In this work, we show how diffraction-based chemically sensitive dark-field transmission electron microscopy (DFTEM) reveals the presence of Bi hetero-antisites (BiGa) at the interface of Ga(As,Bi)/(Al,Ga)As quantum well (QW) structures grown by molecular beam epitaxy on GaAs(001). The presence of BiGa is demonstrated by the striking appearance of “dark-lines” at the interfaces under two-beam DFTEM imaging conditions using the (002) diffraction spot. Additional analytical scanning (S)TEM procedures reveal Ga depletion and Bi accumulation at the exact position of the dark-lines, consistent with BiGa at this location. The precise location of the dark-lines agrees with the position of growth interruptions made to adjust substrate temperature and the As/Ga flux ratio and, most importantly, the realization of a Bi pre-treatment before QW growth. We believe the Bi pre-treatment may have favored formation of BiGa hetero-antisites. We validate the use of g002 DFTEM for further investigations of the intricate bismuth incorporation into the lattice and its dependence on the growth conditions. Finally, g002 DFTEM imaging is positioned as a very powerful technique for the detection of point defects in general in materials with the zinc-blende crystal structure, beyond dilute bismide alloys.
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