ZnO is a promising thermoelectric ceramic material, but the low electrical conductivity and high thermal conductivity restrict its satisfactory thermoelectric performance. Chemical doping is an effective way to improve the thermoelectric properties of ZnO. Due to the valence states and similar ionic radii of Fe3+ and Zn2+, Fe was selected as the effective dopant for ZnO. In this work, Fe-doped ZnO samples were prepared using hydrothermal synthesis and microwave sintering technology under oxygen-depleted conditions. The electrical conductivity of sintered Fe-doped ZnO was greatly improved owing to the energy band adjustment. The maximum power factor of 3108 μW/mK2 at 800 K was obtained from Zn0.997Fe0.003O, which is about 4.4 times greater than that of pure ZnO. Meanwhile, the small grain size (300–500 nm) and residual pores resulted from microwave rapid sintering in an oxygen-depleted environment, as well as the point defects caused by Fe3+ substituting for Zn2+, significantly reduced the thermal conductivity. Finally, the highest ZT value of 0.91 has been achieved in Zn0.997Fe0.003O at 800 K.
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