requires the piezoresistive beam to be located in a specific position, which inevitably makes the design more complex and limits the performance improvement. Here, a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed, fabricated, and tested. By controlling synchronous displacements at both piezoresistive beam ends, the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious calculations. The measurement unit for the z-axis acceleration was innovatively designed as an interlocking proof mass structure to ensure a full Wheatstone bridge for sensitivity improvement. The pure axial stress state of the piezoresistive beams and low cross-sensitivity of all three units were verified by the finite element method (FEM). The triaxial accelerometer was fabricated and tested. Results showing extremely high sensitivities (x axis: 2.43 mV/g/5 V; y axis: 2.44 mv/g/5 V; z axis: 2.41 mV/g/5 V (without amplification by signal conditioning circuit)) and high natural frequencies (x/y axes: 11.4 kHz; z-axis: 13.2 kHz) were obtained. The approach of this paper makes it simple to design and obtain high-performance piezoresistive accelerometers.

In-Plane Printed Batteries Based on Mxenes

In the era of miniaturization, micro energy storage devices become an essential part of the progress in many fields starting from simple sensors to medical devices. However upcoming developments in all these fields are restricted to finding safe, reliable and high-performance micro batteries with the shapes that is not limited only to rectangles, cylinders, and pouches. The research is confronted with challenges of fitting a battery into a microdevice. Lithium-ion batteries (LIBs), a mature energy storage technology, are a leading candidate for the development of micro batteries that can be easily integrated into microelectronic devices. However, despite significant achievements in the field of micro batteries, limitations in areal capacity and in power densities still motivate the search for alternative designs and novel concepts in the battery field. Insufficient areal energy density from planar micro batteries has inspired a search for three-dimensional micro batteries. The power output of a three-dimensional micro battery is expected to be higher than that of a two-dimensional battery of equal size, as a result of the higher ratio of electrode-surface-area to volume and lower Ohmic losses. Within a battery electrode, the 3D architecture provides large surface area, increasing power by reducing the diffusion path for Li ions. Additive manufacturing, also known as 3D printing, has appeared as a novel class of free form fabrication technologies that have a variety of possibilities for the rapid creation of complex architectures at lower cost than conventional methods. 3D printing enables the controlled creation of functional materials with three-dimensional architectures, representing a promising approach for the fabrication of next-generation electrochemical energy-storage devices and has many unique advantages over conventional manufacturing methods. In this work, printer is employed to print a 3D micro battery with MXene electrodes that can be printed easily and can be fitted into any small device.

Sub-5-nm Monolayer GaSe MOSFET with Ultralow Subthreshold Swing and High On -State Current: Dielectric Layer Effects

With the increasing demand for miniaturized devices and integrated circuits, ultrasmall-scale device units have attracted increasing attention. However, the short-channel effects severely limit the development of high-performance micro- and nanodevices. Here, we design sub-5-nm dual-gate monolayer $\mathrm{Ga}\mathrm{Se}$ metal-oxide-semiconductor field-effect transistors (MOSFETs) and systemically analyze the transmission spectrum, local density of states, on-state current (${I}_{on}$), and subthreshold swing (SS), considering different dielectric layer thicknesses, dielectric constants, and underlap lengths. The results show that, with decreasing equivalent oxide thickness, the SS (${I}_{on}$) shows a downward (uptrend) trend. Compared with ${\mathrm{Al}}_{2}{\mathrm{O}}_{3}$ and ${\mathrm{Hf}\mathrm{O}}_{2}$ substrates, the SS and ${I}_{on}$ can be modified obviously through the dielectric layer thickness for 3-nm $\mathrm{Ga}\mathrm{Se}$ MOSFETs with ${\mathrm{Si}\mathrm{O}}_{2}$ substrate. The ${I}_{on}$ can be tuned from 904 to 1766 \textmu{}A/\textmu{}m, which is about 2 times higher than the high-performance requirements of the International Technology Roadmap for Semiconductors (ITRS) (900 \textmu{}A/\textmu{}m) for 2028. Meanwhile, the SS is upgraded from 134.8 to 62.7 mV/dec, closing the Boltzmann tyranny (60 mV/dec). Therefore, this work provides a route to realize ultrashort-scale MOSFETs with an ultralow subthreshold swing and a high on-state current through engineering the dielectric layer.

3D printed freestanding ZnSe/NC anodes for Li-ion microbatteries

The rapid development of micro/nanomanufactured integrated microsystems in recent years requires high performance micro energy storage devices (MESDs). Li-ion microbatteries (LIMBs) are the most studied MESDs, but the low mass loading of active materials and the less-than-perfect energy density hinder their further application. A 3D printed ZnSe/N-doped carbon (ZnSe/NC) electrode was designed and fabricated by extrusion-based 3D printing and a post-treatment strategy as the anode of LIMBs. The high-capacity ZnSe nanoparticles are confined in the NC, where the NC not only improves the conductivity but also acts as a buffer layer to reduce the volume expansion and provide additional active sites for electrochemical reactions. The interconnected design of the 3D printed electrode is good for fast mass transfer and ion transport. A freestanding 3D printed ZnSe/NC electrode with a high mass loading of 3.15 mg cm−2 was achieved by direct ink printing, which had a superior energy density and decent reversibility in high-power LIMBs. This strategy can be used for other high-performance electrodes to achieve a high-mass-loading of active materials for microbatteries, opening up a new way to construct advanced MESDs.

Aerosol Jet Printing of Hybrid Ti3C2T x /C Nanospheres for Planar Micro-supercapacitors.

When utilized in energy devices, the restacking tendency of MXene Ti3C2T x inhibits its electrochemical performance. Using aerosol jet printing (AJP) technology, hybrid Ti3C2T x /C nanospheres are synthesized with C nanoparticle-bonded MXene nanosheets, and the restacking of MXene nanosheets is blocked efficiently. The formation mechanism for hybrid Ti3C2T x /C nanospheres has been hypothesized, and the Ti3C2T x /C is anticipated to assemble and shape along the droplet surface in tandem with the Marangoni flow within the droplet. The planar microsupercapacitor devices generated from these hybrid spherical nanostructures with increased interlayer spacing exhibit exceptional areal capacitance performance. This concept offers a straightforward and effective method for constructing 3D-structured MXene with suppressed self-stacking for diverse high-performance micro energy storage devices.

A Fast-Response Breathing Monitoring System for Human Respiration Disease Detection

This paper presents a sensing system for the real-time monitoring of human respiration. The system is equipped with a fast response thermoresistive micro calorimetric flow (TMCF) sensor and a dedicated data processing algorithm. The TMCF sensor is designed with a proposed nonlinear sensor model and fabricated in a CMOS compatible process, which obtains a high sensitivity of 114 mV/SLM and a fast response time of less than 6 ms. By using this high-performance micro flow sensor and its proprietary data processing algorithm, critical human respiration information including respiratory rate (RR) and minute ventilation (MV) can be easily obtained. The proposed sensing system achieves a very small mean absolute error (MAE) of less than 2.7 mHz for RR, and the extracted MV is also in good agreement with the commonly reported value of 4 - 6 L/min. In addition, benefiting from the very short time constant of the developed TMCF sensor, the proposed sensing system can successfully distinguish different respiratory diseases, such as apnea, hypopnea, polypnea, etc. Therefore, this proposed human respiration monitoring system will be a promising sensing technology for respiration diagnosis in medical applications.

An Ultra-Micro-Volume Adhesive Transfer Method and Its Application in fL-pL-Level Adhesive Distribution.

This study is aimed at addressing the urgent demand for ultra-micro-precision dispensing technology in high-performance micro- and nanometer encapsulation, connection, and assembly manufacturing, considering the great influence of colloid viscosity and surface tension on the dispensing process in micro- and nanometer scale. According to the principle of liquid transfer, a method of adhesive transfer that can realize fL–pL levels is studied in this paper. A mathematical model describing the initial droplet volume and the transfer droplet volume was established, and the factors affecting the transfer process of adhesive were analyzed by the model. The theoretical model of the transfer droplet volume was verified by a 3D scanning method. The relationships between the transfer droplet volume and the initial droplet volume, stay time, initial distance, and stretching speed were systematically analyzed by a single-factor experiment, and the adhesive transfer rate was calculated. Combined with trajectory planning, continuous automatic dispensing experiments with different patterns were developed, and the problems of the transfer droplet size, appearance quality, and position accuracy were analyzed comprehensively. The results show that the average relative deviation of the transfer droplet lattice position obtained by the dispensing method in this paper was 6.2%. The minimum radius of the transfer droplet was 11.7 μm, and the minimum volume of the transfer droplet was 573.3 fL. Furthermore, microporous encapsulation was realized using the method of ultra-micro-dispensing.

High-integration and high-performance micro thermoelectric generator by femtosecond laser direct writing for self-powered IoT devices

Astonishing advances in IoT devices are making a revolutionary progress on smart society, but requiring for sustainable micro power sources. Micro thermoelectric generators (μTEGs) have the potential to power the IoT devices when incorporated into compact microcircuits. Nevertheless, the relatively low output of μTEGs can hardly reach the rated power and voltage for practical use at present. Herein, a femtosecond laser direct writing method is proposed for the fabrication of μTEGs with easy operation and good compatibility, and the precise adjustment of laser energy ensures a high-precision high aspect ratio pattern etch of thermoelectric films. The highly-integrated μTEG (364 pairs/cm2) meets an excellent output of 494 mV and 0.514 mW cm−2 at ΔT = 33.1 K and an efficiency factor of 0.47 μW cm−2 K−2. Eventually, it can realize an output of 3.3 V by using a power manager with the function of stabilizing and drive various electronic components, exhibiting a promising power source for self-powered IoT devices.