Reverse engineering is typically applied to solve the CAD model of unknown parts. As modern industry requirements on the accuracy of complex surfaces increase, setting up the high-precision CAD modeling of unknown complex surface parts through reverse engineering becomes an interesting research topic. Here, we present a method that combines manual measurement and automatic measurement with a high-precision coordinate measuring machine (CMM) to measure unknown complex-surface to obtain CAD model. In this study, the unknown complex-surface was fixed on the CMM worktable, and cancelling the probe compensation function of PC-DMIS before measurement. Then, 490 measuring points were obtained by manually moving the probe with a diameter of 5mm to measure surface. The measured points generated the CAD model, the CAD model was offset a probe radius, and determined the rough contours of the surface. This CAD model was automatically measured in a CMM, and the function of the “automatic measurement model” was iterated to obtain a high-accuracy CAD model. Each measurement was arranged with 20×20 measuring points. The accuracy of the CAD model obtained by each iterative measurement would be improved, and finally a high-precision CAD model was obtained. After 7 iterations, the final accuracy of the unknown surface CAD model was as high as 0.004 mm as compared to that of the actual part.