Commercialized micro ultrasonic transducer generally adopts thickness mode to produce ultrasound radiation of thickness direction. The miniaturization of low-frequency transducer is a problem due to frequency inversely proportional to thickness of transducer. A new micro contour mode ultrasound transducer is proposed for satisfying miniaturization design. Theory analysis, FEM analysis and experimental investigation are carried out to verify the principle and improve the sound field distribution of contour mode transducer. Three kinds of contour transducers with width 300 μm, 600 μm, and 900 μm are fabricated and the reflecting house is added to improve lateral resolution. The performance is evaluated by electrical impedance, pulse-echo response tests and B-mode imaging tests with a 25 µm tungsten wire phantom. The corresponding experiment result of center frequency, −6 dB bandwidth and sensitivity are 4.1 MHz@37 %@4.5Vpp, 2.5 MHz@37 %@3.4Vpp, and 1.8 MHz@29 %@2.0Vpp respectively. Wire phantom imaging showed the lateral resolution has been markedly promoted with reflecting house. Compared with traditional thickness mode transducer, the proposed transducer can achieve smaller size with simplifying fabricated structure. It has a good application prospect in the fields of intervention image and therapy.
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