Diamond Tip Research Articles

Single Layer Control of Nanoscale Metal-Insulator Transition at the LaAlO3/SrTiO3 Interface.

Modern quantum device fabrication often requires precisely adding and removing materials in situ at nanoscales, which is challenging for high-quality correlated oxide devices. In this work, we present a novel nanofabrication method that remotely controls the interfacial metal-insulator transition at the LaAlO3/SrTiO3 interface by selectively removing an LaAlO3 overlayer using a diamond tip. Remarkably, we observe a large force window within which single atomic layer precision of control is achievable. Our results confirm the critical thickness and charge transfer mechanism through a layer-by-layer removal process at the interface. Additionally, high-quality nanodevices, including nanochannels and single electron transistors, are successfully fabricated using this method. This nonvolatile and high-precision nanofabrication method provides a promising oxide platform for quantum engineering by harnessing the rich electron correlations at the nanoscale.

Generation of self-healing and sliding wear resistant titanium surfaces by different pico-second laser induced periodic surface structures

Selective and complete micro-patterning (μ-patterning) of α‑titanium surfaces were performed using a 1064 nm laser system. With a fluence of 0.6 J⋅cm−2 and a pulse duration of 10 ps, two different μ-patterns of laser induced periodic surface structures (LIPSS) were generated by mainly changing the number of pulses per spot and the spot-to-spot distance. A high number of pulses per spot and a large spot-to-spot distance of 60 μm gives selectively with LIPSS modified dimples. Their spatial period varies from 159 nm to a maximum of 620 nm inside the dimples. An increased fraction of TiO2 in the crystalline form of rutile gave improved wear resistance and a coefficient of friction COF of 0.20 ± 0.02. If the spot-to-spot distance is reduced to 6 μm and the number of pulses at one spot remains low, a completely rippled surface with slightly increased oxide fraction but still a metallic plastic behaviour was able to show volume expansion during sliding. The observed self-healing ability of this LIPSS pattern is correlated with the relief of compressive stresses in this study. As volume expansion operates against the sliding motion of the diamond tip, high COFs of 0.62 ± 0.11 for a normal load of 1.0 N and 0.45 ± 0.04 for a normal load of 0.5 N were measured. After further optimisation, such a tailored increase in COF and load stimulated volume expansion of the surface could be useful in order to act against implant loosening and undesired movements.

Reusable Ag SERS substrates fabricated by tip-based mechanical lithography

Surface-enhanced Raman spectroscopy (SERS) is a highly sensitive, non-destructive technique that amplifies molecular scattering signals via engineered 'hot spots' at the micro/nanoscale. However, currently SERS substrates still face problems such as disposable use, poor consistency, strict environmental requirements, and complex processing processes. The development of new SERS substrates is crucial for advanced detection. In this study, a reusable and consistent Ag-based SERS substrate was developed with scanning probe lithography (SPL). Based on the designed machining with a diamond tip, the effects of parameters, including normal load, scanning feed/spacing, period and amplitude, on the formation of micro/nanostructures on Ag surface were investigated to meet the best candidate for SERS substrate. This method can be applied to soft metals like Au, Ag, and Cu, with Ag substrates demonstrating a higher Raman detection limit compared to Au or Cu. Finally, the reuse of Ag SERS substrate was achieved by surface cleaning and/or oxide layer removing. This study highlights a low-cost and feasible approach to high-performance SERS substrate preparation, with significant potential for practical applications and further research.

Fabrication of tips for scanning probe magnetometry by diamond growth

The use of quantum sensors is promising detailed insights into physical phenomena such as magnetism or superconductivity. One example of such quantum sensors is a microscopic diamond tip containing nitrogen vacancy (NV) centers, which is capable of producing correlated measurements of vectorial magnetic fields and the sample topography on the nanoscale. In this study, we present a chemical vapor deposition (CVD) process to produce diamond tips with NV centers by overgrowing microstructured diamond substrates. The resulting diamond tips exhibit a radius of curvature of approximately 10 nm, suitable for use as a probe in an atomic force microscope. The magnetic sensitivity of the CVD-grown diamond tips is characterized with pulsed measurements of the optically detected magnetic resonance, which yield a minimum magnetic sensitivity of 60 µT Hz−1 . The growth of the diamond microstructures is observed to differ from the commonly used geometric model predicting CVD growth of bulk diamond crystals. We identify an empirical model for the growth behavior of the microstructures by taking into account processes described in the step flow growth model for crystals. Additionally, we demonstrate the applicability of the developed CVD growth process to membrane substrates required for the preparation of magnetometry-capable diamond tips.

Application of mesh-free and finite element methods in modelling nano-scale material removal from copper substrates: A computational approach

This study explores the modelling methodology using mesh-free smoothed particle hydrodynamics (SPH) and finite element modelling (FE) techniques to simulate the AFM-based nano-scratching processes for advancing precision engineering in nanotechnology. Tip wear in nano machining substantially increases the tip radius, thereby influencing the material removal mechanism and subsequently affecting the quality of machined nanostructures. In this context, this study examines the effects of rake angle (the inclination of the main cutting edge to the plane perpendicular to the scratched surface), tip radius and scratching depth on cutting forces, groove dimensions, and deformed thickness. This was achieved by implementing an in-house SPH method based particle code employing a Lagrangian algorithm, and an FE model incorporating the dynamic explicit algorithm implemented (in ABAQUS) to carry out nano-scratching simulations. The investigation revealed that the cutting mechanism transitioned to ploughing when the scratching depth decreased to 30% of the tip radius for OFHC-Cu workpiece material machined with a diamond tip. The dominance of normal forces over cutting forces during scratching indicated the side flow of material in the vicinity of the tip radius under intense contact pressure. The ploughing mechanism exhibited more sensitivity at a higher negative rake angle of 60°. Increased scratching depth and tip radius led to more significant material deformation owing to the induction of higher cutting forces, with the maximum deformation thickness 3.6 times the tip radius. The simulated results demonstrated favourable concordance with the experimental data.

ВЛИЯНИЕ РЕЖИМА НАНЕСЕНИЯ АНТИФРИКЦИОННОГО ПОКРЫТИЯ УЛЬТРАЗВУКОВОЙ ОБРАБОТКОЙ НА ШЕРОХОВАТОСТЬ ОБРАБАТЫВАЕМОЙ ПОВЕРХНОСТИ

The article presents an experimental study of the effect of the ultrasonic diamond smoothing mode on the surface roughness of the roller bearing roller end face in the presence of graphite nanopowder on the treated surface. In the presence of graphite nanopowder on the surface, the diamond smoothing process is accompanied by the formation of a solid antifriction coating on the treated surface, which can affect the formation of the microrelief of the treated surface. The design of an ultrasonic installation is described for diamond smoothing of the rollers end surface with the possibility of simultaneous application of a solid antifriction coating to this surface. The installation is assembled on the basis of a 16K20 screw-cutting machine. It consists of a device for installing rollers in the chuck of the lathe and an ultrasonic transducer mounted on the caliper of the machine. A diamond tip was used as a working tool in this device which was attached to the end of the oscillation concentrator of the ultrasonic transducer. Axle box bearing rollers of 36-42726E2M series (GOST 18855-94) were used as experimental samples. The subject of research was regression dependences of the influence of ultrasonic processing mode on the treated surface roughness. Full factorial experiment method was used to conduct the research. The tool tip rounding radius, tool transverse feed, specimen rotation speed, and tool pressure force on the machined surface of the specimen were used as varying factors. The power-law dependence of treatment indices on the adopted varying factors was taken as a mathematical model. It is shown that the greatest influence on the surface roughness is exerted by the tool transverse feed and the diamond tip rounding radius.

Design, Fabrication and Evaluation of Diamond Tip Chips for Reverse Tip Sample Scanning Probe Microscope Applications

Design, Fabrication and Evaluation of Diamond Tip Chips for Reverse Tip Sample Scanning Probe Microscope Applications

Efficacy and tolerability of a novel cosmetic growth factor serum when used as part of biweekly diamond tip hydradermabrasion treatments on facial skin.

Growth factor preparations have demonstrated effectiveness in reversing age-related changes in facial skin. TNS® Advanced+ Serum (TNS A+ Serum; SkinMedica®, Allergan Aesthetics, an AbbVie Company) and TNS Advanced+ Pro-Infusion Serum for DiamondGlow® (DG-TNS A+; Allergan Aesthetics) combine growth factor technology with active botanical ingredients to target signs of skin aging. This prospective clinical study evaluated the effectiveness and tolerability of biweekly facial hydradermabrasion (DiamondGlow [DG]; Allergan Aesthetics) plus DG-TNS A+ combined with at-home topical TNS A+ Serum. Females aged 25-65 years with mild to severe facial photodamage received 6 biweekly DG plus DG-TNS A+ in-office treatments with at-home twice-daily TNS A+ Serum for 12 weeks. Investigator-assessed clinical grading of multiple skin attributes, subject self-assessments, instrumentation measurements, and clinical grading of irritation parameters (0-3, none to severe) were conducted at Visit 1, Day 3, and biweekly from Weeks 2-12. Twenty-nine women (Fitzpatrick skin types II-VI; 52% White, 41% African American) were enrolled. Immediate significant improvements after 1 DG plus DG-TNS A+ treatment were observed for fine lines/wrinkles, skin smoothness (visual and tactile), radiance, and hydration (all p ≤ 0.004). From Weeks 6-12, all investigator-assessed parameters showed significant improvements versus baseline (all p ≤ 0.002 at Week 12). Mean tolerability scores were <1 across parameters. All subjects (100%) were satisfied with results at Weeks 2-12. The combination of biweekly hydradermabrasion plus DG-TNS A+ with at-home TNS A+ Serum treatments was well tolerated and produced immediate, progressive improvement in multiple signs of photoaging in facial skin.

Efficacy and safety of novel topical pigment-correcting regimen with biweekly diamond tip microdermabrasion procedures on facial hyperpigmentation.

Facial hyperpigmentation can negatively affect an individual's emotional and psychosocial well-being. Assess safety and tolerability of a combination of microdermabrasion (DG) procedures using a novel brightening pro-infusion serum (EC-DG) with a targeted at-home treatment regimen in subjects with mild to severe facial hyperpigmentation, including melasma, post-inflammatory hyperpigmentation, and dark spots. This 12-week, open-label study enrolled 18 subjects (Fitzpatrick skin types I-IV) who underwent 6 in-office DG procedures with EC-DG (one procedure administered biweekly), along with daily topical application of a brightening treatment serum and dark spot cream. End points included change from baseline across multiple skin quality attributes and the Melasma Area and Severity Index (MASI), self-assessment questionnaires, and tolerability assessments. The combination treatment was well tolerated and resulted in significant (p ≤ 0.05) improvements from baseline in radiance, tactile roughness, and moisturization/hydration immediately after the first treatment, in MASI score at day 3, and in overall hyperpigmentation at week 4. Most (94.1%) subjects were satisfied with treatment. DG procedures using EC-DG combined with a targeted at-home skincare regimen are effective and tolerable for treating facial hyperpigmentation across a broad range of skin types.

Comparing the Tribological Performance of Water-Based and Oil-Based Drilling Fluids in Diamond–Rock Contacts

Oil-based drilling fluids are usually assumed to provide lower friction compared to their water-based alternatives. However, clear evidence for this has only been presented for steel–rock and steel–steel contacts, which are representative of the interface between the drillstring and the borehole or casing. Another crucial interface that needs to be lubricated during drilling is that between the cutter (usually diamond) and the rock. Here, we present pin-on-disc tribometer experiments that show higher boundary friction for n-hexadecane-lubricated diamond–granite contacts than air- and water-lubricated contacts. Using nonequilibrium molecular dynamics simulations of a single-crystal diamond tip sliding on α-quartz, we show the same trend as in the experiments of increasing friction in the order: water < air < n-hexadecane. Analysis of the simulation results suggests that the friction differences between these systems are due to two factors: (i) the indentation depth of the diamond tip into the α-quartz substrate and (ii) the amount of interfacial bonding. The n-hexadecane system had the highest indentation depth, followed by air, and finally water. This suggests that n-hexadecane molecules reduce the hardness of α-quartz surfaces compared to water. The amount of interfacial bonding between the tip and the substrate is greatest for the n-hexadecane system, followed by air and water. This is because water molecules passivate terminate potential reactive sites for interfacial bonds on α-quartz by forming surface hydroxyl groups. The rate of interfacial bond formation increases exponentially with normal stress for all the systems. For each system, the mean friction force increases linearly with the mean number of interfacial bonds formed. Our results suggest that the expected tribological benefits of oil-based drilling fluids are not necessarily realised for cutter–rock interfaces. Further experimental studies should be conducted with fully formulated drilling fluids to assess their tribological performance on a range of rock types.Graphical

Influence of root canal taper on the measurement of two different electronic apex locators.

This research aimed to analyze the influence of root canal taper on the accuracy of two Electronic Apex Locators (EALs). Twenty-five disto-vestibular roots from extracted human upper molars belonging to the tooth bank were used in this study. To determine the File Position (FP), access was made using a spherical diamond tip #1014, and the crowns were sectioned using a diamond tip #3080. The initial anatomic file used was a size K #10, which was introduced into the root canal until its tip was visualized (foraminal patency) with the aid of a clinical microscope (16X magnification). Teeth without foraminal patency and calcifications were excluded from the study. Odontometric readings were performed using two different EALs (Root ZX II and Romiapex A-15), considering the electronic reference point 0.0 (apex) for each device. All measurements were taken in triplicate, and the arithmetic mean of the three values was used. Digital calipers were used to record the measurements, which were then entered into an Excel spreadsheet. After visual verification using file K #10, the canals were instrumented with a #25.01 file to standardize the apical region, then successively instrumented with files #25.02, #25.04, #25.06, #25.08, #25.10, and #25.12, with electronic odontometry checked after each instrumentation using #25.02. Measurement 0.0 was adopted, with error margins of ±0.5 and ±1.0. Discrepancies between visual and electronic readings were statistically analyzed using ANOVA and Bonferroni tests, with significance considered when P<0.05. Using the 0.0 mark and a ±1.0 error margin, it was observed that readings from the devices were similar in canals with different tapers (P>0.05), showing a tendency towards underestimation. However, when using the measurement variation margin of ±0.50, a statistically significant difference was found in the Romiapex A-15 group (P=0.0248) when comparing the results of the two EALs. Therefore, it was concluded that the canal taper did not significantly influence the accuracy of the evaluated EALs, using the reference point 0.0. When using the ±0.5 variation margin, the Romiapex A-15 device showed greater accuracy, and finally, at the ±1.0 error margin, both EALs exhibited excellent precision. Key words:Endodontics, Odontometry, Eletronic Apex Locator, Root Canal Preparation.

Preservando esmalte: remoção segura de resíduos de resina após descolagem de bráquetes ortodônticos

ABSTRACT In conventional orthodontics, the adhesive fixation of brackets plays an essential role in the success of the treatment. However, the removal of these devices at the end of the treatment can pose risks of excessive wear to the external surface of the enamel, especially when rotary instruments are indiscriminately used to remove the resin composite employed in cementation. Given that enamel is an inorganic tissue with no regenerative capacity, it becomes imperative to adopt conservative techniques to minimize unnecessary wear. This text aimed to discuss more conservative approaches, exploring the use of multilayered burs instead of diamond tips, and associating them with polishing rubbers, magnification, and consideration of the fluorescence characteristics of adhesive materials. These practices are intended to minimize impact and preserve the integrity of the enamel. Reflecting on the indiscriminate use of diamond tips for enamel polishing emerges as essential in modern dental practice.

Mechanical and tribological properties of (AlCoCrNiSi)100−xNx thin films

High entropy thin films of (AlCoCrNiSi)100−xNx were deposited on silicon wafers using a pulsed DC magnetron sputtering technique, with nitrogen gas flow ratios (RN) of 0, 0.33, and 0.50. The structure and properties of these films were analyzed for elemental composition, surface and cross-sectional morphologies, microstructure, roughness, and mechanical properties. The coatings were primarily composed of an amorphous structure with a minor presence of a BCC structure and exhibited periodic variations in chemical composition from the substrate to the free surface. An increase in RN enhances crystallinity of the materials. Nanoindentation results showed that the films deposited at RN = 0.50 displayed the highest hardness (10.7 ± 0.5 GPa) and reduced modulus (176 ± 5 GPa), which were the highest among the films. Microtribology testing was conducted using a 20 μm radius spherical diamond tip under ambient air and normal loads ranging from 0.5 to 9 mN. Worn surfaces were characterized using atomic force microscopy. The coefficient of friction was evaluated to investigate the elastic and plastic behaviors of films using Schiffmann’s model. The coating without nitrogen displayed a predominant plastic behavior during the initial cycles, while the coating deposited at RN = 0.33 demonstrated a more elastic behavior, particularly at lower loads.

Nano-Scratch and Micro-Scratch Properties of CrN/DLC and DLC-W Coatings

Abstract Diamond-like carbon (DLC) coatings are well known for their excellent adhesion to silicon wafers. However, they often exhibit poor adhesion properties on metallic substrates. Interlayers and metallic doping help improve the adhesion properties of DLC coatings on metallic substrates. In this study, both nano-scratch and micro-scratch were performed on chromium nitride (CrN)/DLC and tungsten doped DLC coating (DLC-W) coatings deposited on 920 HV DIN 16CrMn martensitic valve tappets. Nano-scratch was performed at 300 mN in a Hysitron nano-indenter, whereas micro-scratch was performed at 1–50 N using a CETR-UMT tribometer. The 3-D images and 2-D longitudinal and transversal profiles of the nano-scratch and micro-scratch were obtained using atomic force microscopy and 3-D optical profilometry, respectively. The scratch hardness equation was used to estimate the scratch hardness of the coatings. Experimental and theoretical values for the volume removed and the specific wear rates for the micro-scratch and nano-scratch of CrN/DLC and DLC-W coatings were estimated. The coefficients of friction (COF) obtained during the micro-scratch tests were very similar for both coatings. The same happened with the COF measured during the nano-scratch. The maximum COF in both cases reached 0.14. The wider and deeper penetration of the indenter for the DLC-W coating was mainly due to the lower hardness of the multilayered coating, composed of alternating nanometric thick amorphous carbon and tungsten carbide (WC) layers. The greater wear observed for the DLC-W coating system could also be attributed to the abrasive effect of detached WC nanoparticles abrasively acting during the contact of the diamond tip with the DLC coating. The experimental and theoretical values for the volume removed and the specific wear rates indicate a lower volume removal and specific wear rate for CrN/DLC because of higher hardness and better load-carrying capacity, contrary to DLC-W, which presents higher volume removal and specific wear rate because of its lower hardness.

Atomic-scale simulations of constant-load scratching of gallium nitride under monolayer graphene lubrication

Reducing the friction and wear of nanodevices are the key to improve the performance of micro/nanoelectromechanical systems (M/NMES). In this paper, a gallium nitride (GaN) substrate coated with a single layer of graphene was constructed using molecular dynamics (MD) simulation, and then scratched with a diamond tip under a constant load. The results showed that graphene can improve the abrasion resistance and hardness of the substrate, and reduce surface wear, temperature, potential energy, and subsurface damage. However, the effect of graphene to inhibit the generation of dislocations within the substrate was not obvious. In addition, the substrate surface exhibited super-lubrication at low load scratching. As the load increased, the friction and wear on the substrate surface increased. The application of graphene can extend the load range over which the substrate undergoes full elastic deformation, which means a greater range of super-lubrication. The protective and lubricating effects of graphene provide guidance for the design of GaN-based nanodevices.

The influence of substrate temperature on the structure and optical properties of NiO thin films deposited using the magnetron sputtering in the layer-by-layer growth regime

Vanadium oxide (VO x ) thin films are promising materials, exhibiting electrical, optical, and mechanical properties highly tunable by processing and structure. This work uniquely applying atomic force microscopy (AFM) nanoindentation correlated with X-ray diffractometry and Raman spectroscopy structural analysis to investigate the intricate connections between VO x post-annealing, phase composition, and resulting nanoscale mechanical functionality. Utilizing an ultra-sharp diamond tip as a nanoscale indenter, indentation is performed on VO x films with systematic variations in structure – from mixed insulating oxides to VO 2 -dominated films. Analytical modeling enables extraction of hardness and elastic modulus with nanoscale resolution. Dramatic mechanical property variations are observed between compositions, with order-of-magnitude increases in hardness and elastic modulus for the VO 2 -rich films versus insulating oxides. Ion implantation further enhances nanomechanical performance through targeted defect engineering. Correlating indentation-derived trends with detailed structural and morphological characterization elucidates explicit structure-property relationships inaccessible by other techniques. The approach provides critical mechanics-driven insights into links between VO x synthesis, structure evolution, and property development. Broader implementation will accelerate processing optimization for electronics and advanced fundamental understanding of nanoscale structure-functionality relationships

Nanomechanical properties of polycrystalline vanadium oxide thin films of different phase composition

Vanadium oxide (VO x ) thin films are promising materials, exhibiting electrical, optical, and mechanical properties highly tunable by processing and structure. This work uniquely applying atomic force microscopy (AFM) nanoindentation correlated with X-ray diffractometry and Raman spectroscopy structural analysis to investigate the intricate connections between VO x post-annealing, phase composition, and resulting nanoscale mechanical functionality. Utilizing an ultra-sharp diamond tip as a nanoscale indenter, indentation is performed on VO x films with systematic variations in structure – from mixed insulating oxides to VO 2 -dominated films. Analytical modeling enables extraction of hardness and elastic modulus with nanoscale resolution. Dramatic mechanical property variations are observed between compositions, with order-of-magnitude increases in hardness and elastic modulus for the VO 2 -rich films versus insulating oxides. Ion implantation further enhances nanomechanical performance through targeted defect engineering. Correlating indentation-derived trends with detailed structural and morphological characterization elucidates explicit structure-property relationships inaccessible by other techniques. The approach provides critical mechanics-driven insights into links between VO x synthesis, structure evolution, and property development. Broader implementation will accelerate processing optimization for electronics and advanced fundamental understanding of nanoscale structure-functionality relationships

Effect of hydrogen concentration on the friction evolution mechanism of few-layer graphene: A molecular dynamics study in nanoscratch processes

This article explored the friction evolution mechanism of graphene under different hydrogen concentrations and scratch depths based on molecular dynamics. In a vacuum, graphene exhibits excellent frictional properties when the scratch depth is less than the layer distance of graphene. However, as the depth increases, the diamond tip contacts more CC bonds, and the phenomenon of fracture and recombination of CC bonds in the graphene layer intensifies, increasing surface friction. In a low concentration of hydrogen environment, compared with the friction in a vacuum, it increases due to the interlocking effect of the protruding hydrogen atoms on the diamond tip and the scratch path. As the concentration of the hydrogen environment increases, the friction force does not increase monotonically. In addition, in a hydrogen environment, the stability of the planar structure of graphene will be weakened, thereby affecting the wrinkling effect and wear path.

Combining Diamond-Tip Dermabrasion Treatments and Topical Skincare in Participants with Dry, Hyperpigmented, Photodamaged or Acne-Prone/Oily Facial Skin: A Clinical Usage Study.

An in-office diamond tip microdermabrasion device (DG) was designed to simultaneously exfoliate, extract, and infuse topical cosmetic serums into the skin to improve its appearance. Combining in-office procedures with take-home skincare may enhance treatment outcomes. This study aimed to assess the efficacy of a novel combination of DG treatments with a take-home cosmetic skincare regimen (DGR) to address facial dryness, hyperpigmentation, photodamage, or acne-prone/oily skin. In this 12-week, open-label, single-center study, participants were assigned to 1 of 4 groups according to skin presentation: dry, hyperpigmented, photodamaged, or acne-prone/oily. All participants received 6 bi-weekly DG treatments with tailored DGR topical products. During the DG treatment, the dry, hyperpigmented, photodamaged, and acne-prone/oily groups received hydrating, brightening, antioxidant, and pore-clarifying serums, respectively. Study endpoints included investigator grading, standardized photography, and participant questionnaires. Sixteen participants aged 22 to 70 years with Fitzpatrick Skin Types I-V completed the study. Immediately after the first DG treatment, significant improvements in dryness, radiance, texture, photodamage, and fine lines were achieved (P<0.01). At 72 hours, significant improvements were maintained in all these parameters except fine lines (P<0.05). The DG and DGR combination provided significant long-term improvements at week 12 compared to baseline for dryness, radiance, texture, hyperpigmentation, photodamage, skin tone unevenness, and periocular/perioral fine lines (P<0.05). The combination of DG and DGR showed significant immediate and long-term improvements in skin appearance. These results show that the DG and DGR combination is a well-tolerated and effective intervention to enhance different aspects of facial skin quality.

A collocation grids method for determining pad conditioning coverage and density under long time conditioning process

In the Chemical Mechanical Planarization (CMP) process for semiconductor wafer fabrication, the polishing pads need to be continuously conditioned to ensure appropriate surface characteristics, which causes wear to the pads and subsequently affects the quality of CMP. Tuning the conditioning parameters is typically determined through expensive experimental trials. An effective pad conditioning simulation platform to model the conditioning process can significantly reduce the time and cost of the process development cycle. However, to mimic the real-life pad conditioning process, the simulation needs to track hundreds or even thousands of micro-sized diamond tips to check the contact points on the pads continuously during the conditioning process that spans many hours. This makes simulating pad conditioning over the entire pad for the duration of the process very challenging. In this work, we propose a low-cost numerical approach for simulating the pad conditioning process based on a collocation grid method and parametric mapping. Important numerical aspects such as time step size characterization, jump-over ratio, simulation efficiency, and error control are systematically analysed and discussed. Several benchmark examples are performed to evaluate the effectiveness of the proposed method.