This article presents the results of experimental studies of the electrochemical mechanical polishing process, which combines anodic dissolution, possessing high localizing properties, with the dynamic effects of abrasive grains. The essence of the combined process is described, when, under the influence of operating voltage, a continuous electrochemical dissolution of the treated surface occurs with the formation of oxide films on it, followed by their removal together with the treated metal by means of abrasive grains quasi-fixed in the polishing pad. The description and conditions of the conducted experiments are given. The influence of the weight content of the abrasive in the composition of the electrolyte-abrasive mixture on the removal of metal and the roughness of the treated surface is shown. The impact on the course of the combined process of the frequency of rotation of the polishing pad and the pressure of the workpiece on it is noted. At optimal values of the studied parameters, electrochemical-mechanical polishing makes it possible to ensure high geometric quality of the treated surface and high process productivity.
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