E-beam Equipment Research Articles

Advice: A European effort towards “automatic” E-beam testing

The usefulness of E-beam equipment in VLSI validation have been overstressed. However, only recently the necessity of a full integration between the CAD (Computer Aided Design) world and E-Beam world has been felt. The next step further is the complete automation of an E-beam debugging procedure. This paper presents a description of an integrated E-beam debugging system, developed under Esprit Project 271 .