Understanding the carrier transport mechanism of transparent conducting oxides is crucial for its application in optoelectronic devices. Although, electrical transport mechanisms of various trivalent cation doped ZnO films have been reported adequately, a substantial study is needed to understand the transport mechanism in ZnO doped with higher valence (>+3) dopants. Unlike Al, In and Ga doped ZnO where metal-insulator transition is commonly observed, in this study, the crossover amongst band and various hopping mechanisms has been observed in the temperature range of 300–10 K in Mo doped ZnO films deposited at various substrate temperatures. All the films show electrons as the majority charge carriers and notably, the film deposited at 573 K shows the highest conductivity value of 167.22 (Ω.cm)−1. In-depth analyses of the conduction mechanism reveal grain boundary scattering dominated band conduction at and not far below the room temperature, which is shifted towards nearest neighbor hopping (NNH), and then to Mott variable range hopping (VRH) type of conductions as the temperature is decreased further. Unfamiliarly, a modified Efros-Shklovskii (ES) VRH type of conduction mechanism is shown to prevail in the lowest measured temperature range (∼30–10 K). Unprecedentedly, it is demonstrated here that the activation energies for various conduction mechanisms are higher at lower vacuum condition (∼10−1 mbar) as compared to those measured at higher vacuum condition (∼10−3 mbar) implying an added role of the surface traps in the charge transport process. The temperature dependent conductivity and X-ray photoelectron spectroscopy (XPS) studies proclaim that the film deposited at 573 K possess fewer defects related disorder for carrier localization as compared to the films deposited at 523 K and 698 K.
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