Electroless Au is used to vertically connect copper pillars with electroless Ni immersion Au surface finish on two stacked chips by a microfluidic electroless interconnection process. A very low bonding temperature of 50°C and a pressure-less bonding process can be achieved. The vertical interconnections are formed by a forced flow of electroless Au plating solution through a microchannel so that the reduced Au atoms self-assemble between the gaps of facing copper pillars to complete the interconnections. The deposited Au grains span the entire gap across the two copper pillars, suggesting that the rate-limiting step is more likely to be the nucleation rather than the growth of the Au grains. Four-point probe measurements show that the average resistance of the electroless-Au-bonded interconnections is low. Mechanical shear testing reveals that the bonding of the interconnections is strong. Furthermore, it is demonstrated that this process is capable of accommodating a high degree of pillar misalignment.
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