High-index Dielectric Metasurfaces Research Articles

Metasurface Enabled On-Chip Generation and Manipulation of Vector Beams from Vertical Cavity Surface-Emitting Lasers.

Metasurface polarization optics that consist of 2D array of birefringent nano-antennas have proven remarkable capabilities to generate and manipulate vectorial fields with subwavelength resolution and high efficiency. Integrating this new type of metasurface with the standard vertical cavity surface-emitting laser (VCSEL) platform enables an ultracompact and powerful solution to control both phase and polarization properties of the laser on a chip, which allows to structure a VCSEL into vector beams with on-demand wavefronts. Here, this concept is demonstrated by directly generating versatile vector beams from commercially available VCSELs through on-chip integration of high-index dielectric metasurfaces. Experimentally, the versatility of the approach for the development of vectorial VCSELs are validated by implementing a variety of functionalities, including directional emission of multibeam with specified polarizations, vectorial holographic display, and vector vortex beams generations. Notably, the proposed vectorial VCSELs integrated with a single layer of beam shaping metasurface bypass the requirements of multiple cascaded optical components, and thus have the potential to promote the advancements of ultracompact, lightweight, and scalable vector beams sources, enriching and expanding the applications of VCSELs in optical communications, laser manipulation and processing, information encryption, and quantum optics.

Optical Kerr nonlinearity of dielectric nanohole array metasurface in proximity to anapole state.

Metasurfaces have attracted a great deal of attention from researchers due to their prominent optical properties. In particular, metasurfaces may consist of structures possessing optical anapole resonances with strong field confinement and substantially suppressed scattering. As a result, such nanostructures display enhanced nonlinear optical properties. In this paper by means of three-dimensional finite-difference time-domain simulations, the ability of anapole modes in high-index dielectric metasurfaces with circular nanopores is shown. In the vicinity of the anapole state, the effective optical Kerr nonlinearity increases by orders of magnitude. Simultaneously, the optical transmission of the metasurface can reach high values up to unity.

Observation of Ultrafast Self-Action Effects in Quasi-BIC Resonant Metasurfaces.

High-index dielectric metasurfaces can support sharp optical resonances enabled by the physics of bound states in the continuum (BICs) often manifested in experiments as quasi-BIC resonances. They provide a way to enhance light-matter interaction at the subwavelength scale bringing novel opportunities for nonlinear nanophotonics. Strong narrow-band field enhancement in quasi-BIC metasurfaces leads to an extreme sensitivity to a change of the refractive index that may limit nonlinear functionalities for the pump intensities beyond the perturbative regime. Here we study ultrafast self-action effects observed in quasi-BIC silicon metasurfaces and demonstrate how they alter the power dependence of the third-harmonic generation efficiency. We study experimentally a transition from the subcubic to supercubic regimes for the generated third-harmonic power driven by a blue-shift of the quasi-BIC in the multiphoton absorption regime. Our results suggest a way to implement ultrafast nonlinear dynamics in high-index resonant dielectric metasurfaces for nonlinear meta-optics beyond the perturbative regime.

Tunable unidirectional nonlinear emission from transition-metal-dichalcogenide metasurfaces

Nonlinear light sources are central to a myriad of applications, driving a quest for their miniaturisation down to the nanoscale. In this quest, nonlinear metasurfaces hold a great promise, as they enhance nonlinear effects through their resonant photonic environment and high refractive index, such as in high-index dielectric metasurfaces. However, despite the sub-diffractive operation of dielectric metasurfaces at the fundamental wave, this condition is not fulfilled for the nonlinearly generated harmonic waves, thereby all nonlinear metasurfaces to date emit multiple diffractive beams. Here, we demonstrate the enhanced single-beam second- and third-harmonic generation in a metasurface of crystalline transition-metal-dichalcogenide material, offering the highest refractive index. We show that the interplay between the resonances of the metasurface allows for tuning of the unidirectional second-harmonic radiation in forward or backward direction, not possible in any bulk nonlinear crystal. Our results open new opportunities for metasurface-based nonlinear light-sources, including nonlinear mirrors and entangled-photon generation.

Nanostructure-Empowered Efficient Coupling of Light into Optical Fibers at Extraordinarily Large Angles

Coupling of light from free space to optical fibers is essential for many applications, while commonly used step-index optical fibers provide insufficient coupling efficiencies especially at large angles of incidence. Here, we demonstrate record-high coupling efficiencies achieved with dielectric nanostructures located on single-mode fiber end faces. We introduce a novel approach that allows fabricating dielectric nanostructures at the facet of a step-index optical fiber via an extended version of planar electron-beam based lithography. We demonstrate polarization- and angle-independent coupling of light into the fiber across a wide range of angles as large as 80°. We support our experimental results with an analytical model and extensive numerical simulations. Our results reveal the key properties of nanostructure-empowered fibers that may improve the performance of many optical devices requiring efficient collection of light, including quantum technologies (single-photon collection) or biophotonics (in vivo imaging). Our approach can be extended to other materials and geometries, merging fiber optics with high-index dielectric metasurfaces, allowing for unprecedented functionalities for the efficient control of light.

Quasi-BIC Resonant Enhancement of Second-Harmonic Generation in WS2 Monolayers.

Atomically thin monolayers of transition metal dichalcogenides (TMDs) have emerged as a promising class of novel materials for optoelectronics and nonlinear optics. However, the intrinsic nonlinearity of TMD monolayers is weak, limiting their functionalities for nonlinear optical processes such as frequency conversion. Here we boost the effective nonlinear susceptibility of a TMD monolayer by integrating it with a resonant dielectric metasurface that supports pronounced optical resonances with high quality factors: bound states in the continuum (BICs). We demonstrate that a WS2 monolayer combined with a silicon metasurface hosting BICs exhibits enhanced second-harmonic intensity by more than 3 orders of magnitude relative to a WS2 monolayer on top of a flat silicon film of the same thickness. Our work suggests a pathway to employ high-index dielectric metasurfaces as hybrid structures for enhancement of TMD nonlinearities with applications in nonlinear microscopy, optoelectronics, and signal processing.

Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference.

High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of great interest in a variety of applications such as imaging, sensing, photovoltaics, and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators a few hundred nanometers in diameter. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the predeposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication is a step toward a simple realization of spatially invariant metasurface-based devices.

Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces.

Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.

Optimization-free approach for broadband achromatic metalens of high-numerical-aperture with high-index dielectric metasurface

Broadband achromatic metalenses are highly desirable for realistic applications in focusing and imaging. In this paper, a group of dielectric double-strip meta-atoms of high-index are proposed to achieve a large range of group delay in a broadband near-infrared range. And an optimization-free method is developed for the simple and fast design of broadband achromatic metalenses of high-numerical-aperture, which treats the dispersion as a function of radius and independent of wavelength. To verify the proposed meta-atoms and the optimization-free design approach, an achromatic metalens is designed with a high-numerical-aperture of NA = 0.81 and a broad bandwidth of 120 nm within the wavelength range from 1470 nm to 1590 nm. Numerical simulations reveal that the focal length only has a small variation of 0.27λ0 (0.17λ0/ΝΑ2, λ0 = 1530 nm), the depth of focus is smaller than 2.85λ0, and the average transverse size of the focal spot is less than 0.68λ0, which is slightly larger than the diffraction limit of 0.617λ0 (0.5λ0/NA). Compared to other reported achromatic metalenses, the proposed lens has a larger numerical aperture and smaller depth of focus. In addition, the proposed optimization-free method makes it easier to design achromatic metalens with high-numerical-aperture and improved axial resolution.

Wideband sub-THz half-wave plate using 3D-printed low-index metagratings with superwavelength lattice.

High-index dielectric metasurfaces are rarely reported around 0.1-0.3 THz, as an extremely large etching depth is needed according to the millimeter-scale wavelength. In this work, we propose an easy solution to sub-THz wideband polarization control by utilizing 3D-printed low-index (n~1.5) metagratings. The metagrating with subwavelength lattice is shown as a very efficient half-wave plate (net polarization conversion of 87%) at 0.14 THz but showing noisy spectrum. The design with superwavelength lattice offers a smooth and wide bandwidth for linear polarization rotation. Study of the mechanism shows that the lattice size slightly above wavelength is a better choice for the low-index metadevice as it maintains high efficiency in the zero diffraction order and wide bandwidth due to the small mode dispersion. Such designs offer a feasible solution especially suitable for sub-THz polarization and phase control, complementary to the existing high-index dielectric and metallic metasurfaces.

High index dielectric metasurfaces and colloidal solutions: from fabrication to application

High index dielectric nanoparticles and meta-materials have been proposed for many different applications, including light harvesting, sensing and metalenses. However, widespread utilization in practice also requires large-scale fabrication methods able to produce homogeneous structures with engineered optical properties in a cost effective manner. Here, it is presented a facile fabrication method for silicon nanoparticles which is scalable to 4-inch wafers and can produce a wide range of nanoparticle shapes on demand. We also show that the fabricated nanoparticles can be detached from their support using a simple substrate removal technique and then transferred to colloidal suspension. We will finally discuss some uses of the fabricated systems. For the metasurfaces, we will demonstrate complete absorption due to far field interference effects. For the nanoparticles colloids we will show the possibility of realizing an intrinsically chiral structure composed of a low-loss dielectric resonator and we will study optical trapping phenomena for different particle sizes and shapes.

Giant THz surface plasmon polariton induced by high-index dielectric metasurface

We use computational approaches to explore the role of a high-refractive-index dielectric TiO2 grating with deep subwavelength thickness on InSb as a tunable coupler for THz surface plasmons. We find a series of resonances as the grating couples a normally-incident THz wave to standing surface plasmon waves on both thin and thick InSb layers. In a marked contrast with previously-explored metallic gratings, we observe the emergence of a much stronger additional resonance. The mechanism of this giant plasmonic resonance is well interpreted by the dispersion of surface plasmon excited in the air\\TiO2\\InSb trilayer system. We demonstrate that both the frequency and the intensity of the giant resonance can be tuned by varying dielectric grating parameters, providing more flexible tunability than metallic gratings. The phase and amplitude of the normally-incident THz wave are spatially modulated by the dielectric grating to optimize the surface plasmon excitation. The giant surface plasmon resonance gives rise to strong enhancement of the electric field above the grating structure, which can be useful in sensing and spectroscopy applications.

Resonant laser printing of structural colors on high-index dielectric metasurfaces.

Man-made structural colors, which originate from resonant interactions between visible light and manufactured nanostructures, are emerging as a solution for ink-free color printing. We show that non-iridescent structural colors can be conveniently produced by nanostructures made from high-index dielectric materials. Compared to plasmonic analogs, color surfaces with high-index dielectrics, such as germanium (Ge), have a lower reflectance, yielding a superior color contrast. Taking advantage of band-to-band absorption in Ge, we laser-postprocess Ge color metasurfaces with morphology-dependent resonances. Strong on-resonance energy absorption under pulsed laser irradiation locally elevates the lattice temperature (exceeding 1200 K) in an ultrashort time scale (1 ns). This forms the basis for resonant laser printing, where rapid melting allows for surface energy-driven morphology changes with associated modification of color appearance. Laser-printable high-index dielectric color metasurfaces are scalable to a large area and open a new paradigm for printing and decoration with nonfading and vibrant colors.

Analog optical computing based on a dielectric meta-reflect array.

In this Letter, we realize the concept of analog computing using an engineered gradient dielectric meta-reflect-array. The proposed configuration consists of individual subwavelength silicon nanobricks, in combination with a fused silica spacer and silver ground plane, realizing a reflection beam with full phase coverage of 2π degrees, as well as an amplitude range of 0 to 1. Spectrally overlapping electric and magnetic dipole resonances, such high-index dielectric metasurfaces can locally and independently manipulate the amplitude and phase of the incident electromagnetic wave. This practically feasible structure overcomes substantial limitations imposed by plasmonic metasurfaces such as absorption losses and low polarization conversion efficiency in the visible range. Using such CMOS-compatible and easily integrable platforms promises highly efficient ultrathin planar wave-based computing systems that circumvent the drawbacks of conventional bulky lens-based signal processors. Based on these key properties and the general concept of spatial Fourier transformation, we design and realize broadband mathematical operators such as the differentiator and integrator in the telecommunication wavelengths.