Utilizing nanotechnology and composites to create a protective film on titanium alloy is an effective means of achieving the desired high performance. Self-assembly of nanocomposite structures offers a promising route to forming high entropy alloy films (HEAFs), but controlled preparation remains challenging. This work used magnetron sputtering through adjusting preparation parameters to prepare ZrNbTiCrCu HEAFs, achieving a significant improvement in corrosion resistance and biocompatibility induced by the precipitation of Cu. According to the electrochemical corrosion test, without obvious corrosion pits on the surface of S2 after corrosion, a passivation film composed of bimetallic oxide CuCrO2 formed on the film surface, indicating that ZrNbTiCrCu HEAFs have remarkable corrosion resistance performance. In the cytocompatibility experiment, the cell viability of HEAFs reached over 95 % due to the precipitation of Cu, suggesting their excellent biocompatibility. In addition, ZrNbTiCrCu HEAFs exhibit outstanding antibacterial ability, especially when the sputtering current is 0.6 A, and the in vitro antibacterial rate of the sample against Escherichia coli is close to 99 %.
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