AbstractIn this study, a high‐performance inorganic‐organic hybrid hole transporting layer (HTL) was developed using ethanol‐soluble alkoxide precursors and a self‐assembled monolayer (SAM). Three metal oxides‐vanadium oxide (VOx), niobium oxide (Nb2O5), and tantalum oxide (Ta2O5)‐were synthesized through successive low‐temperature (100 °C) thermal annealing (TA) and UV‐ozone (UVO) treatments of their respective precursors: vanadium oxytriethoxide (EtO−V), niobium ethoxide (EtO−Nb), and tantalum ethoxide (EtO−Ta). Among these, the Nb2O5 film exhibited excellent transmittance, a high work function, and good conductivity, along with a more compact and uniform structure featuring fewer interfacial defects, which facilitated efficient charge extraction and transport. Furthermore, the deposition of a SAM of (2‐(9H‐carbazol‐9‐yl)ethyl)phosphonic acid (2PACz) on top of Nb2O5 further passivated defects, enhancing interfacial contact with the photoactive layer. The resulting inorganic‐organic hybrid HTL of Nb2O5/2PACz demonstrated excellent compatibility with various photoactive blends, achieving impressive power conversion efficiencies of 19.44 %, 19.18 %, and 20.12 % for the PM6:L8‐BO, PM6:BTP‐eC9, and D18:BTP‐eC9 based organic solar cells, respectively. 20.12 % is the best performance for bulk heterojunction organic solar cells with binary components as the photoactive layer.