In this study, lithium thio-germanate thin-film electrolytes for lithium rechargeable batteries have been successfully prepared by radio-frequency (RF) magnetron sputtering deposition in Ar gas atmospheres. The targets for RF sputtering were prepared by melting, milling and pressing the appropriate amounts of the starting materials in the nLi2S+GeS2, n=1–4, binary system. 2mm wide×18mm long Au electrodes with a parallel configuration of 2mm spacing were sputtered to ∼100nm thick at a sputtering rate at ∼5nmmin−1 on Al2O3 single crystal substrates. Thin-film electrolytes were grown on this electrode assembly at 50W power and 25mtorr in Ar gas pressure. The ionic conductivities of the thin-film electrolytes were measured from −25°C to 100°C with 25°C increments over the frequency range 0.1Hz–1MHz. The d.c. ionic conductivities determined from complex plane plots of the impedance of the Li2GeS3, Li4GeS4, Li6GeS5, and Li8GeS6 amorphous thin films at 25°C were found to be 1.1×10−4Scm−1, 7.5×10−4Scm−1, 1.7×10−3Scm−1, and 7.0×10−5Scm−1, respectively. As the Li2S content in the thin film increases, the ionic conductivities of the thin films increase from n=1 to n=3. However, for the n=4 Li8GeS6 thin film, the ionic conductivity decreased and the activation energy increased. The maximum in the conductivity for the n=3 film is among the highest ever reported for an amorphous solid state Li+ ion conductor.
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