The hydrogen permeability of multilayered films consisting of various oxide and metal films, e.g. V 2O 5/Cu, was investigated using the colouring phenomenon of amorphous WO 3 and was found to be associated with the capability of dissociation of hydrogen molecules and the hydrogen densities of the oxide layers. Hydrogen separation has been performed using V 2O 5/Cu multilayered films formed on a polyimide membrane. The hydrogen permeability coefficient of the films in the temperature range 343–368 K was found to be about 10 times as large as that of copper films owing to the capability of hydrogen dissociation at the V 2O 5/Cu double layer and owing to the large amount of hydrogen taken up by V 2O 5. Mixtures of H 2-CO and H 2-Ar with 50 mol% H 2 had a concentration of H 2 as high as 97 mol% after permeation through the membrane. When an LaCu 5 film was formed between the copper and polyimide film, the hydrogen permeability coefficient of the film increased owing to enhanced recombination of H atoms.