This paper proposes a method to fabricate ordered metal nano dot arrays by combination of nano plastic forming, coating, thermal dewetting, and transferring to plastic substrates. The shape and contact angle of the dots on master substrate are the key factors for successfully transferring to plastic substrates. The effects of process parameters such as indentation load, coating thickness, annealing temperature, etc. on the formation of nano dot arrays on master substrate and dots transfer to PDMS films are investigated. The results show that the ordered Au nano dots arrays are successfully formed on pre-patterned substrates and the transfer of ordered nano dot arrays to plastic films is feasible.