Using the electron backscatter diffraction (EBSD) technique, we analyze in this contribution the microstructure of YBa2Cu3O x (YBCO) thick films with embedded a -axis oriented grains. The YBCO films were prepared by liquid phase epitaxy in air using NdGaO3 substrates. Using this technique, a / c -grain boundaries (GBs) with a well-defined facet of the YBCO film characterized by a single crystalline nature are obtained. This type of GB is very important for the basic physics of GBs in high- T c superconductor materials, and will contribute to a better understanding of GBs also in bulk materials. The application of EBSD to the analysis of a / c -GBs in YBCO requires a high Kikuchi pattern quality (i.e., image quality) to enable a proper distinction of the orientation, as the a -axis corresponds to about one-third of the c -axis, which can cause a misinterpretation of the resulting data. Having solved this problem, the EBSD-based determination of the GB misorientation angles directly proof the specific grain orientation achieved in the film growth.
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