In this study, TaN nanostructured coatings were successfully produced on AISI 316 L stainless steel substrates using the reactive DC magnetron sputtering method. Among all of these coating processes, the only variable factor was the percentage of partial pressure of nitrogen gas (PN2) which was attended in the sputtering process. To do this, the percentage of partial pressure of nitrogen gas was chosen in different percentages of 5%, 10% and 15%. After the coatings formation, their microstructure, chemical composition and corrosion behavior were studied. The microstructure of the samples coated was studied by the scanning electron microscope (SEM), their elemental and phase composition by energy diffraction spectroscopy (EDS), X-ray diffraction (XRD) and elemental distribution was carried out by mapping (MAP) analysis. In order to study the corrosion behavior of coatings, the electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization (PDP) tests were carried out in a simulated body fluid (Ringer's solution). Immersion time of specimens was determined 1, 24, 48 h and 7 days in Ringer's solution. The results of different tests showed that coatings containing 15% nitrogen consisted of hard orthorhombic and hexagonal tantalum nitride phases, had free pores and denser microstructure. This coating exhibited better corrosion behavior than the other two ones in all of the immersion times. The corrosion resistance of this coating also increased by rising immersion time from 1 h to 7 days. In fact, the coating containing 15% of nitrogen being immersed for 7 days with a resistance of 118.68 (MΩ.cm2), had the highest corrosion resistance.
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