X-ray crystal truncation rod (CTR) measurements are commonly used to analyze surface or interfacial atomic structures quantitatively. However, it is difficult to expand the measurement range to determine three-dimensional atomic structures in real time. We developed a method for CTR measurements that involves the simultaneous intensity measurements of X-rays and electron diffraction under molecular beam epitaxial conditions. Using the proposed method, we observed the formation of liquid gallium ordering on the GaN(0001) surface and determined the ordered structure within each layer.
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