The first results of the deposition of coatings from accelerated ions of fluorinated fullerene C60(CF3)12 are presented. The coatings were formed at room temperature on Si substrates from a beam of singly charged C60(CF3)+12 ions with an energy of 5 keV, as well as from an ion beam, which also contained doubly charged C60(CF3)122+ ions and a certain amount of ionized fragments of molecules. The properties and structure of coatings obtained from accelerated ions of fluorinated fullerene are compared with the properties and structure of coatings obtained from accelerated C60 fullerene ions under the same conditions. According to X-ray photoelectron spectroscopy, fluorinated fullerene coatings contain about 4% fluorine. Investigations of the coatings structure and chemical bonds by X-ray photoelectron spectroscopy and Raman scattering showed that the presence of fluorine leads to decrease in the content of sp3 bonds and the formation of graphite-like sp2 structures. Coating hardness (H) and Young's modulus (E) compared to C60 ion coatings decrease from 36 to 18 GPa and from 245 to 133 GPa, respectively. The H/E ratio remained the same (~0.14). Tribological tests have shown for all coatings a friction coefficient close to 0.1. Also, all coatings are characterized by very low wear, less than 10–7 mm3/N∙m for coatings obtained from C60(CF3)12 ions, the contact angle is ~76°–78°. In the absence of fluorine, for the coating obtained from C60 ions, it is ~90°.
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