Contact fatigue behaviors of thin hard diamond-like carbon (DLC) films on M50 steels during cyclic spherical micro-indentations were investigated. The stress-strain evolution of the entire system was analyzed by finite element methods. The film fracture mechanisms and interfacial bearing responses under monotonic and repeated contacts were comprehensively explored. Concentrated tensile and shear stresses were found to, respectively, govern the initiation and propagation of the surface ring cracks. Elevated tensile stresses at the initiation and epilogue of each indentation cycle enhanced bottom radial cracking. At the interfaces, the maximum tensile (σnmax) and shear (σtmax) stresses occurred at the end of unloading and loading processes, respectively. With increasing maximum indentation forces, σnmax initially increased and then gradually decreased, while σtmax increased monotonically.
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