High Numerical Aperture Research Articles

Actinic mask inspection for the era of high-numerical aperture extreme ultraviolet lithography

Actinic mask inspection for the era of high-numerical aperture extreme ultraviolet lithography

Practical limits to spatial resolution of magnetic imaging with a quantum diamond microscope

Widefield quantum diamond microscopy is a powerful technique for imaging magnetic fields with high sensitivity and spatial resolution. However, current methods to approach the ultimate spatial resolution (<500 nm) are impractical for routine use as they require time-consuming fabrication or transfer techniques to precisely interface the diamond sensor with the sample to be imaged. To address this challenge, we have designed a co-axial sensor holder that enables simple, repeatable sensor–sample interfacing while being compatible with high numerical aperture (NA) optics. With our new design we demonstrate low standoffs <500 nm with a millimeter sized sensor. We also explore the relationship between spatial resolution and NA spanning from 0.13 to 1.3. The spatial resolution shows good agreement with the optical diffraction limit at low NA but deviates at high NA, which is shown to be due to optical aberrations. Future improvements to our design are discussed, which should enable magnetic imaging with <500 nm resolution in an accessible, easy-to-use instrument.

Transfer Matrix Method with Gouy Phase Shift correction applied to a High Numerical Aperture fiber-to-fiber optical coupling analysis

In this paper, we present the transmittance and reflectance study of the optical coupling between two High Numerical Aperture (HNA) fibers using a new model based on the Transfer Matrix Method (TMM). The TMM is corrected by the effects of the Gouy phase shift and the mode overlap is used in the material between the fibers to calculate the coupling loss. The coupling is also simulated using the Eigenmode Expansion (EME) method, and these numerical results are compared with experimental ones. The Gaussian beam nonparaxial field equations are used to evaluate the phase of the light in the coupling region and to obtain the effective refractive index of the wave between the fiber facets. Our TMM approach produced results close to experimental ones. Our model is, at least, two orders of magnitude faster than a commercial solver, and easy to coding; highlighting this approach’s importance as a transmittance/reflectance simulation tool.

Industrial picosecond pulse laser welding of stainless-steel to quartz for optical applications

We report on the development of a robust picosecond laser welding process for the industrially relevant material combination of quartz and stainless steel. The process requires high numerical aperture focusing of a 6 ps 1030 nm laser through the transparent quartz onto the interface between the two materials. It is found that increased mechanical pressure applied during welding increases reliability and weld performance and with the correct choice of welding parameters parts will survive ISO standard thermal cycling and vibration testing demonstrating the suitability of the process for industrial application.

Quantitative access to phase effects in high numerical aperture extreme-ultraviolet photomasks using aerial image metrology

Quantitative access to phase effects in high numerical aperture extreme-ultraviolet photomasks using aerial image metrology

Resolution enhancement for high-numerical aperture extreme ultraviolet lithography by split pupil exposures: a modeling perspective

Resolution enhancement for high-numerical aperture extreme ultraviolet lithography by split pupil exposures: a modeling perspective

Scaling wavelength selective switches for multi-band and space-division-multiplexed networks

This paper investigates the practical scalability of wavelength selective switching technology for the emerging multi-band and space-division-multiplexed (SDM) networks. Wavelength selective switching architectures are introduced for multi-band SDM networks. The switching capacity is analyzed for both weakly coupled and strongly coupled SDM networks. Key bottlenecks for scaling up toward multi-band and more spatial modes are identified. Contrary to the conventional view that liquid crystal on silicon (LCOS) was the only technological obstacle, the manufacturability of free-space optics with high numerical apertures and constraints on the optical dimensions also brought significant challenges for the development of highly integrated wavelength selective switches for multi-band SDM networks.

Customizing subwavelength stochastic light fields via structured spatial coherence in a high-NA resonator

Interaction of light in the high-numerical aperture (high-NA) systems is crucial for theoretical advances and applications such as superresolution imaging and optical nanofabrication. High coherence is demanded at this scale for intensity and spin profile sculpturing, since the underlying physics being wave interference. Here we report that, even for low-coherence light, 3D light features in a nanometer range can be generated by employing structured coherence states of the light beam in a high-NA resonator system. The generated structures, e.g., 3D helix intensity and transverse spin texture, can survive in rather incoherent optical fields at nanoscale. We also found that, counterintuitively, despite the substantial decrease in spatial coherence of the light field, the longitudinal electric field component and transverse spin density are instead enhanced. The applications of the observed twisted spectral density and spin structures may range from high-resolution imaging to metrology.

Far-field sub-diffraction focusing and controlled focus shaping of circularly polarized light using a dielectric phase plate

In recent years, sub-diffraction focusing has received substantial attention due to its versatility. However, achieving a flexible sub-diffraction focusing in the far field remains stimulating. Existing techniques either require complex fabrication facilities or are limited to the short focal length and high numerical aperture (NA) of the imaging system. Here, we introduce an optimization method for sub-diffraction focusing of a circularly polarized beam in the far field with a lens of large focal length. A cost-effective dielectric phase plate serves the purpose. By employing a phase plate composed of a thin layer of dielectric Si3N4, the phase of the propagating beam is modulated in the beam’s cross-section, which is divided into two regions of the opposite phase by the plate. A sub-diffraction focusing is achieved for a proper tunning between the two regions. In addition to sub-diffraction focusing, the phase plate is also capable of shaping the focus into a doughnut-shaped and a flat-top profile in the far field. This design provides a simple solution for sub-diffraction focusing and focus shaping that will find potential applications in optical imaging, optical trapping, and material processing.

Optical skyrmion and its "zipper-like" topological behavior in an energy flux field.

The optical skyrmion and its topological behavior are analyzed in an energy flux field constructed by an X-type vortex in a high numerical aperture system. The conditions for the formation of a skyrmion structure in this field are discussed, showing that the vortex pattern of the transverse energy flow and the inverse energy flow are crucial for the skyrmions and also are controlled by the phase gradient of the X-type vortex. Notably, the "zipper-like" topological reaction, which is the first, to our knowledge, found in ferromagnetic materials, is observed, and the physical mechanism is also explained by the relation of orbital angular momentum density and Poynting vectors. The results will reach the topological theory and may have applications in optical traps and data storage.

Enhancing Bioluminescence Imaging of Cultured Tissue Explants Using Optical Telecompression.

Long-term observation of single-cell oscillations within tissue networks is now possible by combining bioluminescence reporters with stable tissue explant culture techniques. This method is particularly effective in revealing the network dynamics in systems with slow oscillations, such as circadian clocks. However, the low intensity of luciferase-based bioluminescence requires signal amplification using specialized cameras (e.g., I-CCDs and EM-CCDs) and prolonged exposure times, increasing baseline noise and reducing temporal resolution. To address this limitation, we implemented a cost-effective optical enhancement technique called telecompression, first used in astrophotography and now commonly used in digital photography. By combining a high numerical aperture objective lens with a magnification-reducing relay lens, we significantly increased the collection efficiency of the bioluminescence signal without raising the baseline CCD noise. This method allows for shorter exposure times in time-lapse imaging, enhancing temporal resolution and enabling more precise period estimations. Our implementation demonstrates the feasibility of telecompression for enhancing bioluminescence imaging for the tissue-level network observation of circadian clocks.

Applications of Lightsheet Fluorescence Microscopy by High Numerical Aperture Detection Lens.

This Review explores the evolution, improvements, and recent applications of Light Sheet Fluorescence Microscopy (LSFM) in biological research using a high numerical aperture detection objective (lens) for imaging subcellular structures. The Review begins with an overview of the development of LSFM, tracing its evolution from its inception to its current state and emphasizing key milestones and technological advancements over the years. Subsequently, we will discuss various improvements of LSFM techniques, covering advancements in hardware such as illumination strategies, optical designs, and sample preparation methods that have enhanced imaging capabilities and resolution. The advancements in data acquisition and processing are also included, which provides a brief overview of the recent development of artificial intelligence. Fluorescence probes that were commonly used in LSFM will be highlighted, together with some insights regarding the selection of potential probe candidates for future LSFM development. Furthermore, we also discuss recent advances in the application of LSFM with a focus on high numerical aperture detection objectives for various biological studies. For sample preparation techniques, there are discussions regarding fluorescence probe selection, tissue clearing protocols, and some insights into expansion microscopy. Integrated setups such as adaptive optics, single objective modification, and microfluidics will also be some of the key discussion points in this Review. We hope that this comprehensive Review will provide a holistic perspective on the historical development, technical enhancements, and cutting-edge applications of LSFM, showcasing its pivotal role and future potential in advancing biological research.

Frequency selective illumination for high aperture coherence scanning interferometry

Abstract Coherence scanning interferometry is a widely used optical topography measurement technique, which can achieve axial resolutions in the sub-nanometer regime. Nevertheless, in the lateral dimension it is inherently diffraction limited and multiple problems arise when approaching this limit. Especially for challenging surface topographies like steep slopes or small grating periods measurement artifacts start to cause massive deviations in the 3D reconstruction of the surface due to the increased influence of noise on increasingly weak signals. In this study we present an illumination approach for Linnik-type CSI, which highlights oblique incident angles of the illuminating light cone in high numerical aperture (0.95) systems. It is demonstrated, that this approach can significantly improve the signal-to-noise ratio for measurements at steep surface slopes and therefore increase the subsequent surface reconstruction.

Generation of variable light fields by radially polarized chirped circular Airy vortex beams

Based on Richards-Wolf vector diffraction theory, the tight focusing properties of radially polarized chirped circular Airy vortex beams (RP-CCAVBs) are theoretically investigated using a high numerical aperture objective lens in the paper. The results shown that super-resolution scalable optical needles, dark channels, elliptical optical cages, and optical oscillations can be obtained by adjusting the scale factor, exponential attenuation coefficient, main ring radius, and topological charge of optical vortex in the incident RP-CCAVBs. The DOF of optical needle and dark channels is exponent dependent on scaling factor ω of RP-CCAVBs. And the position optical needle and dark channels can be moved by changing chirped parameter of RP-CCAVBs. The size of obtained optical cages can be adjusted by changing the radius of main rings in RP-CCAVBs. The intensity distribution of the obtained optical oscillations is intensely affected by parameter a and chirp parameter of RP-CCAVBs.

Fast and direct calibration for high numerical aperture quadriwave lateral shearing interferometry using geometry model with higher-order Taylor expansion

The current research on quadriwave lateral shearing interferometry (LSI) is primarily focused on the measurements of plane wave or quasiplane wave. When directly measuring spherical waves with high numerical apertures (NA>0.35), it will generate additional systematic errors, which affect measurement accuracy. To make the quadriwave LSI applicable to the measurements of a high-NA spherical wave, this paper proposes a fast and direct calibration method by establishing the geometry model of the quadriwave LSI with high-NA spherical wave incidence. The expression for the optical path difference represented systematic errors introduced by high-NA spherical waves in the shearing wavefronts are derived, which utilize a ninth-order Taylor expansion and Zernike polynomials fitting to achieve the high accuracy required by the high-NA spherical wave incidence. Then, the systematic errors are directly calibrated in the shearing wavefronts of four directions. This paper presents the theoretical analysis and verifies the feasibility and reliability of the proposed method through simulations and experiments, achieving a good measurement accuracy.

Design of a catadioptric mid-wave infrared telecentric microscope with high numerical aperture and long working distance

Infrared microscopy is widely used in the field of thermal analysis. This paper proposes a design method for a catadioptric mid-wave infrared telecentric microscope system that solves the problem of traditional microscopy systems being unable to simultaneously meet high numerical aperture, long working distance and large magnification requirements. The system is composed of a microscope objective and a tubelens. The objective uses an improved Schwarzschild structure and is connected to the tubelens through an externally located pupil. The system works in the wavelength range of 3.7 μm–4.8 μm, achieves a 0.82 numerical aperture, a 15.5 mm working distance, an 8× magnification and a 2.75 μm object-side resolution. The image size of the detector is 17um, and the MTF of the microscope system at the detector cutoff frequency is greater than 0.2, which is close to the diffraction limit. Finally, tolerance analysis and athermal analysis are conducted on the system, and the results indicate that the system possesses good manufacturability and thermal stability.

Ultra-short and highly efficient metamaterial Fresnel lens-assisted taper.

This paper demonstrates the benefits of leveraging free-space optics concepts in the design of certain integrated photonic components, leading to a footprint reduction without compromising on performance. Specifically, we present ultra-short, highly efficient and fabrication-friendly mode-size converters based on metamaterial Fresnel lens-assisted tapers. This is achieved using a parameterized inverse-design approach, where the metamaterial phase shifters are realized using fabrication-friendly Manhattan geometries, by optimizing the width, length, and position of the phase shifters. This approach overcomes the limitations of the conventional method that uses local periodic approximation, which is not suitable for lenses with a short focal length and high numerical aperture. We also extend the free-space concept of compound lenses and demonstrate a doublet-based taper to further reduce the footprint. The devices are fabricated and experimentally characterized in terms of insertion loss and signal integrity at high data transmission rates, exhibiting high performance. For the singlet, it effectively achieves mode-size conversion from 15 μm to 0.5 μm within a 15 μm distance, leading to ×10 length reduction compared to a linear taper. The insertion loss is under 1 dB over the entire C-band. The doublet achieves the same mode-size reduction within a 10 μm distance, leading to ×15 length reduction compared to a linear taper. The insertion loss is near 1 dB over most of the C-band. In both cases, the signal integrity is maintained for up to 50 Gbit/s.

Interfacing high numerical aperture metalenses with thermally expanded core fibers via 3D nanoprinting for advanced meta-fiber operation.

This study introduces a novel meta-fiber design that combines single-mode fibers with thermally expanded cores and nano-printed high numerical aperture metalenses. These advanced meta-fibers feature enlarged mode field diameters, offering improved mechanical stability, reduced environmental sensitivity and simplified metalens design by minimizing wavefront curvature. The concept's validity is confirmed through high numerical aperture metalenses, nanoprinted onto thermally expanded core fibers, demonstrating diffraction-limited focusing up to a numerical aperture of 0.9 in air and water. This innovative approach has potential applications in optical trapping, life science imaging, environmental sensing, and fiber-chip coupling in integrated photonics.

Rapid inverse design of metasurfaces with an asymmetric transfer function for all-optical image processing using a mode matching model.

Metasurfaces have recently emerged as an ultra-compact solution to perform all-optical image processing, including phase contrast imaging. Most metasurfaces used in imaging processing applications operate over a restricted numerical aperture. This limitation imposes constraints on the discernible features that can be effectively visualized and consequently leads to the appearance of undesirable artifacts. Engineering a metasurface that exhibits an asymmetric linear optical transfer function over a relatively large numerical aperture, while maintaining a strong contrast, has proven to be a challenge. In this study, we present a novel approach to designing relatively high numerical aperture and contrast nonlocal metasurfaces (up to a numerical aperture of around 0.5 and an intensity contrast of approximately 50%) with unit cells consisting of several plasmonic nanorods through the use of a rapid, quasi-analytic mode-matching technique, coupled with an optimization algorithm. The combination of these methods facilitates the rapid conceptualization of nonintuitive arrangements of metallic nanoparticles, specifically tailored to perform phase contrast imaging. These designs hold substantial promise in the development of ultra-compact imaging systems.

Optical torque calculations and measurements for DNA torsional studies

The angular optical trap (AOT) is a powerful instrument for measuring the torsional and rotational properties of a biological molecule. Thus far, AOT studies of DNA torsional mechanics have been carried out using a high numerical aperture oil-immersion objective, which permits strong trapping but inevitably introduces spherical aberrations due to the glass-aqueous interface. However, the impact of these aberrations on torque measurements is not fully understood experimentally, partly due to a lack of theoretical guidance. Here, we present a numerical platform based on the finite element method to calculate forces and torques on a trapped quartz cylinder. We have also developed a new experimental method to accurately determine the shift in the trapping position due to the spherical aberrations by using a DNA molecule as a distance ruler. We found that the calculated and measured focal shift ratios are in good agreement. We further determined how the angular trap stiffness depends on the trap height and the cylinder displacement from the trap center and found full agreement between predictions and measurements. As a further verification of the methodology, we showed that DNA torsional properties, which are intrinsic to DNA, could be determined robustly under different trap heights and cylinder displacements. Thus, this work has laid both a theoretical and experimental framework that can be readily extended to investigate the trapping forces and torques exerted on particles with arbitrary shapes and optical properties.