This study presents surface nitriding of 4H-SiC by the irradiation of the fourth harmonics of Nd:YAG laser pulses in liquid nitrogen. A nitride layer with a depth of 1 μm is formed on the irradiated area. The irradiated area has a bumpy morphology. On the other hand, we also find a nitride layer with a smooth surface morphology in the outside of the irradiated area. The concentration of nitrogen is dependent on the laser fluence, and is 1–5%. The diffusion coefficient of nitrogen, which is deduced from the depth profile of the nitrogen number density, is much greater than the diffusion coefficient in solid SiC, suggesting the transport of nitrogen in melted SiC. Considering the fact that SiC does not have a melted state at the atmospheric pressure, it is revealed by the present work that the melted SiC is realized transiently with the help of the high pressure driven by the laser irradiation.
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