Flexural Ultrasonic Transducer Research Articles

A Flexural Ultrasonic Transducer for Inducing Acoustic Cavitation on Material Surfaces

Abstract Purpose This paper proposes a flexural ultrasonic transducer specifically designed for surface treatment of materials with delicate surfaces such as skin by acoustic cavitation at low frequencies. The goal of this preliminary study is to assess the resonance frequencies and the output sound pressure of the proposed transducer and confirm generation of acoustic cavitation on the surface of an artificial skin phantom. Methods A transducer prototype was designed based on structural-acoustic simulation and fabricated. The proposed design employs a concave-shaped acoustic resonator with a spherical cavity, which is driven by flexural vibration of a piezoelectric ceramic disk actuator. The transducer prototype has compact dimensions of 15 mm in diameter and 8 mm in axial length, working at frequencies around flexural vibration modes of the piezoelectric disk with a thickness of 1 mm. Results The maximum sound pressure amplitude reached 125 kPa with an input voltage amplitude of 10 V at the second resonance frequency of 167 kHz, where the third axisymmetric eigenmode was excited. Despite enhancing the maximum pressure, the sound pressure outside the resonator attenuates because the near-field distance of the irradiated sound wave is smaller than the height of the resonator. This implies that the proposed method provides the cavitation effect on material surfaces, possibly minimizing the side effect of ultrasound irradiation on the underlying structure. Cavitation generation on a urethane gel surface was directly observed by using a high-speed video camera. Conclusion We confirmed that acoustic cavitation was generated and propelled to the target surface. It concludes that ultrasound irradiation using the proposed ultrasonic transducer could be a promising alternative for effective and safe ultrasound treatment of material surfaces.

Measurement Stability of Oil-Filled Flexural Ultrasonic Transducers Across Sequential In Situ Pressurization Cycles

Measurement Stability of Oil-Filled Flexural Ultrasonic Transducers Across Sequential In Situ Pressurization Cycles

Design and Dynamics of Oil Filled Flexural Ultrasonic Transducers for Elevated Pressures

The flexural ultrasonic transducer has traditionally been limited to proximity measurement applications, such as car-parking systems and industrial metrology. Principally, their classical form is unsuitable for environments above atmospheric 1 bar pressure, due to an internal air cavity which creates a pressure imbalance across the transducer’s vibrating membrane. This imbalance leads to physical deformation and degradation of the transducer’s structure, restricting the membrane’s capacity to vibrate at resonance to transmit and receive ultrasound. There is a requirement for ultrasonic sensors which can withstand environments of elevated pressure, for example in ultrasonic gas metering. Recent research demonstrated the dynamic performance of flexural ultrasonic transducers with vented structures, allowing the pressure to balance across the transducer membrane. However, a hermetically sealed transducer is a more practical and robust solution, where the internal components of the transducer, such as the piezoelectric ceramic disc, will be protected from harmful environmental fluids. In this research, the design and fabrication of a new form of flexural ultrasonic transducer for environments of elevated pressure is demonstrated, where the internal air cavity is filled with an incompressible fluid in the form of a non-volatile oil. Dynamic performance is measured through acoustic microphone measurements, electrical impedance analysis, and pulse-echo ultrasound measurement. Together with finite element analysis, stable ultrasound measurement is achieved above 200 bar in air, opening the possibility for reliable ultrasound measurement in hostile environments of elevated pressure.

Transmitter and Receiver Enhancements for Ultrasonic Distance Sensing Systems

Flexural ultrasonic transducers experience sustained residual vibrations after their excitation has ended. This behavior limits both the minimum range and the range resolution of single-transducer distance sensors operating in pulse-echo mode. Two methods are presented to address residual vibration issues without reducing the intensity of the transmitted pressure waves. The first method is a transmitter enhancement; a number of out-of-phase damping cycles is appended to the desired number of excitation cycles, thereby hastening the decay of the pulse-imposed transducer voltage. The second method is a receiver enhancement; the echo-induced transducer voltage is isolated from the pulse-imposed transducer voltage by subtracting a stored masking signal from the acquired receiver signal. The proposed methods rely on a simple learning procedure that does not require a mathematical model of the system. Because this procedure is executed on an embedded microcontroller, the proposed methods are insensitive to variations in components or parameters. Experiments demonstrate improvements in both minimum range and range resolution.

Higher order modal dynamics of the flexural ultrasonic transducer

The flexural ultrasonic transducer (FUT) consists of a piezoelectric ceramic bonded to an edge-clamped elastic plate, for both generation and detection of ultrasound waves. It is typically employed for proximity measurement, such as in automotive parking systems, and for flow measurement in gases and liquids. Conventional industrial applications have generally incorporated FUTs with resonance frequencies up to around 50 kHz. However, there have been recent advances in the understanding of the FUT, both in terms of fabrication and operation, enabling the potential for measurement in a wider range of applications, including those of elevated pressure, temperature, and requiring multiple operating frequencies. Ultrasound measurement with FUTs at frequencies greater than 50 kHz is desirable in a range of applications, including gas and water metering in petrochemical plants, district heating, and power industries. The major restricting limitation of designing transducers to operate at these higher frequencies has been a relatively poor understanding of these transducers work, including optimisation of design and performance, and the few reports into how different modes of a FUT can be utilised for practical and reliable measurement. In this study, the higher order modal dynamics of the FUT are investigated through measurement of high frequency ultrasound waves in air, for different fundamental operating modes. A combination of experimental techniques is applied, comprising electrical impedance analysis and laser Doppler vibrometry. The experimental research is supported by analytical solutions to reveal complex higher order modal dynamics of the FUT. This investigation represents further development in widening the industrial application potential of the FUT.

Active damping of ultrasonic receiving sensors through engineered pressure waves

Transducers for ultrasonic sensing and measurement are often operated with a short burst signal, for example a few cycles at a specific excitation voltage and frequency on the generating transducer. The vibration response of a narrowband transducer in detection is usually dominated by resonant ringing, severely affecting its ability to detect two or more signals arriving at the receiver at similar times. Prior researchers have focused on strategies to damp the ringing of a transducer in transmission, to create a temporally short output pressure wave. However, if the receiving transducer is narrowband, the incident pressure waves can create significant ringing of this receiving transducer, irrespective of how temporally short the incident pressure waves are on the receiving transducer. This can reduce the accuracy of common measurement processes, as signals are temporally long and multiple wave arrivals can be difficult to distinguish from each other. In this research, a method of damping transducers in reception is demonstrated using a flexural ultrasonic transducer (FUT). This narrowband transducer can operate effectively as a transmitter or receiver of ultrasound, and due to its use in automotive applications, is the most common ultrasonic transducer in existence. An existing mathematical analog for the transducers is used to guide the design of an engineered pressure wave to actively damp the receiving FUT. Experimental measurements on transducers show that ultrasonic receiver resonant ringing can be reduced by 80%, without significantly compromising sensitivity and only by using a suitable driving voltage waveform on the generating transducer.

The High Frequency Flexural Ultrasonic Transducer for Transmitting and Receiving Ultrasound in Air

Flexural ultrasonic transducers are robust and low cost sensors that are typically used in industry for distance ranging, proximity sensing and flow measurement. The operating frequencies of currently available commercial flexural ultrasonic transducers are usually below 50 kHz. Higher operating frequencies would be particularly beneficial for measurement accuracy and detection sensitivity. In this paper, design principles of High Frequency Flexural Ultrasonic Transducers (HiFFUTs), guided by the classical plate theory and finite element analysis, are reported. The results show that the diameter of the piezoelectric disc element attached to the flexing plate of the HiFFUT has a significant influence on the transducer's resonant frequency, and that an optimal diameter for a HiFFUT transmitter alone is different from that for a pitch-catch ultrasonic system consisting of both a HiFFUT transmitter and a receiver. By adopting an optimal piezoelectric diameter, the HiFFUT pitch-catch system can produce an ultrasonic signal amplitude greater than that of a non-optimised system by an order of magnitude. The performance of a prototype HiFFUT is characterised through electrical impedance analysis, laser Doppler vibrometry, and pressure-field microphone measurement, before the performance of two new HiFFUTs in a pitch-catch configuration is compared with that of commercial transducers. The prototype HiFFUT can operate efficiently at a frequency of 102.1 kHz as either a transmitter or a receiver, with comparable output amplitude, wider bandwidth, and higher directivity than commercially available transducers of similar construction.

Venting in the Comparative Study of Flexural Ultrasonic Transducers to Improve Resilience at Elevated Environmental Pressure Levels

The classical form of a flexural ultrasonic transducer is a piezoelectric ceramic disc bonded to a circular metallic membrane. This ceramic induces vibration modes of the membrane for the generation and detection of ultrasound. The transducer has been popular for proximity sensing and metrology, particularly for industrial applications at ambient pressures around 1 bar. The classical flexural ultrasonic transducer is not designed for operation at elevated pressures, such as those associated with natural gas transportation or petrochemical processes. It is reliant on a rear seal which forms an internal air cavity, making the transducer susceptible to deformation through pressure imbalance. The application potential of the classical transducer is therefore severely limited. In this study, a venting strategy which balances the pressure between the internal transducer structure and the external environment is studied through experimental methods including electrical impedance analysis and pitch-catch ultrasound measurement. The vented transducer is compared with a commercial equivalent in air towards 90 bar. Venting is shown to be viable for a new generation of low cost and robust industrial ultrasonic transducers, suitable for operation at high environmental pressure levels.

Flow Velocity Measurement Using a Spatial Averaging Method with Two-Dimensional Flexural Ultrasonic Array Technology.

Accurate average flow velocity determination is essential for flow measurement in many industries, including automotive, chemical, and oil and gas. The ultrasonic transit-time method is common for average flow velocity measurement, but current limitations restrict measurement accuracy, including fluid dynamic effects from unavoidable phenomena such as turbulence, swirls or vortices, and systematic flow meter errors in calibration or configuration. A new spatial averaging method is proposed, based on flexural ultrasonic array transducer technology, to improve measurement accuracy and reduce the uncertainty of the measurement results. A novel two-dimensional flexural ultrasonic array transducer is developed to validate this measurement method, comprising eight individual elements, each forming distinct paths to a single ultrasonic transducer. These paths are distributed in two chordal planes, symmetric and adjacent to a diametral plane. It is demonstrated that the root-mean-square deviation of the average flow velocity, computed using the spatial averaging method with the array transducer is 2.94%, which is lower compared to that of the individual paths ranging from 3.65% to 8.87% with an average of 6.90%. This is advantageous for improving the accuracy and reducing the uncertainty of classical single-path ultrasonic flow meters, and also for conventional multi-path ultrasonic flow meters through the measurement via each flow plane with reduced uncertainty. This research will drive new developments in ultrasonic flow measurement in a wide range of industrial applications.

The Influence of Air Pressure on the Dynamics of Flexural Ultrasonic Transducers.

The flexural ultrasonic transducer comprises a piezoelectric ceramic disc bonded to a membrane. The vibrations of the piezoelectric ceramic disc induce flexural modes in the membrane, producing ultrasound waves. The transducer is principally utilized for proximity or flow measurement, designed for operation at atmospheric pressure conditions. However, there is rapidly growing industrial demand for the flexural ultrasonic transducer in applications including water metering or in petrochemical plants where the pressure levels of the gas or liquid environment can approach 100 bar. In this study, characterization methods including electrical impedance analysis and pitch-catch ultrasound measurement are employed to demonstrate the dynamic performance of flexural ultrasonic transducers in air at elevated pressures approaching 100 bar. Measurement principles are discussed, in addition to modifications to the transducer design for ensuring resilience at increasing air pressure levels. The results highlight the importance of controlling the parameters of the measurement environment and show that although the conventional design of flexural ultrasonic transducer can exhibit functionality towards 100 bar, its dynamic performance is unsuitable for accurate ultrasound measurement. It is anticipated that this research will initiate new developments in ultrasound measurement systems for fluid environments at elevated pressures.

Dynamic Nonlinearity in Piezoelectric Flexural Ultrasonic Transducers

The flexural ultrasonic transducer is a unimorph device which typically comprises a piezoelectric ceramic bonded to a metallic membrane. It is widely applied in industrial applications for metrology and proximity sensing. However, the electromechanical and dynamic characteristics of this class of transducer have only recently been reported, and the influence of different excitation levels on dynamic nonlinearity remains unclear. Dynamic nonlinearity in high-power piezoelectric ultrasonic transducers is familiar, where the performance or dynamic stability of the transducer can significantly reduce under high amplitudes of excitation. Nonlinearity can manifest as measurable phenomena such as resonance frequency drift, influenced by thermomechanical phenomena or structural constraints. There is relatively little reported science of the dynamic nonlinearity in the vibration response of flexural ultrasonic transducers. This study examines the vibration responses of four flexural ultrasonic transducers, showing the existence of dynamic nonlinearity for increases in excitation voltage. An analytical solution of the governing equations of motion for the flexural ultrasonic transducer is presented which complements the experimental investigation, and suggests a close relationship between material properties and nonlinearity. This research demonstrates a detailed dynamic characterization of the flexural ultrasonic transducer, showing the potential for the optimization of dynamic performance in industrial measurement applications.

Wideband electromagnetic dynamic acoustic transducers (WEMDATs) for air-coupled ultrasonic applications

Achieving sufficient energy transmission over a wide frequency range is a challenge which has restricted the application of many types of air-coupled ultrasonic transducers. Conventional transducer configurations such as the piezoelectric micromachined or flexural ultrasonic transducers can be considered as narrowband. This study reports a type of ultrasonic transducer, the wideband electromagnetic dynamic acoustic transducer (WEMDAT), which operates through a combination of electromagnetic induction and Lorentz force with dynamic behaviour of a micro-scale-thick conductive film. WEMDAT prototypes have been designed, fabricated, and tested, showing their compatibility with both low and high power inputs, operating efficiently as a wideband transmitter from 46.4 kHz to 144.6 kHz with a good directivity. The WEMDAT has also been shown to operate effectively as a wideband ultrasonic receiver through the measurement in a pitch-catch configuration. The WEMDAT prototypes possess an adjustable drive coil lift-off distance from the active membrane, providing flexibility for optimizing the sensitivity of the transducers for different input levels. The performance of the WEMDATs can be optimized, showing significant potential for air-coupled ultrasonic applications.

High-Frequency Measurement of Ultrasound Using Flexural Ultrasonic Transducers

Flexural ultrasonic transducers are a widely available type of ultrasonic sensor used for flow measurement, proximity, and industrial metrology applications. The flexural ultrasonic transducer is commonly operated in one of the axisymmetric modes of vibration in the low-kilohertz range, under 50 kHz, but there is an increasing demand for higher frequency operation, towards 300 kHz. At present, there are no reports of the measurement of high-frequency vibrations using flexural ultrasonic transducers. This research reports on the measurement of high-frequency vibration in flexural ultrasonic transducers, utilizing electrical impedance and phase measurement, laser Doppler vibrometry, and response spectrum analysis through the adoption of two flexural ultrasonic transducers in a transmit–receive configuration. The outcomes of this research demonstrate the ability of flexural ultrasonic transducers to measure high-frequency ultrasound in air, vital for industrial metrology.

Nonlinearity in the Dynamic Response of Flexural Ultrasonic Transducers

Recent studies of the electro-mechanical behavior of flexural ultrasonic transducers have shown that their response can be considered as three distinct characteristic regions, the first building towards a steady state, followed by oscillation at the driving frequency in the steady state, before an exponential decay from the steady state at the transducer's dominant resonance frequency, once the driving force is removed. Despite the widespread industrial use of these transducers as ultrasonic proximity sensors, there is little published information on their vibration characteristics under different operating conditions. Flexual transducers are composed of a piezoelectric ceramic disc bonded to the inner surface of a metallic cap, the membrane of which bends in response to the high-frequency ceramic vibrations of the ceramic. Piezoelectric devices can be subject to nonlinear behavior, but there is no reported detail of the nonlinearity in flexural transducers. Experimental investigation through laser Doppler vibrometry shows strong nonlinearity in the vibration response, where resonance frequency reduces with increasing vibration amplitude.

The Dynamic Performance of Flexural Ultrasonic Transducers.

Flexural ultrasonic transducers are principally used as proximity sensors and for industrial metrology. Their operation relies on a piezoelectric ceramic to generate a flexing of a metallic membrane, which delivers the ultrasound signal. The performance of flexural ultrasonic transducers has been largely limited to excitation through a short voltage burst signal at a designated mechanical resonance frequency. However, a steady-state amplitude response is not generated instantaneously in a flexural ultrasonic transducer from a drive excitation signal, and differences in the drive characteristics between transmitting and receiving transducers can affect the measured response. This research investigates the dynamic performance of flexural ultrasonic transducers using acoustic microphone measurements and laser Doppler vibrometry, supported by a detailed mechanical analog model, in a process which has not before been applied to the flexural ultrasonic transducer. These techniques are employed to gain insights into the physics of their vibration behaviour, vital for the optimisation of industrial ultrasound systems.

The electro-mechanical behaviour of flexural ultrasonic transducers

Flexural ultrasonic transducers are capable of high electro-mechanical coupling efficiencies for the generation or detection of ultrasound in fluids. They are the most common type of ultrasonic sensor, commonly used in parking sensors, because the devices are efficient, robust, and inexpensive. The simplest design consists of a piezoelectric disc, bonded to the inner surface of a metal cap, the face of which provides a vibrating membrane for the generation or detection of ultrasonic waves in fluids. Experimental measurements demonstrate that during the excitation of the piezoelectric element by an electrical voltage, there are three characteristic regions, where the frequency of the emitted ultrasonic wave changes during the excitation, steady-state, and the final decay process. A simple mechanical analogue model is capable of describing this behaviour.

The resonance vibration properties of a bimorph flexural piezoelectric ultrasonic transducer for distance measurement

In this paper, a bimorph flexural piezoelectric ultrasonic transducer (PUT) with improved design principles for distance measurement was discussed. The profiles of vibration modes of PUT have been measured by laser Doppler interferometry and compared with finite element analysis (FEA) results. The results show the measurement modes and FEA calculated ones are well matched. The combination and comparison between FEA and advanced measurement tools have provided much help to the design and fabrication of PUT.