A stable surface layer is essential for a high stable long life-span photocathode. By using fluorine instead of oxygen in activating the surface of GaAs substrate, the strong electronegativity of fluorine may improve the stability of photocathode. Life-span of reflective GaAs(Cs, F) photocathode has been made up to 8, 500 hours. Furthermore, Its technological reproducibility and anti-contamination ability are better than those of GaAs(Cs, O2) photocathodes.