Conventional Top-down Methods Research Articles

Fabrication of slanted gratings by using glancing angle deposition

Slanted gratings, commonly used for manipulating light in various applications, are typically fabricated using conventional top-down methods. However, these methods have limitations on material choice. This paper explores the use of glancing angle deposition (GLAD) to fabricate slanted gratings with various materials and slant angles on silicon (Si) and quartz (SiO2) substrates. The process involves the first step of creating a template using electron beam lithography, lift-off, and dry etching, and the second step of electron beam evaporation at a glancing angle on the prefabricated template. The template consists of grating structures with very shallow trenches. Different materials, such as chromium (Cr), copper (Cu), aluminum oxide (Al2O3), and titanium oxide (TiO2), were used in the GLAD process to create slanted grating structures on Si or SiO2 substrates, showcasing their versatility. Here, the formation of the slanted grating is due to the shadowing effect that leads to deposition onto the protruded grating lines but not into the trench. Using TiO2 as the source material, the GLAD technique can produce slanted gratings with various angles by adjusting the deposition angle. The optical characteristics of the slanted grating prepared using GLAD were verified through simulations with COMSOL software, confirming its excellent light guide performance.

Saccharide-Passivated Graphene Quantum Dots from Graphite for Iron(III) Sensing and Bioimaging

So far, it is difficult to prepare graphene quantum dots (GQDs) with high quantum yield (QY), high biocompatibility, and high yield by conventional top-down methods. We describe here a facile strategy to synthesize GQDs in NaOH/N-methylpyrrolidone (NMP) under sonication, which was subsequently passivated by saccharide to improve their stability. In the synthesis process, the GQDs were predominantly generated through exfoliation of graphite sheets. NaOH boosted the formation of GQDs by intercalation into the layer of graphite sheets, and the yield could be effectively increased to 7.54% with a prolonged sonication time and enhanced power, which was different from traditional methods. Due to the structure of the GQDs being similar to that of pristine graphene, GQDs possessed relatively high QYs, up to 19.12%. With further functionalization by hydrophilic saccharide, xylan-passivated GQDs with better stability and QY were applied for the detection of Fe3+ in the range of 0–75 μM with a limit of detection of 92.8 nM. Furthermore, chitosan-oligosaccharide (COS)-passivated GQDs showed good performance in cell imaging. Therefore, this work provides an efficient method to prepare GQDs and presents their promising application in ferroptosis after passivation.

High-performance p-channel transistors on flexible substrate using direct roll transfer stamping

Flexible electronics with high-performance devices are crucial for transformative advances in several emerging and traditional applications. To address this need, herein we present p-type silicon (Si) nanoribbons (NR)-based high-performance field-effect transistors (FETs) developed using an innovative direct roll transfer stamping (DRTS) process. First, ultrathin Si NRs (∼70 nm) are obtained from silicon on insulator wafers using the conventional top-down method, and then the DRTS method is employed to directly place the NRs onto flexible substrates at RT. The NRFETs are then developed following the RT fabrication process which includes deposition of high-quality SiN x dielectric. The fabricated p-channel transistors demonstrate high linear mobility ∼100 ± 10 cm2 V−1 s−1, current on/off ratio >104, and low gate leakage (<1 nA). Further, the transistors showed robust device performance under mechanical bending and at a wide temperature range (15 °C–90 °C), showing excellent potential for futuristic high-performance flexible electronic devices/circuits.

Study on Increase in Stability of Floating and Underground Extension Method through Slab Pre-Construction

The development of underground spaces in urban areas plays a crucial role in the regeneration and sustainability of cities. However, the conventional underground excavation works in metropolises limit the use of the ground facilities owing to stability, noise, and vibration problems, which may cause huge economic damage. In this study, a method of pre-constructing slabs of underground facilities was analyzed to improve the stability of the floating and underground extension method, even during the use of the target building. First, a numerical simulation was conducted to compare the stability of the top-down method with slab pre-construction with that of the conventional top-down method. Then, the stability of the test bed was checked by applying this construction method to the field. As a result, the top-down method with slab pre-construction significantly improved the stability of the target building by preventing the buckling of the columns and supporting members. The increase in the displacement of existing columns and supporting members was controlled after the pre-construction of the slab. In addition, the crack width and ground settlement were stable within the management standards at the field. Thus, this construction method is expected to be crucial in pursuing urban regeneration and sustainability through the efficient development of underground spaces.

Dry-Etchable Molecular Layer-Deposited Inhibitor Using Annealed Indicone Film for Nanoscale Area-Selective Deposition.

In semiconductor production, the technology node of a device is becoming extremely small below 5 nm. Area selective deposition (ASD) is a promising technique for creating improved overlay or self-alignment, remedying a conventional top-down method. However, the conventional materials and process (self-assembled monolayer, polymer and carbon film fabricated by chemical vapor deposition, and spin coating) for ASD are not suitable for highly conformal deposition. Thus, we investigated a new strategy to deposit conformal films in ASD by molecular layer deposition (MLD). The MLD processes were conducted for an indicone film deposited by INCA-1 (bis(trimethysily)amidodiethyl indium) and hydroquinone (HQ), as well as an alucone film deposited by TMA (trimethylaluminum) and HQ. After thermal heat treatment of the MLD films, variations in thickness, refractive index, and constituent elements of the annealed MLD films were investigated. The indicone film was used as an inhibiting layer for ASD and was etchable with a dry-etching process. The reactive ion etching process on annealed indicone film was optimized according to plasma power, gas concentration, and working pressure. Ruthenium (Ru) ALD was then performed on the annealed MLD films to investigate nucleation delaying cycles and inhibiting properties. A patterned substrate with an MLD/Si line was created via the RIE process, which was allowed to observe the selectivity of the annealed MLD films. In addition, a patterned substrate of SiO2/annealed indicone/Mo was used to investigate the Ru-selective ALD at the nanoscale. The Ru thin film was selectively deposited on the Mo side-wall surface of a 3D trench structure. The growth of the Ru film was inhibited selectively on an annealed indicone surface of approximately 5 nm.

Direct bottom-up synthesis of size-controlled monodispersed single-layer magnesium hydroxide nanosheets modified with tripodal ligands.

Conventional top-down methods for preparing inorganic nanosheets possess fundamental challenges of morphological control. Herein, the direct synthesis of organically modified single-layer magnesium hydroxide nanosheets with narrow size distribution was achieved by the in situ modification of magnesium hydroxide with a tripodal ligand, tris(hydroxymethyl)aminomethane.

Asphalt as raw material of graphene-like resources

In search of alternate procedures and raw materials to manufacture graphene oxide and graphene derivatives that could be scaled up to be industrially implemented, we have developed a simple thermal treatment of petroleum asphalt that gives rise to graphite oxide-like materials in high yield. Subsequent treatment of the oxide at higher temperature gives rise to graphene-like products similar to those obtained by conventional top-down methods based on graphite. The method offers economy in manufacturing time and energy spent, allowing the valorization of a waste material.

High Thermal Conductivity of Bulk Epoxy Resin by Bottom-Up Parallel-Linking and Strain: A Molecular Dynamics Study

The ultra-low thermal conductivity (~0.3 Wm-1K-1) of amorphous epoxy resins significantly limits their applications in electronics. Conventional top-down methods e.g. electrospinning usually result in aligned structure for linear polymers thus satisfactory enhancement on thermal conductivity, but they are deficient for epoxy resin polymerized by monomers and curing agent due to completely different cross-linked network structure. Here, we proposed a bottom-up strategy, namely parallel-linking method, to increase the intrinsic thermal conductivity of bulk epoxy resin. Through equilibrium molecular dynamics simulations, we reported on a high thermal conductivity value of parallel-linked epoxy resin (PLER) as 0.80 Wm-1K-1, more than twofold higher than that of amorphous structure. Furthermore, by applying uniaxial tensile strains along the intra-chain direction, a further enhancement in thermal conductivity was obtained, reaching 6.45 Wm-1K-1. Interestingly, we also observed that the inter-chain thermal conductivities decrease with increasing strain. The single chain of epoxy resin was also investigated and, surprisingly, its thermal conductivity was boosted by 30 times through tensile strain, as high as 33.8 Wm-1K-1. Our study may provide a new insight on the design and fabrication of epoxy resins with high thermal conductivity.

Nanoparticles with tunable shape and composition fabricated by nanoimprint lithography

Cone-like and empty cup-shaped nanoparticles of noble metals have been demonstrated to provide extraordinary optical properties for use as optical nanoanntenas or nanoresonators. However, their large-scale production is difficult via standard nanofabrication methods. We present a fabrication approach to achieve arrays of nanoparticles with tunable shape and composition by a combination of nanoimprint lithography, hard-mask definition and various forms of metal deposition. In particular, we have obtained arrays of empty cup-shaped Au nanoparticles showing an optical response with distinguishable features associated with the excitations of localized surface plasmons. Finally, this route avoids the most common drawbacks found in the fabrication of nanoparticles by conventional top-down methods, such as aspect ratio limitation, blurring, and low throughput, and it can be used to fabricate nanoparticles with heterogeneous composition.

Effects of surface passivation on top-down ZnO nanowire transistors

We fabricated unpassivated and passivated zinc oxide (ZnO) nanowire field effect transistors (NWFETs) using conventional top-down method of remote plasma atomic layer deposition and anisotropic dry etch. This paper investigates the effect of Al2O3 passivation on the electrical characteristics of the ZnO NWFETs. Measured unpassivated ZnO NWFETs show a threshold voltage of 6.5V, drain current on/off ratio of 106 and field effect mobility of 31.4cm2/Vs. Passivated ZnO NWFETs demonstrate threshold voltage shift to −10V, drain current on/off ratio of 104 and improvement of mobility of 35.5cm2/Vs. The passivated device results indicate suitability for biosensing applications.

Towards Sustainability: New Approaches to Nano-Drug Preparation

The conversion of drugs into drug nanoparticles (nano-drugs) represents a feasible method to enhance bioavailability of otherwise sparingly soluble-drugs. Nano-drugs enhance bioavailability through the improvement of dissolution rate and saturation solubility of drugs, by virtue of their small sizes. Nano-drugs available in the market are usually produced by top-down methods, such as wet milling and high pressure homogenization. These conventional top-down methods, however, suffer from high energy and time requirement, as well as wide and inconsistent nano-drug size distribution. Furthermore, commercially available nano-drugs are predominantly crystalline while amorphous nano-drugs are largely neglected despite their propensity to generate high saturation solubility. In this review, nonconventional methods to prepare crystalline and amorphous nano-drugs are discussed, with the bioavailability enhancing characteristics highlighted. Both top-down and bottom-up methods are covered, finally, a sustainability-based perspective comparing amorphous and crystalline nano-drugs is presented.

Butterfly scales as bionic templates for complex ordered nanophotonic materials: A pathway to biomimetic plasmonics

In this paper we propose a possible use of butterfly scales as templates for ordered 2D or 3D nanophotonic materials, with complexity not easily reproducible by conventional micro/nanofabrication methods. Functionalization through laminar nanocompositing is utilized to impart novel properties to the biological scaffold. An extremely wide variability of butterfly scale forms, shapes, sizes and fine structures is observed in nature, many of them already possessing peculiar optical properties. Their nanophotonic functionalization ensures a large choice of forms and functions, including enhanced light localization, light and plasmon waveguiding and general metamaterial behavior, to mention a few. We show that one is able to achieve a combination of plasmonics and bionics, resulting in functionalities seldom if ever met in nature. As an illustration we have analyzed the photonic properties of the nanostructured scales on the wings of Purple Emperor butterflies Apatura ilia, Apatura iris and Sasakia charonda. Their intricate nanometer-sized structures produce remarkable ultraviolet-blue iridescence, spectrally and directionally narrow. We present our analysis of their plasmonic/nanophotonic functionalization including preliminary calculations and initial experimental results. As a simple example, we used radiofrequent sputtering to produce nanoaperture-based plasmonic structures at a fraction of the cost and necessary engineering efforts compared to the conventional top-down methods. We conclude that the described pathway to biomimetic plasmonics offers potentials for significant expansion of the nanophotonic and nanoplasmonic material toolbox.

Electromagnetic Energy Transport in Nanoparticle Chains via Dark Plasmon Modes

Using light to exchange information offers large bandwidths and high speeds, but the miniaturization of optical components is limited by diffraction. Converting light into electron waves in metals allows one to overcome this problem. However, metals are lossy at optical frequencies and large-area fabrication of nanometer-sized structures by conventional top-down methods can be cost-prohibitive. We show electromagnetic energy transport with gold nanoparticles that were assembled into close-packed linear chains. The small interparticle distances enabled strong electromagnetic coupling causing the formation of low-loss subradiant plasmons, which facilitated energy propagation over many micrometers. Electrodynamic calculations confirmed the dark nature of the propagating mode and showed that disorder in the nanoparticle arrangement enhances energy transport, demonstrating the viability of using bottom-up nanoparticle assemblies for ultracompact opto-electronic devices.