We investigate the early stage of carbon nanotube (CNTs) growth on Inconel 600 to address the effect of pretreatments such as annealing and plasma pretreatment on growth behavior. In addition, we compare the growth results to other Ni-based superalloys including Invar 42 and Hastelloy C276. The growth substrates were prepared using mechanical polish, thermal annealing and plasma pretreatment. The air annealing was performed at 725 °C for 10 min and plasma pretreatment was subsequently undergone with 10.5 W at 500 °C for 30 min. The annealed and plasma-pretreated substrates exhibited different surface morphologies on the surface and enhanced growth behavior of CNT was observed from the region of particulate surface. The optimized growth temperature, which produces the highest CNT height, was determined at 525 °C for Ni and Inconel 600 and 625 °C for Invar 42 and Hastelloy C276 substrates. The difference of optimal growth temperature is expected to the existence of high temperature elements such as Mn or Mo in the alloys. X-ray diffraction spectroscopy revealed that the formation of roughened oxide layers caused by the pretreatments would promote the nucleation and growth of the CNTs.