In this study, we investigate the growth of Ge nanowires (NWs) using a gas supply gradient method during plasma-enhanced chemical vapor deposition (PECVD), focusing on the effects of GeH4 partial pressure and total chamber pressure on NWs morphology. By adjusting either the GeH4 flow rate or the total pressure, we explored a gradient method to manipulate the growth process. Scanning electron microscopy (SEM) images revealed that, even with constant GeH4 partial pressure, variations in total pressure significantly influenced NWs diameter and structure. Furthermore, elemental mapping and compositional analysis demonstrated the presence of a Ge/Si heterostructure with a Sn catalyst at the apex and an amorphous Si layer encapsulating the NW surface.
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