The effect of electron-beam irradiation (EBI) on Ag reflector is investigated in order to improve the efficiency of flip-chip InGaN/GaN multiple-quantum-wells micro light-emitting diode (μ-LED) arrays. After EBI, small size grains are diffused and then become larger grain. Therefore, grain boundaries are reduced which originates both the crystal quality and the reflectance of Ag reflect to improve. Grain size of Ag reflector is increased with the increase in EBI time that is consistently observed by different kinds of material characterizations. 5 min EBI-based Ag reflector shows higher reflectance (~91%) at 450 nm than without EBI sample (~84%). Finally, without and with EBI on Ag reflector-based μ-LED arrays are fabricated. After EBI, there is no change in forward bias voltage except optical performances. At driving current, Ag reflector with EBI-based μ-LEDs has higher light-output-power, electroluminescence intensity and electroluminescence distribution over the chip area compared to without EBI-based μ-LEDs. Usually, increased light-extraction-efficiency causes the external-quantum-efficiency of the μ-LEDs to increase. These enhanced optoelectronic performances are consistently described by using microscopic and macroscopic characterizations.
Read full abstract