Control Of Microelectromechanical Systems Research Articles

Parametric resonance of multi-frequency excited MEMS based on homotopy analysis method

The nonlinear dynamics and control of micro electromechanical systems (MEMS) is an important topic at present and homotopy analysis method (HAM) is an effective semi-numerical and semi-analytical method for solving strongly nonlinear problems. In this paper, the parametric resonance of MEMS with multi-frequency excitation is studied by HAM. Firstly, the differential equation of electrostatically driven microbeam is processed by Taylor expansion, and it is transformed into the parametric motion model with multi-frequency excitation. Then, the approximate solution and amplitude–frequency response equation of the system are obtained by HAM, and compared with the numerical solution. Finally, the influence of direct current (DC) and alternating current (AC) on principal parametric resonance and superharmonic resonance is discussed. The results show that HAM is an effective method to analyze the parametric vibration of multi-frequency excitation system, and the amplitude–frequency response curve of microbeam about parametric motion depends on the time scale in high DC and high AC state. This study effectively extends the application of HAM in parametric resonance, which is of great significance to the study of nonlinear vibration of MEMS.

Optically Actuated Carbon Nanocoils

Optical manipulation on microscale and nanoscale structures opens up new possibilities for assembly and control of microelectromechanical systems and nanoelectromechanical systems. Static optical force induces constant displacement while changing optical force stimulates vibration of a microcantilever/nanocantilever. The vibratory behavior of a single carbon nanocoil cantilever under optical actuation is investigated. A fitting formula to describe the laser-induced vibration characteristics is deduced based on a classical continuum model, by which the resonance frequency of the carbon nanocoil can be determined directly and accurately. This optically actuated vibration method could be widely used in stimulating quasi-1D micro/nanorod-like materials, and has potential applications in micro-/nano-opto-electromechanical systems.