Front-end Module Research Articles

RS-SLAM: real time semantic slam with driverless car using LiDAR-camera-IMU sensing

Abstract Accurate and robust Simultaneous Localization and Mapping (SLAM) technology is a critical component of driverless cars, and semantic information plays a vital role in their analysis and understanding of the scene. In the actual scene, the moving object will produce the shadow phenomenon in the mapping process. The positioning accuracy and mapping effect will be affected. Therefore, we propose a semantic SLAM framework combining LiDAR, IMU, and camera, which includes a semantic fusion front-end odometry module and a closed-loop back-end optimization module based on semantic information. An improved image semantic segmentation algorithm based on Deeplabv3+ is designed to enhance the performance of the image semantic segmentation model by replacing the backbone network and introducing an attention mechanism to ensure the accuracy of point cloud segmentation. Dynamic objects are detected and eliminated by calculating the similarity score of semantic labels. A loop closure detection method based on semantic information is proposed to detect key semantic features and use threshold range detection and point cloud re-matching to establish the correct loop closure detection, and finally reduce the global cumulative error and improve the global trajectory accuracy using graph optimization to ultimately obtain the global motion trajectory and realize the construction of 3D semantic maps. We evaluated it on the KITTI dataset and collected a dataset for evaluation by ourselves, which includes four different sequences. The results show that the proposed framework has good positioning accuracy and mapping effect in large-scale urban road environments.

Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Chamber Cleaning Requirements

Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Chamber Cleaning Requirements

Design of a JSP based Mobile Phone Repair Reservation System

With the development of the times, mobile phones are becoming more and more popular. The increase in the number of mobile phones will lead to an increase in the number of mobile phone repairs. Developing a mobile phone repair appointment system can be beneficial for mobile phone repairs. The mobile phone repair reservation system adopts the B/S mode, using Eclipse software as the system development tool and Java programming language for system development. The system database adopts SQL Server database. In system development, JSP and Servlet technologies are used to help users repair their phones more conveniently, while also benefiting maintenance personnel. The mobile phone repair reservation system designed in this paper consists of a front-end user module and a back-end administrator module. The front-end module implements functions such as registering and logging in for front-end maintenance personnel, modifying personal information, publishing, viewing, modifying, and deleting appointments for maintenance personnel, registering and logging in for front-end users, modifying personal information, making appointments, viewing appointments, and canceling appointments. The backend module enables administrators to modify personal information, view and delete personal information of users and maintenance personnel, view and delete appointment information, and other functions.

Investigation of Cu Corrosion Defects Induced by Humidity Imbalance in the Cu Damascene Process of Semiconductors

As integrated circuit design rules shrink in semiconductor, Copper (Cu) has been employed as the back end of line (BEOL) interconnect metal to enhance device performance through reduced resistivity and resistive-capacitive delay.[1] However, Cu metal lines are prone to degradation caused by Cu oxidation-induced defects, including extrusions and voids, owing to their inherent properties.[2] Consequently, it becomes essential to regulate the oxidation rate during the chip fabrication process, particularly when the Cu metal line is exposed during the Damascene process. This control is crucial for ensuring long-term reliability and achieving a higher yield.[3]From the learning of earlier technological nodes, we are aware to and already precisely controlling both process queue time and wafer surface humidity. We must exercise control over the queue time, addressing both inter-process intervals and in-process queuing. [4] This underscores the importance of managing queue time and maintaining low environmental humidity to mitigate wafer surface defects when the FOUP (Front Opening Unified Pod) is opened at the EFEM (Equipment Front End Module).[5] Those humidity and queue times related Cu corrosion defects have been mitigated by N2 purge in FOUP and reducing the wafer quantity. However, dividing the lot, typically consisting of 25 wafers, by half or less to reduce queue times leads to an imbalance in low humidity due to N2 purging. This occurs when the FOUP is opened in EFEM.This paper examines Cu corrosion under low humidity conditions in a FOUP with a small quantity of wafers, specifically examining the influence of queue time during N2 purging in the EFEM. Through simulation of the interaction between the inlet air entering the EFEM and the purged N2 gas, a vulnerable area is identified where copper oxidation takes place. In addition, we propose an arrangement to mitigate high humidity, supported by experiments conducted under real equipment conditions.Fig. 1 shows Cu corrosion defects after ILD etching at around 20% RH in the FOUP. This defect is only observed in the lower slot of the FOUP on the N2 purged load port. Figure 2 illustrates a chart depicting the humidity inside the FOUP under various conditions. The humid region within the FOUP when opened on the N2 purged load port without wafers. (Fig.2a) While the extent of the humid area is contingent upon the flow rate of the N2 purge and the intake of air through the Fan Filter Unit (FFU), the vortex of the inlet air from the cleanroom (<42% RH) is notably observed at the bottom and front side of the FOUP. Therefore, wafers stored in the lower slot of the FOUP face an increased risk of Cu corrosions when subjected to elevated humidity levels during processes like ILD etching and subsequent cleaning. Specifically, an extended queue time amplifies the probability of Cu defects occurring in this high-humidity slot compared to slots with lower humidity. We observed an unintended increase to 28.2% RH in specific configurations when reducing the quantity of wafers to minimize queue time. (Fig. 2b)Hence, we propose an arrangement for wafers that maintains low humidity with small quantity. When placing 12 wafers in the FOUP, an arrangement with equal spacing from the first slot to the 25th slot ensures uniform N2 flow, thereby reducing the highest humidity from 28.2% RH to 14.0% RH by half. (Fig.3a) Alternatively, positioning all wafers on the upper section is another method. (Fig.3b) Therefore, by halving the quantity of wafers and reducing the process wait time by half, and applying the optimal wafer arrangement that maintains low humidity balance even with a small number of wafers, we confirmed the absence of Cu corrosion.

Design and thermal simulation of the front-end module for STARLIGHT

This paper presents a front-end module emulator for SemiconducTor Array detectoR with Large dynamIc ranGe and cHarge inTegrating readout (STARLIGHT), a versatile hybrid silicon pixel detector with a high frame rate (≥10kHz) and serving as the first charge-integrating pixel detector for XFEL in China. The detector is intended for operation in a vacuum environment, with the front-end module generating a thermal power of up to 5.443 mW/mm2, presenting a significant challenge for thermal management. To assess the thermal management capabilities of the mechanical and PCB designs for the project, a thermal emulator was developed to replicate the heat generated by the ASIC. This was particularly crucial during the early stages of the project when the ASIC was not yet available, achieved by placing copper wires on the PCB. Subsequent thermal simulations were conducted and compared with the results obtained from the thermal emulator. The comparison shows that the experimental results are very close to the thermal simulation results, validating the thermal performance of the STARLIGHT front-end modules. These endeavors not only provide validation but also offer valuable insights to ensure the thermal efficiency of the STARLIGHT front-end modules.

Digital Twin System of Substation Equipment

This paper adopts the following technical solutions to achieve: a digital twin system for substation, including: database, database configuration module, data warehousing module, background data processing module and front-end browsing module; The front-end browsing module is used to display the data sent by the background data processing module in the corresponding form according to the user's selection; The form includes building the three-dimensional model of the substation based on BIM technology, and displaying the corresponding real-time data and status in the three-dimensional components of the three-dimensional model. Compared with the existing technology, it organically integrates the three-dimensional model and panoramic monitoring data of the substation, realizes the three-dimensional panoramic display of substation assets and the acquisition of substation monitoring data, improves the spatial experience of daily operation and maintenance comprehensive monitoring, and provides a solid data platform for the subsequent in-depth mining and intelligent analysis of multidimensional data of the substation.

A coarse to fine calibration method for the q-X-Z type wafer pre-alignment device

Abstract The wafer pre-alignment device is a crucial component of the equipment front-end modules (EFEM) in the integrated circuit (IC) manufacturing industry. It corrects the wafer position and orientation errors before the wafer is transferred to the subsequent fine alignment wafer stage. To solve the calibration problem of a q-X-Z type wafer pre-alignment device, the study establishes its kinematic model and constructs the relationship between each axis and a laser sensor. Compared to the conventional method of directly selecting 4 points’ wafer edge data to achieve calibration, this paper proposes a method that makes full use of the edge data of a square calibration board. This method solves the device parameters through iteration based on coarse to fine thoughts and obtains a calibration accuracy within 10 microns. The statistical accuracy and operational repeatability of the proposed method are verified through a series of calibration experiments of the wafer pre-alignment device.

A portable and integrated traveling-wave electroosmosis microfluidic pumping system driven by triboelectric nanogenerator

The lab-on-a-chip system can simultaneously complete the preparation, reaction, separation, and detection of samples on a centi-scale platform by manipulating trace fluids. Traveling-wave electroosmosis (TWEO) technology, with the merit of electric signal-based flexible control over the fluid behavior, can achieve precise driving of fluids, which is an important requirement of the lab-on-a-chip system. However, the peripheral power equipment such as the function generator required for TWEO limits the application in some occasions lacking power supply facilities, due to its large size and high cost. In this paper, we have developed a brand-new portable and integrated TWEO microfluidic pumping system, wherein a front-end module of triboelectric nanogenerator (TENG) is in serial connection with the back-end microfluidic pumping chip, which greatly improves portability and reduces costs. The TENG can output stable four consecutively 90°-phase-shifted alternating current voltage signals in a continuous rotational motion originated by its novel electrode structure. And the four-phase traveling potential waves are applied to four sets of electrode strips alternately distributed in the microchannel, thereby inducing nonlinear electroosmotic slip on the electrode surface, achieving stable pumping of fluids in the microchannel. Compared with traditional fluid-driven methods, this system features high safety for the operator and chip but also realizes the almost instantaneous start, stop, and directional switching in response to a turn on, turn off, and turn in reverse of TENG, respectively. Finally, this system is integrated into a droplet microfluidic chip for the efficient generation of single emulsion droplets. This study presents a promising solution for the miniaturization, integration, and commercialization of lab-on-a-chip system.

Compact pixelated scintillator detector investigation for gamma ray detection

Objective. A scintillator is a luminescent material that converts high-energy photons into visible light and is widely used in medical imaging. Different scintillators are applied to gamma imaging in proton therapy and boron neutron capture therapy (BNCT). A pixelated scintillator is suitable for position measurement. The energy resolution, detection efficiency and position measurement of pixelated scintillators coupled to a SiPM were investigated via two kinds of detectors. The goal of this manuscript was to accurately measure the gamma source position through spectrum analysis in selection of energy windows for characteristic gamma lines. Approach. Scintillators were effectively manufactured and encapsulated before testing, especially for the easily deliquescent LaBr3. The compact front-end electronic prototype modules with 2 × 2 array SiPMs in stacked form and 1 × 10 array SiPMs in parallel form were developed for gamma ray energy resolution and efficiency measurements with a radioactive source of 22Na, which had two energy gamma lines at 511 keV and 1274 keV. Energy calibration was used for accurate energy window selection when measuring the position of the gamma source. Main results. Evident inconsistencies were present between different pixels of the same type of scintillator. Thus, an energy calibration method was needed. LaBr3 was the first candidate scintillator for the gamma ray spectrum measurement since it exhibited the best performance with an energy resolution of ∼5%. The recommended size of LaBr3 was 5 × 5 mm2, which had a higher efficiency than the 3 × 3 mm2 size. The gamma count of the multiple mode of the 2 × 2 array was much higher than that of the single mode, while the energy resolution was poorer. Thus, multiple mode was not suitable for gamma ray detection. The 1 × 10 array detector had the potential to measure the gamma ray source position and could be used for proton therapy and BNCT. A small deviation of 0.22 cm was observed in the measurement of the source center position with Energy Window 1 for 511 keV and Energy Window 2 for 1274 keV before the energy calibration. No deviation was observed after energy calibration. Thus, to achieve a higher accuracy position measurement, automatic energy calibration algorithm was coded into data acquisition software. Significance. The characteristic gamma lines produced by particle therapy are abundant and useful for imaging technology. Our developed compact pixelated scintillator detector coupled with SiPMs could measure the gamma spectrum with high resolution. The energy calibration and window selection method could measure the position of the source with high accuracy. Therefore, an advanced imaging device based on the energy spectrum for particle therapy could be potentially attainable.

Aluminium Scandium Nitride Thin Film BAW Resonators (FBAR) for 5G Applications

With the growing impact of 5G communication system, Radio-Frequency Micro-Electro-Mechanical-Systems (RF MEMS) technologies are becoming increasingly important in our daily lives. Development of filters in the 5G frequency range is being carried out tremendously. The rapid rise in smartphone usage, heightened data demands, congestion in the frequency spectrum, and advancements in technology have posed numerous challenges for the development of RF filters. The ultimate goal is to simplify the RF Front End Module used in smart phones, thereby achieving better selectivity. In this paper, a high frequency - high Q thin film bulk acoustic wave resonator of piezoelectric material Aluminium scandium nitride (AlScN)based FBAR is designed for 5G Application. Finite element analysis conducted using the COMSOL Multiphysics software assess the characteristics of the constructed FBAR. The outcomes indicate that the device resonates effectively at 5 GHz, exhibiting commendable return loss and a Q-factor of 1490. A high-resonance-frequency FBAR device offers advantages for 5G mobile technology.

Water vapor content prediction based on neural network model selection and optimal fusion

Accurately predicting the evolution of water vapor content has significant practical engineering implications for accurately determining the timing of artificial rain enhancement operations. However, the nonlinear, unstable, and chaotic nature of water vapor content presents considerable challenges to its precise prediction. To address this, our research proposes a combined prediction model, based on a neural network model selection mechanism and small sample water vapor content data observed by microwave radiometers in the Zhengzhou area. This combined model utilizes seven neural network models as candidate models and dynamically selects the optimal three models as the central prediction components via evaluation indicators. Additionally, we employ the maximum information coefficient method to preserve the optimal input features and use a time-varying rate wave mode decomposition algorithm as the front-end processing module. This module processes the original water vapor content sequence and extracts relevant latent information. Finally, we incorporate the African vulture intelligent optimization algorithm as the backend processing component to optimize the weighted combination coefficients, achieving the integration of prediction results. Experimental results reveal that the Mean Absolute Percentage Errors (MAPE) of the proposed model on three types of water vapor content datasets are 0.208%, 0.876%, and 0.369%, respectively. This suggests a predictive performance improvement of at least 10% compared to existing models. The prediction model proposed in this study not only establishes an accurate and reliable mechanism for predicting water vapor content but also offers more comprehensive decision support information for weather modification operations.

A comprehensive overview of core modules in visual SLAM framework

Visual Simultaneous Localization and Mapping (VSLAM) technology has become a key technology in autonomous driving and robot navigation. Relying on camera sensors, VSLAM can provide a richer and more precise perception means, and its advancement has accelerated in recent years. However, current review studies are often limited to in-depth analysis of a specific module and lack a comprehensive review of the entire VSLAM framework. The VSLAM system consists of five core components: (1) The camera sensor module is responsible for capturing visual information about the surrounding environment. (2) The front-end module uses image data to roughly estimate the camera’s position and orientation. (3) The back-end module optimizes and processes the pose information estimated by the front-end. (4) The loop detection module is used to correct accumulated errors in the system. (5) The mapping module is responsible for generating environmental maps. This review provides a systematic and comprehensive analysis of the SLAM framework by taking the core components of VSLAM as the entry point. Deep learning brings new development opportunities for VSLAM, but it still needs to solve the problems of data dependence, cost and real-time in practical application. We deeply explore the challenges of combining VSLAM with deep learning and feasible solutions. This review provides a valuable reference for the development of VSLAM. This will help push VSLAM technology to become smarter and more efficient. Thus, it can better meet the needs of future intelligent autonomous systems in multiple fields.

Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators

The 5th generation (5G) wireless telecommunication standards with newly defined frequency bands up to 6 GHz are currently established around the world. While outperforming surface acoustic wave (SAW) filters above 1 GHz, bulk acoustic wave (BAW) resonators in multiplexers for radio-frequency front-end (RFFE) modules continuously face higher performance requirements. In contrast to free-standing bulk acoustic resonators (FBARs), solidly mounted resonator (SMR) technology uses an acoustic Bragg mirror, which has already been successfully applied for several GHz applications. In this work, we investigate the potential of amorphous hydrogenated silicon-oxycarbonitride (a-SiOCN:H) thin films synthesized with low-temperature plasma-enhanced chemical vapor deposition (PECVD) as a low acoustic impedance (low-Z) material. Compared to the state-of-the-art where in Bragg mirrors up to now SiO2 is used as standard, the acoustic impedance ratio against the high-Z material tungsten (W) is enhanced for a better device performance. To limit the expected increase in viscous loss when the acoustic impedance is reduced, to a minimum, predominantly the mass density was reduced while keeping the mechanical elasticity high. By doing so, acoustic impedance values as low as 7.1 MRayl were achieved, thereby increasing the impedance ratio of high-Z to low-Z materials from 8:1 up to 14:1.

An Innovative Conformal Electronically Scanned Array Antenna for full 360° Steerability in the Ka-band

A novel approach to constructing an omnidirectional 5G/6G Ka-band Tx/Rx frontend module using an Active Electronically Steerable Array (AESA) will be presented. The 5G standard includes a number of mmWave frequency bands that provide the bandwidth for high data rates. However, up to now 5G still transmits primarily in the sub-6 GHz frequency range. Small cells like micro or pico cells operated in the mmWave range are capable to increase network capacity in densely populated areas. Efficient beam-based communications using directional antenna arrays can overcome the limitations imposed by propagation loss at high frequencies. These and a number of further requirements have been taken into account in the design of the antenna module presented here, making it a fundamental component for the cellular infra— structure of future 5G/6G mmWave networks. The dualpolarised module is using 2 x 96 elements to scan 360° in azimuth and ±45° in elevation. The operation frequency range is 24.25 GHz to 29.5 GHz, covering n258, n257, and n261 3GPP bands. Additionally, the module is capable to control up to four beams simultaneously.

A Dual-Band Dual-Polarized 2x2 Antenna Array with Beamforming for 5G AiP and mmWave Applications

In this study, we present a dual-band (28/39GHz) 2 by 2 antenna array design on a 10(4+2+4) multi-layer organic substrate with broad bandwidth and higher isolation onto a compact AiP module. In addition, the H-type slot antenna structure can improve interference and isolation between 28 and 39GHz bands. The measured result shows the isolation can larger than 15dB between low and high band. For antenna measurement, the spherical of probing chamber is utilized to validate 28/39GHz antenna pattern and performance with a package level passive testing. Our AiP measured result shows the return loss is better than 10 dB in 23.5-30.5 GHz range, with ~7 GHz bandwidth and provides a high-gain per element (above ~6 dBi) radiation pattern for 28GHz applications. For 39GHz band, the antenna has 7 GHz bandwidth and provides a 5 dBi gain between 38-45 GHz. Comparison of S-parameter between simulated and measured results, there is a good correlation to obtain the quality of manufacturing. Furthermore, a 28GHz beamforming array is designed and demonstrated. The beamfoming array consists of a four-channel transceiver with 2 x 2 antenna array. The beamformer IC is implemented by TSMC 90-nm CMOS technology and the flip-chip bonded on BT substrate. For beamforming test, an integrated socket and load board are designed for support the mmWave module and then connection between DUT and test system. The load board substrate includes the IF, LO, and DC distribution network for respectively. There are 4-channel transmit beamforming array front-end module for testing. Finally, the 3D beam steering of 2 by 2 antenna array is measured with multi-states at 28 GHz, with a maximum realized gain of 11.8 dBi achieved in the main beam (θ=0°). It shows that beamforming can be generated at a specific beam direction by controlling the phase of the signal in each antenna element.

An FPGA-based front-end module emulator for the High Granularity Timing Detector

This paper introduces an FPGA-based front-end module emulator developed for the High Granularity Timing Detector (HGTD) within the ATLAS experiment at LHC. The emulator serves as a debugger for the HGTD readout system during the stage when the front-end module is not available. Using a Xilinx-Spartan 7 FPGA, the emulator mimics the behavior of the ASIC utilized in the front-end module. In addition, it shares the same dimensions and connectors as its successor, the real front-end module. This emulator has been effectively employed in the design and testing of the HGTD.

A Folded Cascode CMOS Low Noise Amplifier with Transformer Feedback

This study proposes a folded cascode CMOS low noise amplifier (LNA) with transformer feedback, implemented using a 0.13-μm CMOS process for wireless local area network front-end module applications. Compared to a conventional cascode inductive source degeneration LNA (ISDLNA), the folded cascode ISDLNA significantly improved the input-referred third-order intercept point (IIP3) as well as the 1-dB compression point (P1dB) by ensuring a large voltage headroom. Furthermore, the designed LNA also achieved a low noise figure (NF), while also saving the silicon area by magnetically coupling the source and folding inductors. When tested experimentally, the proposed LNA showed an S21 of 11.0 dB and an NF of 2.6 dB, while achieving an &lt;i&gt;S&lt;/i&gt;&lt;sub&gt;11&lt;/sub&gt; of -7 dB at the operating frequency of 2.4 GHz. The measured input P1dB and IIP3 were -5.6 dBm and +2.5 dBm, respectively. The power dissipation was 9.6 mW from a 1.2-V supply voltage.

A Highly Integrated C-Band Feedback Resistor Transceiver Front-End Based on Inductive Resonance and Bandwidth Expansion Techniques.

This paper presents a highly integrated C-band RF transceiver front-end design consisting of two Single Pole Double Throw (SPDT) transmit/receive (T/R) switches, a Low Noise Amplifier (LNA), and a Power Amplifier (PA) for Ultra-Wideband (UWB) positioning system applications. When fabricated using a 0.25 μm GaAs pseudomorphic high electron mobility transistor (pHEMT) process, the switch is optimized for system isolation and stability using inductive resonance techniques. The transceiver front-end achieves overall bandwidth expansion as well as the flat noise in receive mode using the bandwidth expansion technique. The results show that the front-end modules (FEM) have a typical gain of 22 dB in transmit mode, 18 dB in receive mode, and 2 dB noise in the 4.5-8 GHz band, with a chip area of 1.56 × 1.46 mm2. Based on the available literature, it is known that the proposed circuit is the most highly integrated C-band RF transceiver front-end design for UWB applications in the same process.

A cloud infrastructure for enabling provision of the Material Testing as a Service (MTaaS)

This paper focuses on a ‘cloud infrastructure’ (MTaaS) that has been developed to support and coordinate integrated services and supply chain management. This will enable the seamless operation of a dynamic and adaptive system providing customer-centred material testing services. The cloud system is designed not only for decision making regarding the evaluation of the situations brought by industry and translating them into upscaling, characterisation and service workflows, but also for promoting existing products, improving facility usage and providing expertise consultancy. The development of MTaaS involves specifying the cloud infrastructure requirement, defining the back-end and front-end system architecture and modules, and outlining the operation fields of each module along with associated terminology, parameters and contents. This includes handling material testing service registration, verification, marketing, composition, preparation, offering, processing, monitoring as well as customer inquiries, monitoring and feedback. These efforts make MTaaS integrate product, service and customer-related information into a single platform, encompassing necessary operation related data, customer related data, inventory data and supply chain data.

A 23-GHz TX/LNA Front-End Module for Inter-Satellite Links With 27.8% Peak Efficiency in the TX Path and 3.1-dB NF in the RX Path

A 23-GHz TX/LNA Front-End Module for Inter-Satellite Links With 27.8% Peak Efficiency in the TX Path and 3.1-dB NF in the RX Path