Filtered Cathodic Vacuum Arc Research Articles

Development of smart molecularly imprinted tetrahedral amorphous carbon thin films for in vitro dopamine sensing

This study investigates how varying the thickness of tetrahedral amorphous carbon (ta-C) thin films and incorporating a titanium adhesion layer influences the structural and electrochemical properties of molecularly imprinted ta-C thin film-based sensing platforms, aiming to develop a molecularly imprinted ta-C electrochemical sensor for dopamine (DA) detection with physiologically relevant sensitivity. This electrochemical sensing platform was designed by integrating ta-C with molecularly imprinted polymers (MIPs). The process involved depositing a ta-C thin film onto boron-doped p-type silicon wafers through a filtered cathodic vacuum arc (FCVA) system. Subsequently, the ta-C sensing platforms were electrochemically coated with the MIP layer (DA-imprinted polypyrrole). We evaluated three configurations: (i) a 15 nm ta-C layer, (ii) a 7 nm ta-C layer with a 20 nm titanium adhesion layer, and (iii) a 15 nm ta-C layer with a 20 nm titanium adhesion layer. Comprehensive structural and electrochemical characterization was performed to understand how these modifications affect sensor performance. The optimized MIP/ta-C sensor demonstrated a sensitivity of 0.16 μA μM−1 cm−2 and a limit of detection (LOD) of 48.6 nM, suitable for detecting DA at physiological levels. Leveraging the synergistic effects of ta-C coatings and molecular imprinting, as well as its compatibility with common complementary metal–oxide–semiconductor (CMOS) processes underlines its potential for integration into microanalytical systems, paving the way for miniaturized and high-throughput sensing platforms.

Multi-Component Lithiophilic Alloy Film Modified Cu Current Collector for Long-Life Lithium Metal Batteries by a Novel FCVA Co-Deposition System.

Surface modification of Cu current collectors (CCs) is proven to be an effective method for protecting lithium metal anodes. However, few studies have focused on the quality and efficiency of modification layers. Herein, a novel home-made filtered cathode vacuum arc (FCVA) co-deposition system with high modification efficiency, good repeatability and environmental friendliness is proposed to realize the wide range regulation of film composition, structure and performance. Through this system, ZnMgTiAl quaternary alloy films, which have good affinity with Li are successfully constructed on Cu CCs, and the fully enhanced electrochemical performances are achieved. Symmetrical cells constructed with modified CCs maintained a fairly low voltage hysteresis of only 13mV after 2100h at a current density of 1mA cm-2. In addition, the capacity retention rate is as high as 75.0% after 100 cycles in the full cells. The influence of alloy films on the dynamic evolution process of constructing stable artificial solid electrolyte interphase (SEI) layer is revealed by in situ infrared (IR) spectroscopy. This work provides a promising route for designing various feasible modification films for LMBs, and it displays better industrial application prospects than the traditional chemical methods owing to the remarkable controllability and scale-up capacity.

Comparison of Corrosion Behavior of a-C Coatings Deposited by Cathode Vacuum Arc and Filter Cathode Vacuum Arc Techniques

This study explores the utilization of cathodic vacuum arc (CVA) technology to address the limitations of magnetron sputtering technology in preparing amorphous carbon (a-C) coatings, such as having a low ionization rate, low deposition rate, and insufficiently dense structure. Specifically, a-C coatings were prepared by the cathodic vacuum arc (CVA)and the filtered cathodic vacuum arc (FCVA) technology,, one with embedded carbon particles and one without, both having closely related carbon structures. Research is currently underway on bipolar plate coatings for fuel cells. The corrosion behavior of the prepared a-C coatings was examined through Tafel polarization analysis under simulated fuel cell operating conditions as well as potentiostatic analysis at 0.6 V under normal conditions and 1.6 V under start–stop conditions for 7200 s. The coatings before and after corrosion are characterized using scanning electron microscopy, energy-dispersive X-ray spectroscopy, Raman spectroscopy, and infrared spectroscopy. The results reveal that the incorporation of conductive graphite-like particles in the coatings reduces their contact resistance. However, the gaps between these particles and the coatings act as pathways for corrosive solution, exacerbating the corrosion of the coatings. After corrosion at 0.6 V, both sets of coatings with sp2-hybridized carbon structures are contaminated by elements such as hydrogen and oxygen, leading to an increase in their contact resistance. Under high potential conditions (1.6 V), large corrosion pits and defects appear at the locations of graphite-like carbon particles. Furthermore, both sets of samples exhibit more severe oxygen contamination and a transformation of broken carbon bonds from sp3- to sp2-hybridized forms, irrespective of whether embedded graphite particles are present.

A comparative study on the structure and properties of TiAlSiN coatings deposited by FCVA and HiPIMS

The TiAlSiN coating has garnered significant interest due to its exceptional hardness, high oxidation resistance temperature, robust film-substrate bond strength, excellent wear resistance, and superior thermal stability. The energetic ion beam technology has emerged as a potent method for fabricating thin films. In this study, TiAlSiN films were deposited utilizing magnetic filtered cathode vacuum arc (FCVA) and high power pulsed magnetron sputtering (HiPIMS), and their respective structures and properties were meticulously investigated and contrasted. Upon comparative analysis, it was observed that the elemental composition of the FCVA films underwent a pronounced change with the same. Depending on the desired film thickness, the deposition rate of the FCVA system was found to be superior over the same duration. The crystallographic structure of the films fabricated by both systems predominantly featured an fcc-(Ti,Al)N phase. Notably, at an N2 flow rate of 40 sccm, the film deposited via HiPIMS demonstrated remarkable hardness (27.04 GPa), an elevated H/E* ratio (0.103), and superior wear resistance (7.24×10−6 mm3/N∙m). The films produced by these two deposition methods exhibited discernible differences and clear trends in hardness, adhesion strength, and tribological properties. This research provides a valuable reference for selecting the most appropriate deposition process and parameters based on the desired attributes of the coatings.

Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Changes in the incident behavior of carbon ions

Diamond-like carbon (DLC) films have attracted great interest from the industry because they have beneficial mechanical properties such as low friction, high hardness, and wear resistance. DLC films have been used for the surface modification of various mechanical components, although many components that require surface treatments have complex three-dimensional (3D) surface structures. To date, 3D deposition of DLC films remains difficult using conventional methods. Particularly, uniform deposition technology on 3D components has not been developed for tetrahedral amorphous carbon (ta-C) films, which possess high CC sp3 bonds with high hardness. In this study, the filtered cathodic vacuum arc (FCVA) method was used to synthesize ta-C films on Si substrates placed on the sidewalls of trench-shaped and one-side tilted samples at various tilt angles and investigated their microstructure and hardness by Raman spectroscopy and nanoindentation. The results showed that the G peak position, full width at half maximum of G peak (FWHM (G)), and hardness of the ta-C film on the trench sidewall decreased as the depth from the top surface increased, similar to previous research. In contrast, ta-C films deposited on one-side tilted sample showed little depth dependence, and the film properties were determined by the tilt angle. We revealed that the film property dependence on the trench depth direction is due to the sputtered particles from the opposing trench sidewalls, resulting in graphitization of the film.

Enhanced tribological behavior and corrosion resistance in AlSiC-based coatings through varied carbon content

A series of AlSiC-based nanocomposite coatings with varying carbon concentrations were fabricated by filtered cathodic vacuum arc (FCVA) technology. These coatings featured an amorphous matrix with embedded Al4Si3C6 nanocrystals. With the increase in carbon content, the proportion of amorphous structure within the structure grew, which was accompanied by a rise in sp3 hybridized carbon bonds. This compositional change led to a significant enhancement in hardness and toughness. Notably, the AlSiC coating deposited at a flow rate of 50 sccm displayed exceptional mechanical properties, including a high hardness of approximately 23.2 GPa, toughness indices of H/E = 0.096 and H3/E2 = 0.216 GPa, a low friction coefficient around 0.18, a wear rate as low as ∼1.09 × 10−5 mm3 N−1 m−1, and a corrosion current density of approximately 1.08 × 10−9 A/cm2. The coating's superior tribological characteristics and corrosion resistance can be attributed to two main factors. The enhanced hardness and toughness indices (H/E and H3/E2) contributed to its improved deformability, which is essential for wear resistance. Secondly, the presence of a graphite layer formed during friction provided self-lubrication, further reducing wear. Additionally, the chemical inertness of both the amorphous SiC and the amorphous carbon phases within the nanocomposite structure significantly bolstered the coating's resistance to corrosion. The AlSiC nanocomposite coatings deposited by FCVA exhibit outstanding mechanical properties, tribological performance, and corrosion resistance, making them highly suitable for applications in environments where wear and corrosion are significant concerns.

Synthesis of Ag-Doped Tetrahedral Amorphous Carbon Coatings and Their Antibiofilm Efficacy for Medical Implant Application.

Tetrahedral amorphous carbon (taC) is a hydrogen-free carbon with extensive properties such as hardness, optical transparency, and chemical inertness. taC coatings have attracted much attention in recent times, as have coatings doped with a noble metal. A known antimicrobial metal agent, silver (Ag), has been used as a dopant in taC, with different Ag concentrations on the Ti64 coupons using a hybrid filtered cathodic vacuum arc (FCVA) and magnetron sputtering system. The physiochemical properties of the coated surface were investigated using spectroscopic and electron microscopy techniques. A doping effect of Ag-taC on biofilm formation was investigated and found to have a significant effect on the bacterial-biofilm-forming bacteria Staphylococcus aureus and Pseudomonas aeruginosa depending on the concentration of Ag. Further, the effect of coated and uncoated Ag-taC films on a pathogenic bacterium was examined using SEM. The result revealed that the Ag-taC coatings inhibited the biofilm formation of S. aureus. Therefore, this study demonstrated the possible use of Ag-taC coatings against biofilm-related complications on medical devices and infections from pathogenic bacteria.

High temperature tribological properties of TiAlSiN/NiCr multilayer coatings with different modulation periods

In this work, TiAlSiN/NiCr multilayer coatings with different modulation periods were deposited by cathodic-arc techniques, which combined filtered cathode vacuum arc (FCVA) and cathodic-arc ion plating (CAIP) techniques to deposit sublayers at different bias voltages. The nanoscale multilayer coating (TiAlSiN: 88 nm; NiCr: 9 nm) exhibited excellent oxidation resistance and thermal stability. Annealed coatings at 900 °C in air for 1 h, the thickness of the oxide layer of N32 coating is only 0.91 μm and the increase in coating thickness was only 9.01%, while the thickness of oxide layer of monolayer TiAlSiN coating is 3.02 μm and thickness increasing of 122.28%. Due to the existence of numerous interfaces, the N32 coating exhibited the lowest wear rate of 1.92 × 10−7 mm3N−1m−1 at 600 °C under abrasive wear and adhesive wear mechanisms. In parallel, a new AlNi intermetallic compound with excellent thermal stability was characterized by high-resolution transmission electron microscopy (HRTEM) at the coating interfaces. This compound is derived from different cathodic-arc techniques and bias voltages used to deposit coatings, which provides a reference for the structural design of coatings facing thermal environments.

Effects of Al and Si elements on oxidation behavior in 1000–1200 °C steam for PEO/CrAlSi composite coating on Zr alloy

A PEO/CrAlSi composite coating of ~10 μm thick on Zr–2 alloy was prepared by duplex plasma electrolytic oxidation (PEO) and filtered cathode vacuum arc deposition (FCVAD) techniques. The high temperature steam oxidation behavior of bare and PEO/CrAlSi–coated Zr alloys was performed in 1000–1200 °C. Their morphologies, microstructures, compositions and phase components were analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X–ray diffraction (XRD) and glow discharge optical emission spectrometer (GDOES). The effects of Al and Si elements on multilayers microstructure evolution of coated Zr–2 alloy at steam atmosphere were discussed. It was found that the composite coating significantly improved the high–temperature steam oxidation resistance of Zr–2 alloy. The mass gains of the PEO/CrAlSi–coated Zr–2 alloy after 3600 s exposure in 1000 °C, 1100 °C and 1200 °C steam were 28 %, 29 % and 44 % of the bare alloy. Through the oxidations, Al diffused both inward and outward to the substrate and the surface regions, respectively. Formation of a top oxide layer (Al2O3, Cr2O3) greatly suppressed the inward oxygen diffusion. The Si enrichment in the PEO interlayer formed a Zr2Si layer, which inhibited the Cr-Zr interdiffusion at 1000 °C and 1100 °C. At 1200 °C, the Zr2Si layer was oxidized and the CrZr2 phase was formed in the Zr alloy substrate especially at the β–Zr/α–Zr(O) interface.

Influence of ferrum film by FCVA deposition technique on properties of WE43 magnesium alloy

WE43 alloy was successfully coated with ferrum (Fe) films of varying thicknesses using filtered cathode vacuum arc technology. The physical phase composition, surface morphology, corrosion resistance and mechanical properties of the films were extensively investigated. The results demonstrate that a deposition time of 20 min for Fe ions exhibits minimal defects and low surface roughness. Compared to the WE43 substrate, the Fe20 alloy exhibits lower Icorr values at 81 μA/cm2, indicating enhanced corrosion resistance. Immersion experiments further confirm the superior integrity of the Fe20 film compared to other coated alloys tested. Notably, among all deposited modified alloys, Fe20 demonstrates significantly improved mechanical properties with its hardness and elastic modulus being three times higher than those of WE43, providing better wear resistance.

Mechanical and corrosion properties of hydrogen-free DLC coatings prepared on degradable as-extruded WE43 alloy using FCVA technology

Magnesium alloys have great potential for medical applications. However, their rapid degradation has limited their development. Hydrogen-free DLC coatings were deposited on WE43 using filtered cathodic vacuum arc (FCVA) technology. The influence of different negative bias voltages on the microstructure and mechanical and corrosion properties of the coatings was systematically analyzed. The research demonstrated that application of a negative bias voltage altered the surface morphology of hydrogen-free DLC coatings with amorphous structures. In addition, the coatings exhibited a decrease in hardness and elastic modulus until the negative bias voltage reached −75 V, indicating that the increase may be attributed to the rise in sp2 cluster size and the fall in sp3 content. Furthermore, electrochemical experiments demonstrated that the coated samples exhibited superior anti-corrosion properties. The coatings deposited at −75 V displayed the highest corrosion resistance, as evidenced by their minimal corrosion current (4.53 μA·cm−2), maximal film resistance (2576 Ω·cm2), and charge transfer resistance (3171 Ω·cm2). Hydrogen evolution experiments indicated that the hydrogen-free DLC coatings effectively reduced WE43 corrosion and hydrogen gas production.

Controlling adhesion and thermal stability of tetrahedral amorphous carbon coatings with intermediate sp3C fraction

Tetrahedral amorphous carbon (ta-C) coatings with an intermediate sp3C fraction were deposited on single-crystal silicon wafer substrates via intermittent filtered cathode vacuum arc (FCVA) deposition. The ta-C layer thickness and sp3C fraction in the coatings were adjusted using the deposition duration and bias voltage applied to the substrate, respectively. Some of the coated specimens were annealed at 300 and 600 °C for 4 h in a 5-Pa vacuum. The morphologies and microstructures of the specimens were characterized using scanning electron microscopy and transmission electron microscopy. The hybridization of carbon atoms was analyzed using X-ray photoelectron spectroscopy and micro-Raman spectroscopy. The mechanical characteristics of the coatings, including the critical adhesion load between the coatings and substrates, residual stress in the coatings, and hardness, were characterized. For the specimens deposited by the same bias voltage, even their top ta-C layer thickness ranged from approximately 500 nm to 1500 nm, their residual compressive stress in the coatings was maintained at a low value by the intermittent deposition of FCVA, which varied slightly with the coating thickness. The adhesion strength was improved by increasing the thickness of the as-deposited coating from approximately 12 to 40 N. The residual compressive stress of the post-annealing specimens with sp3C fraction of 45–53.8 % exhibited monotonously increasing or V-shaped variation with increasing annealing temperature. Herein, the underlying mechanisms are discussed in detail.

Deposition of nanometer-thick amorphous carbon films by filtered cathodic vacuum arc under oblique ion incidence conditions

Filtered cathodic vacuum arc (FCVA) is a promising technique for synthesizing extremely thin carbon films exhibiting highly tetrahedral (sp3) carbon atom hybridization. However, most FCVA studies are for incident ions impinging perpendicular to the substrate surface. In this study, the effects of the ion incidence angle on the thickness, structure, and surface roughness of amorphous carbon (a-C) films deposited under different substrate bias voltages were examined in the light of computational and experimental results. Dynamic simulations and film thickness measurements showed a decrease in film thickness with increasing ion incidence angle, attributed to the decrease in carbon ion fluence on the film surface. Carbon atom hybridization analysis revealed a critical ion incidence angle for a given substrate bias voltage. Simulation and experimental results demonstrated that the enhancement of sp3 hybridization resulted from carbon-carbon collision cascades on the growing film surface and densification induced by direct and recoil implantation processes controlled by the ion incidence angle and substrate bias voltage. The strong dependence of a-C film growth on the carbon ion incidence angle exemplified by the results of this study has direct implications in the oblique deposition of ultrathin a-C films with predominant tetrahedral carbon atom hybridization. The present study provides a framework for optimizing the ion incidence angle to achieve the deposition of a-C ultrathin films with high sp3 contents.

Improved deposition quality of calcium-phosphate coating on the surface of WE43 magnesium alloy via FCVA sputtering pretreatment

Calcium-phosphate (CaP) coatings have been widely used in the field of biodegradable magnesium alloys. This paper provides a novel pretreatment method before depositing CaP coatings on the surface of WE43 biomedical magnesium alloys. The surface morphology, phase composition, corrosion resistance and in vitro biological properties of coated samples were investigated. The results showed that a uniform and dense CaP coating formed on the surface of WE43 magnesium alloy pretreated by FCVA (Filtered Cathode Vacuum Arc Technology) possessed better corrosion resistance. Compared with WE43 substrate, Icorr of FCVA/CaP sample decreased by 85.56%. The ALP activity, OD value of COL secretion and mineralization of FCVA/CaP sample reached nearly 2 times higher than that of bare WE43.

Lithiophilic Zn3N2-Modified Cu Current Collectors by a Novel FCVA Technology for Stable Anode-Free Lithium Metal Batteries.

Anode-free lithium metal batteries (AFLMBs) offer high-energy-density battery systems, but their commercial viability is hindered by irregular lithium dendrite growth and "dead Li" formation caused by current collector defects. This study employed filtered cathode vacuum arc (FCVA) technology to fabricate Cu current collectors (CCs) with a lithiophilic Zn3N2 film. This advanced preparation process ensures an evenly distributed film that reduces the nucleation overpotential, homogenizes the interfacial electric field during plating/stripping processes, inhibits lithium dendrite growth, and forms a stable solid-electrolyte interphase (SEI). Our results show that the advanced Zn3N2@Cu CCs exhibit superior performance with a high CE of above 99.3% after 230 cycles at a current density of 0.5 mA cm-2 and an area capacity of 1 mAh cm-2. Additionally, Li-Zn3N2@Cu||Li-Zn3N2@Cu symmetrical cells had a longer stable cycle time of over 1000 h than that of Li||Li and Li-Cu||Li-Cu symmetrical cells at a current density of 1 mA cm-2 and an area capacity of 2 mAh cm-2. Compared with bare Cu CCs, the capacity retention rate is increased from 14.9 to 63.1% after 100 cycles with a 0.5C rate in the AFLMBs with LFP as the cathode. This work provides a pioneering, eco-friendly, and effective solution for the fabrication of anode CCs in AFLMBs, addressing a significant challenge in their commercial application.

Dry wear behavior of identical tetrahedral amorphous carbon nanofilms on sintered composites and metal substrate with varying load bearing capacities

Diamond-Like Carbon (DLC) coating is an effective surface treatment method for improving the tribological properties of machine elements and tool materials. Among them, the tetrahedral amorphous carbon (ta-C) coating has recently received much attention due to its high hardness and good heat resistance. When characterizing friction and wear patterns related to the lifetime and cost, the thickness of the ta-C coating and the type of substrates play an important role. In this paper, ta-C coatings of two thicknesses are deposited on 304 stainless steel (SS) and cemented carbide (WC–Co), which have significant differences in mechanical properties, through filtered cathodic vacuum arc (FCVA) equipment. After ta-C coating on substrates, the tribological properties of each sample are investigated. As a result, compared to bare materials, ta-C-coated materials have a reduced coefficient of friction and improved wear resistance. However, as the base material is softer, tearing occurs in a thin coating so that a thicker ta-C coating might improves the tribological properties. Since thicker ta-C coatings do not always improve tribological properties, the efficiency can be increased by customizing the ta-C coating thickness according to the substrate layer material.

Co(OH)2 nanoneedles grown on Cu/NF current collector with high areal capacitance for supercapacitors

Despite the demand for high energy-density supercapacitors has been realized when transition metal hydroxides are used as electrode materials, the ion diffusion dynamics are still limited by its high impedance. In this work, Cu is deposited on nickel foam (NF) by filtered cathodic vacuum arc (FCVA) technology to serve as an ion-diffusion-favored surface state. Co(OH)2 synthesized hydrothermally on this Cu/NF exhibits remarkably enhanced electrochemical properties compared with Co(OH)2 grown on pristine NF. The resultant electrode can deliver a large area capacity of 0.772 C cm−2 at 1 mA cm−2 and retain 80.92% of initial capacitance after 4000 cycles. Moreover, an assembled asymmetric supercapacitor shows a high energy density of 0.086 mW cm−2 at 0.4 mWh cm−2 with a long lifespan (80.67% retention after 3000 cycles). Our strategy may provide a new insight to prepare electrodes for assembling high areal capacitance supercapacitors.

Effects of Ti ion deposition on corrosion resistance of WE43 alloy

AbstractTi films with different thicknesses were successfully deposited on the surface of WE43 alloy by filtered cathode vacuum arc technology, and the microscopic morphology, structural composition, and corrosion resistance of the films were studied by means of X‐ray diffractometer, X‐ray photoelectron spectroscopy and scanning electron microscope. The results show that when the deposition time of Ti ions is 800 s, the thickness of the Ti film is 2.35 μm, the surface of the film is dense, and there are few defects. Meanwhile, Ti800 alloy has the best corrosion resistance among the four modified alloys. It has a corrosion current density (Icorr) of 2.9 μA·cm−2, which is about 50 times lower than that of unmodified alloy. This conclusion is also confirmed by the complete film layer of Ti800 alloy and the tight bonding with the substrate after immersion experiments. Good corrosion resistance is attributed to a dense and relatively chemically stable TiO2/Ti structure in simulated body fluid corrosive media.

Filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon thin films on surgical blades and its corrosion resistance in phosphate buffer solution (PBS) at pH 7.4

Surgical blades are prone to corrosion in a body fluid environment, increasing the risk of surgical infection and inflammation. In this paper, the ta-C thin films was deposited on surgical blades by filtered cathode vacuum arc (FCVA) method. Modern analytical methods such as SEM, Raman, surface profiler and electrochemical corrosion were used for the test and analysis. The results show that the corrosion potential and corrosion current density of uncoated surgical blades are −507 mV and 2.43 μA/cm2 during surgery operation in a simulated human environment (pH 7.4 PBS solution), and the corrosion potential of the ta-C thin films surgical blades immersed in 0.25 h, 0.5 h and 1 h are −395 mV, −431 mV, −445 mV, and the corrosion current density are 1.11 μA/cm2, 1.46 μA/cm2, 1.58 μA/ cm2. The results show that the ta-C thin films surgical blades are excellent corrosion resistance during surgery operation in a simulated human environment. SEM shows that the ta-C thin films surgical blades have a smooth surface with a compact and uniform films structure, and the thicknesses of the ta-C thin films and Ti transition layer are 2.2 µm and 2.4 µm respectively. The surface profiler shows that the average roughness of the surgical blades and the ta-C thin films surgical blades are 295.979 nm and 477.417 nm. Raman shows that ta-C thin films is of high purity, without any impurity phase, and does not cause other adverse reactions during surgery operation.

Structure control of high-quality TiAlN Monolithic and TiAlN/TiAl multilayer coatings based on filtered cathodic vacuum arc technique

Coating techniques are used to improve the surface properties of materials. The filtered cathodic vacuum arc (FCVA) technology is an effective method to obtain high-quality dense coatings. Through FCVA technology, the contradiction between large thickness (over 10 μm) and compactness of TiAlN ceramic coatings was resolved. In this study, a monolayer TiAlN coating with a thickness of 17.13 μm, which possess a hardness of 34.31 GPa was obtained by the FCVA technology. The toughness of the coating was improved by the multilayer structure design which consists of TiAlN/TiAl. The best H/E and H3/E2 value of multilayer coating reached 2.38 times and 4.83 times higher than that of monolayer coating, and the hardness was only decreased by 15.46% at the same time. The highest critical load of adhesion strength for multilayer coatings reached 89.56 N, which is 1.98 times higher than the monolayer coating (44.24 N). For multilayer coating, the mass loss rate in anti-sand erosion test at high angle with the speed of 90 m/s is as low as 0.537 × 10−4 g/g. The erosion resistance per unit thickness of the multilayer coating reaches 1.9 times higher than that of the monolayer coating. At the same time, the multilayer coating has super wear resistance under oil lubrication environment. There is no obvious wear loss in the harsh reciprocal tribological test for 300 min with a normal load of 20 N and a reciprocating friction frequency of 4 Hz. The TiAlN/TiAl multilayer coating with large thickness and high density has excellent crack resistance and has application prospects in high load environments.