Diffusion plays a vital role during the fabrication of many materials. It is a well-known fact that stress can influence diffusion behavior. In order to optimize material processing techniques, a quantitative evaluation of the effect of stress on diffusion is essentially required. By analyzing the free energy change in a Ti-O system during diffusion, a phase-field model was developed to address this issue. Using this model, the diffusion of oxygen atoms in pure titanium under different stress states was investigated. It was observed that the true equilibrium concentration of oxygen was proportional to its hydrostatic pressure. Tensile stress can increase the oxygen concentration. This raise in concentration decreased with temperature. However, the promotion of diffusion can be attained in deeper regions at a higher temperature. On the contrary, compressive stress inhibited the diffusion of oxygen in pure titanium. Under a certain compressive stress, the decrease in the oxygen concentration at the surface layer was more significant at a lower temperature, while a decrease could be observed at a deeper distance from the surface at a higher temperature. A thermodynamic explanation of the effect of stress on diffusion was given based on the proposed phase-field model.
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