An integrated current-source high-frequency pulse excitation power supply with high power factor (PF), low total harmonic distortion (THD) of the input current, and high efficiency for dielectric barrier discharge (DBD) loads is proposed in this article. The proposed power supply consists of a current source unit and a bipolar pulse excitation voltage generation unit. The current source unit is used to generate a current source for the excitation voltage generation unit and achieve a high PF and a low current harmonic distortion in the ac side of the proposed power supply. By planning the modes of the excitation voltage generation unit, not only a bipolar pulse excitation voltage with high rising and falling rates on the DBD loads is generated, but also the soft-switching of all power switches is achieved. The experimental results show that not only a unity PF ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$>$</tex-math> </inline-formula> 0.99) and a low THD ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$<$</tex-math> </inline-formula> 10%) are achieved, but also a bipolar high-frequency (hundreds of kilohertz) pulse excitation voltage with high average rising and falling rates (7.227 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times$</tex-math> </inline-formula> 109 V/s) for a DBD excimer lamp is generated. Finally, in comparison with different power supplies, the proposed power supply can not only fully take advantage of the potential of the DBD excimer lamp but also has many advantages of high efficiency (92%), integrated structure, and simple driver.