In reciprocating diamond wire sawing of quartz glass, the reversing and acceleration and deceleration will cause the position change of diamond wire, resulting in the discontinuous wire sawing in the reversing stage, so as to leave residual material on the processing surface and form wire marks. Also, the cutting load will cause diamond wire deformation as bow shape, and affect the machining accuracy. In this paper, the evaluation of DWS machining performance of quartz glass focus on the sawing time, cutting force and vibration, wire tension, machining surface flatness and roughness, surface morphology and wire state. The theoretical analysis of wire mark was carried out, and the simplified wire bow model of quartz glass sawing was established. The existence of wire mark and wire bow were verified by detecting the 3D contour of the slice. In addition, a diamond wire electrical discharge sawing (DWEDS) was performed to find the differences to DWS in the above indicators. Experiments were presented in jet cooling and bath cooling conditions. It was found that the cutting force, vibration, and wire tension of DWEDS are more stable than that of DWS. The DWEDS has been proved helpful to improve machining performance of quartz glass from surface roughness, sawing time, processing state, and wire bow control as it reduces the macro cutting force acting on the diamond wire although the discharge effect is weak. The SEM of slice surface and diamond wire showed no significant difference between DWEDS and DWS. Also, the influence of feed speed and cooling methods on machining performance was investigated.
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