Ultra-compact high-efficiency broadband interlayer couplers based on random gratings are inversely designed by particle swarm optimization algorithm. The optimal structure is obtained by adjusting the pixel state to achieve a maximum coupling efficiency in 1550 nm band. The two-layer coupler consists of two vertically overlapping inverse taper waveguides with random gratings. With a short coupling length of 4 μm and interlayer gap of 200 nm, the coupling efficiency reaches 93% at a wavelength of 1550 nm, and exceeds 90% over a broadband wavelength range of 1503∼1600 nm, for both TE and TM mode. The coupling efficiency can maintain no less than 90% at a large waveguide misalignment of >100 nm, exhibiting high process error tolerance. The performance of the 4 μm-long inverse-designed coupler is higher than the conventional waveguide with a much large length of 10 μm. To achieve longer transmission distance, a tri-layer interlayer coupler is proposed by cascading two bi-layer couplers, which exhibits a remarkable coupling efficiency of 85% at a gap of 600 nm, more than 30 times higher than the bi-layer structure. This work may pave the way for the development of ultra-compact high-performance interlayer couplers supporting high-integration Si-based photonic integrated circuits.
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