• O impedance related to radial diffusion and restricted planar diffusion; for tip closely to hole surface-Cyclopore membrane. • Equivalent circuits including Cole-Cole diffusion impedance (Z M ), Cole-Davidson type impedance (Z W ) and O impedance (Z O ) proposed for different separation distances. • Difference in diffusion impedance on hole and that on flat surface on Cyclopore membrane for estimating membrane thickness. A new, feasible, on-line method was proposed to determine Cyclopore polycarbonate membrane thickness by scanning electrochemical impedance microscopy (SEIM) technique. The thickness is 8.4 µm, which close to the report technical data. Three effective impedances for equivalent circuit model including Cole-Cole diffusion impedance, Cole-Davidson type impedance and O impedance were firstly proposed for radial diffusion and restricted planar diffusion mode when tip electrode on flat or hole surface in Cyclopore membrane. Data analysis results showed that restricted planar diffusion emerged when tip electrode approach tightly to hole surface. Additionally, SEIM responses on the flat and hole surface were compared and could be applied for topographic imaging in the future work.
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