Fiber-optic interferometry technology has advanced rapidly in recent years. However, accurate measurement of the displacement over long ranges remains a challenge. This study reveals that fiber interferometers with Fabry–Perot cavities experience non-elliptic multi-order nonlinear errors due to parasitic interference, leading to nonlinearity correction failures in the case of reflectivity mismatch. We proposes a nonlinearity-suppressed microprobe fiber interferometer to measure long-range displacement with high accuracy. The proposed microprobe interferometer structurally avoids non-elliptic nonlinearities from higher-order harmonics and ensures the effectiveness of the nonlinearity correction method. Moreover, we optimized the micro-sensing probe parameters based on an established multimedia transmission interference model to further improve the measurement accuracy of long-range displacement. Nonlinear errors are reduced from 2.3 nm to 0.92 nm in the application range 0–700 mm. The findings of this study demonstrate that the proposed nonlinearity-suppressed microprobe fiber interferometer is suitable for sub-nanometer accuracy measurements over displacements of several hundred millimeters, especially in limited-space scenarios. It has great potential for industries seeking breakthroughs in long-range displacement measurement, such as robotics, medical devices and manufacturing.
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