Small-scale mechanical testing (SSMT) is of great interest in the nuclear materials community as it permits the use of surrogate irradiation techniques, such as ion beam irradiation when investigating the impact of irradiation damage on mechanical properties. The design of a micro-electro-mechanical-system (MEMS) micro-tensile stage is demonstrated to enable micron-sized specimen testing up to failure under ambient and reactor-relevant temperatures. Copper and Zircaloy-2 microscale specimens, having gauge lengths of 200 μm, gauge widths of 48 μm, and specimen-dependent constant gauge thicknesses of 10 μm to 26 μm, are fabricated using micro-wire electrical discharge machining and focused ion beam milling. From each gauge section, microstructure data is captured prior to testing using electron backscatter diffraction analysis, and an optimized digital image correlation speckle pattern is deposited on the specimen surface. The speckle pattern is tracked during deformation and post-processed to obtain strain-field evolution maps throughout deformation. Strain maps provide a means to account for and explain microstructure-dependent features observed in the captured stress-strain curves. The combination of using micro-wire electrical discharge machining, focused ion beam cleaning, and ion beam induced platinum deposition for micron-sized specimen preparation as well as utilizing microfabrication techniques to fabricate an integrated heating microtensile load frame reported herein serve as a demonstration of SSMT approaches that can be adopted to tackle challenging problems in nuclear materials research, including but not limited to the effects of ion beam irradiation on mechanical performance and providing experimental data to support small-scale modeling efforts of embrittling precipitates or radiation-induced segregation.