Direct Current Microhollow Cathode Discharges Research Articles

Direct current microhollow cathode discharges on silicon devices operating in argon and helium

Microhollow cathode discharges have been produced on silicon platforms using processes usually used for MEMS fabrication. Microreactors consist of 100 or 150 μm-diameter cavities made from Ni and SiO2 film layers deposited on a silicon substrate. They were studied in the direct current operating mode in two different geometries: planar and cavity configuration. Currents in the order of 1 mA could be injected in microdischarges operating in different gases such as argon and helium at a working pressure between 130 and 1000 mbar. When silicon was used as a cathode, the microdischarge operation was very unstable in both geometry configurations. Strong current spikes were produced and the microreactor lifetime was quite short. We evidenced the fast formation of blisters at the silicon surface which are responsible for the production of these high current pulses. EDX analysis showed that these blisters are filled with argon and indicate that an implantation mechanism is at the origin of this surface modification. Reversing the polarity of the microdischarge makes the discharge operate stably without current spikes, but the discharge appearance is quite different from the one obtained in direct polarity with the silicon cathode. By coating the silicon cathode with a 500 nm-thick nickel layer, the microdischarge becomes very stable with a much longer lifetime. No current spikes are observed and the cathode surface remains quite smooth compared to the one obtained without coating. Finally, arrays of 76 and 576 microdischarges were successfully ignited and studied in argon. At a working pressure of 130 mbar, all microdischarges are simultaneously ignited whereas they ignite one by one at higher pressure.

Low temperature, atmospheric pressure, direct current microplasma jet operated in air, nitrogen and oxygen

Micro-plasma jets in atmospheric pressure molecular gases (nitrogen, oxygen, air) were generated by blowing these gases through direct current microhollow cathode discharges (MHCDs). The tapered discharge channel, drilled through two 100 to 200 μm thick molybdenum electrodes separated by a 200 μm thick alumina layer, is 150 to 450 μm in diameter in the cathode and has an opening of 100 to 300 μm in diameter in the anode. Sustaining voltages are 400 to 600 V, the maximum current is 25 mA. The gas temperature of the microplasma inside the microhollow cathode varies between ~2000 K and ~1000 K depending on current, gas, and flow rate. Outside the discharge channel the temperature in the jet can be reduced by manipulating the discharge current and the gas flow to achieve values close to room temperature. This cold microplasma jet can be used for surface treatment of heat sensitive substances, and for sterilization of contaminated areas.

Spectroscopic measurements and electrical diagnostics of microhollow cathode discharges in argon flow at atmospheric pressure

This paper is dedicated to the study of the electrical and optical characteristics of direct current microhollow cathode discharges (MHCD) in argon flow. Experiments have been carried out in order to determine the so-called Paschen’s curves in a static open MHCD. Current-voltage characteristics were obtained as a function of the pressure and hole diameter. MHCD enable stable direct current discharge operation, which could be ignited for pressures ranging from 12 to 800 Torr, in a very wide range of current densities and electrodes materials. Optical emission spectroscopy and analysis of the spectral line broadening of plasma line emissions were performed in order to measure parameters such as electron number density (2–4 × 1014 cm $^{-3})$ , gas temperature (460–640 K), excitation temperature (~ 7000 K) and electron temperature (~ 8500 K), for current ranging from 7 to 15 mA. Lower gas temperature was measured compared to the static MHCD ones.

Effect of limiting the cathode surface on direct current microhollow cathode discharge in helium

This paper describes how to light several microdischarges in parallel without having to individually ballast each one. The V-I curve of a microhollow cathode discharge is characterized by a constant voltage in the normal glow regime because the plasma is able to spread over the cathode surface area to provide the additional secondary electrons needed. If one limits the cathode surface area, the V-I characteristic can be forced into an abnormal glow regime in which the operating voltage must increase with the current. It is then possible to light several microdischarges mounted in parallel without ballasting them individually.

Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere

We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200μm diameter at 9mA and the optimum value of gas velocity×diameter for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of E∕N strength for 200μm (0.31m2∕s) and 500μm (0.78m2∕s) air discharge at 8mA under the velocity of 156m∕s. As a result, an increase of 46.7% in E∕N strength of the discharge of 200μm hole was obtained compare to that of 500μm.

Characteristics of direct current microhollow cathode discharges combined with dielectric barrier discharges as preionizer

Characteristics of direct current microhollow cathode discharges (MHCDs) combined with dielectric barrier discharge (DBD) electrodes as preionization source were studied experimentally and theoretically. The DBD preionization significantly reduced the sparking voltage (from 3.1–3.2to2.4–2.5kV) and improved the spatial uniformity of the multihole MHCDs. Theoretical calculations using the finite element method indicate that the electrons generated by DBDs in the negative phase of the applied voltage could be accelerated into the MHCD electrodes and serve as the seeding electrons for initiating MHCDs. It was experimentally demonstrated that pulselike MHCDs were synchronously triggered by the preionized DBD current pulses.

Xenon excimer emission from pulsed microhollow cathode discharges

By applying electrical pulses of 20 ns duration to xenon microplasmas, generated by direct current microhollow cathode discharges, we were able to increase the xenon excimer emission by more than an order of magnitude over direct current discharge excimer emission. For pulsed voltages in excess of 500 V, the optical power at 172 nm was found to increase exponentially with voltage. Largest values obtained were 2.75 W of vacuum-ultraviolet optical power emitted from a single microhollow cathode discharge in 400 Torr xenon with a 750 V pulse applied to a discharge. Highest radiative emittance was 15.2 W/cm2. The efficiency for excimer emission was found to increase linearly with pulsed voltages above 500 V reaching values of 20% at 750 V.

Series operation of direct current xenon chloride excimer sources

Stable, direct current microhollow cathode discharges in mixtures of hydrochloric acid, hydrogen, xenon, and neon have been generated in a pressure range of 200–1150 Torr. The cathode hole diameter was 250 μm. Sustaining voltages range from 180 to 250 V at current levels of up to 5 mA. The discharges are strong sources of xenon chloride excimer emission at a wavelength of 308 nm. Internal efficiencies of approximately 3% have been reached at a pressure of 1050 Torr. The spectral radiant power at this pressure was measured as 5 mW/nm at 308 nm for a 3 mA discharge. By using a sandwich electrode configuration, consisting of five perforated, alternate layers of metal and dielectric, a tandem discharge—two discharges in series—could be generated. For an anode–cathode–anode configuration the excimer irradiance, recorded on the axis of the discharge, was twice as large as that of a single discharge. The extension of this basic tandem electrode structure to a multiple electrode configuration allows the generation of high irradiance excimer sources. Placing such a structure with a string of microhollow cathode discharge into an optical resonator promises to lead to a direct current microexcimer laser.